H ELECTRICITY
H01 ELECTRIC ELEMENTS
H01L SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00 Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02 Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/04 the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
H01L21/18 the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials