H01L21/76202

Method for manufacturing a lateral double-diffused metal-oxide-semiconductor (ldmos) transistor

A semiconductor device can include: a substrate having a first doping type; a first well region located in the substrate and having a second doping type, where the first well region is located at opposite sides of a first region of the substrate; a source region and a drain region located in the first region, where the source region has the second doping type, and the drain region has the second doping type; and a buried layer having the second doping type located in the substrate and below the first region, where the buried layer is incontact with the first well region, where the first region is surrounded by the buried layer and the first well region, and the first doping type is opposite to the second doping type.

ENHANCED CAPACITOR FOR INTEGRATION WITH METAL-OXIDE SEMICONDUCTOR FIELD-EFFECT TRANSISTOR

A capacitor is provided for integration with a MOSFET device(s) formed on the same substrate. The capacitor comprises a first plate including a doped semiconductor layer of a first conductivity type, an insulating layer formed on an upper surface of the doped semiconductor layer, and a second plate including a polysilicon layer formed on an upper surface of the insulating layer. An inversion layer is formed in the doped semiconductor layer, beneath the insulating layer and proximate the upper surface of the doped semiconductor layer, as a function of an applied voltage between the first and second plates of the capacitor. At least one doped region of a second conductivity type, opposite the first conductivity type, is formed in the doped semiconductor layer adjacent to a drain and/or source region of the first conductivity type formed in the MOSFET device. The doped region is electrically connected to the inversion layer.

Semiconductor device and method of manufacturing the same

A semiconductor device has a first area in which first and third semiconductor elements are formed, a second area in which second and fourth semiconductor elements are formed, and a third area located between the first and second areas. On the first to fourth semiconductor elements, a multilayer wiring layer including first and second inductors is formed. A through hole penetrating the semiconductor substrate is formed in the third area, and a first element isolation portion protruding from a front surface side of the semiconductor substrate toward a back surface side of the semiconductor substrate is formed in the through hole. Further, on the back surface side of the semiconductor substrate, the semiconductor substrate in the first area is mounted on the first die pad, and the semiconductor substrate in the second area is mounted on the second die pad.

SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME
20230013215 · 2023-01-19 ·

Embodiments relate to a semiconductor structure and a method for fabricating the same. The method includes: providing a substrate, where a plurality of first trench initial structures are formed on the substrate, and the first trench initial structures extend along a first direction; and sequentially performing a thermal oxidation process and an oxide etching process on trench walls of the first trench initial structures to form first trenches whose trench widths satisfy a first preset dimension. The semiconductor structure and the method for fabricating the same can precisely control a trench width dimension of a trench, to form an isolation structure having a precise dimension in the trench, thereby effectively reducing parasitic capacitance and improving production yield and electrical properties of the semiconductor structure.

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF

A method for fabricating semiconductor devices is disclosed. The method includes forming a recess along a top surface of a semiconductor substrate. The method includes forming a nitride-based spacer layer extending along a first sidewall of the recess. The method includes forming a field oxide layer in the recess extending along a bottom surface of the recess, while a lateral tip of the field oxide layer is blocked from extending into any portion of the semiconductor substrate other than the recess by the nitride-based spacer layer.

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
20230010077 · 2023-01-12 ·

A method of manufacturing a semiconductor device includes: forming a base oxide film on a surface of a silicon semiconductor substrate (P-type well region); forming a thick film portion provided along a boundary C between an activation region A and an element isolation region B and having at least a predetermined width W from the boundary C toward the element isolation region B and a thin film portion having a film thickness smaller than a film thickness t.sub.a of the thick film portion in the activation region A and the element isolation region B other than the thick film portion on the base oxide film; forming a silicon nitride film on surfaces of the thick film portion and the thin film portion; and selectively removing the silicon nitride film in the element isolation region B through an over-etching process.

Semiconductor packaging device comprising a shield structure

Various embodiments of the present application are directed towards a semiconductor packaging device including a shield structure configured to block magnetic and/or electric fields from a first electronic component and a second electronic component. The first and second electronic components may, for example, be inductors or some other suitable electronic components. In some embodiments, a first IC chip overlies a second IC chip. The first IC chip includes a first substrate and a first interconnect structure overlying the first substrate. The second IC chip includes a second substrate and a second interconnect structure overlying the second substrate. The first and second electronic components are respectively in the first and second interconnect structures. The shield structure is directly between the first and second electronic components. Further, the shield structure substantially covers the second electronic component and/or would substantially cover the first electronic component if the semiconductor packaging device was flipped vertically.

Electrostatic discharge protection devices and methods of forming electrostatic discharge protection devices

An electrostatic discharge (ESD) protection device may be provided, including a substrate having a conductivity region arranged therein, a first terminal region and a second terminal region arranged within the conductivity region, and a field distribution structure. The field distribution structure may include an intermediate region arranged within the conductivity region between the first terminal region and the second terminal region, an isolation element arranged over the intermediate region, and a first conductive plate and a second conductive plate arranged over the isolation element. The first conductive plate may be electrically connected to the first terminal region and the second conductive plate may be electrically connected to the second terminal region.

Power Device and Manufacturing Method Thereof

A power device includes: a semiconductor layer, a well region, a body region, a gate, a sub-gate, a source, a drain, and an electric field adjustment region. The sub-gate is formed above a top surface of the semiconductor layer, wherein a portion of the well region is located vertically beneath the sub-gate. The sub-gate is not directly connected to the gate. The electric field adjustment region has a conductivity type which is opposite to that of the well region. The electric field adjustment region is formed beneath and not in contact with the top surface of the semiconductor layer. The electric field adjustment region is located in the well region of the semiconductor layer, and at least a portion of the electric field adjustment region is located vertically beneath the sub-gate.

LATERALLY-DIFFUSED METAL-OXIDE-SEMICONDUCTOR DEVICES WITH A MULTIPLE-THICKNESS BUFFER DIELECTRIC LAYER
20230059226 · 2023-02-23 ·

Structures for a laterally-diffused metal-oxide-semiconductor device and methods of forming a structure for a laterally-diffused metal-oxide-semiconductor device. The structure includes a drift well in a semiconductor substrate, source and drain regions in the semiconductor substrate, a gate dielectric layer on the semiconductor substrate, and a buffer dielectric layer on the semiconductor substrate over the drift well. The buffer dielectric layer includes a first side edge adjacent to the drain region, a second side edge adjacent to the gate dielectric layer, a first section extending from the second side edge to the first side edge, and a plurality of second sections extending from the second side edge toward the first side edge. The first section has a first thickness, and the second sections have a second thickness less than the first thickness. A gate electrode includes respective portions that overlap with the buffer dielectric layer and with the gate dielectric layer.