Patent classifications
H01L21/765
POWER DEVICE AND MANUFACTURING METHOD THEREOF
A power device includes: a semiconductor layer, a well region, a body region, a gate, a source, a drain, a first salicide block (SAB) layer and a second SAB layer. The first SAB layer is formed on a top surface of the semiconductor layer, and is located between the gate and the drain, wherein a part of the well is located vertically below and in contact with the first SAB layer. The second SAB layer is formed vertically above and in contact with the first SAB layer.
POWER DEVICE AND MANUFACTURING METHOD THEREOF
A power device includes: a semiconductor layer, a well region, a body region, a gate, a source, a drain, a first salicide block (SAB) layer and a second SAB layer. The first SAB layer is formed on a top surface of the semiconductor layer, and is located between the gate and the drain, wherein a part of the well is located vertically below and in contact with the first SAB layer. The second SAB layer is formed vertically above and in contact with the first SAB layer.
POWER DEVICE AND MANUFACTURING METHOD THEREOF
A power device includes: a semiconductor layer, a well region, a body region, a gate, a source, a drain, a field oxide region, and a self-aligned drift region. The field oxide region is formed on an upper surface of the semiconductor layer, wherein the field oxide region is located between the gate and the drain. The field oxide region is formed by steps including a chemical mechanical polish (CMP) process step. The self-aligned drift region is formed in the semiconductor layer, wherein the self-aligned drift region is entirely located vertically below and in contact with the field oxide region.
POWER DEVICE AND MANUFACTURING METHOD THEREOF
A power device includes: a semiconductor layer, a well region, a body region, a gate, a source, a drain, a field oxide region, and a self-aligned drift region. The field oxide region is formed on an upper surface of the semiconductor layer, wherein the field oxide region is located between the gate and the drain. The field oxide region is formed by steps including a chemical mechanical polish (CMP) process step. The self-aligned drift region is formed in the semiconductor layer, wherein the self-aligned drift region is entirely located vertically below and in contact with the field oxide region.
SOLID-STATE IMAGE SENSOR AND ELECTRONIC DEVICE
Provided is a solid-state image sensor and an electronic device capable of suppressing the occurrence of a strong electrical field near a transistor while being compact. The solid-state image sensor includes a photoelectric conversion element that performs photoelectric conversion, an element isolation that penetrates from a first main surface to a second main surface of a substrate and that is formed between pixels including the photoelectric conversion element, and a conductive part provided in close contact with a first main surface side of the element isolation.
FIELD PLATING AT SOURCE SIDE OF GATE BIAS MOSFETS TO PREVENT VT SHIFT
The present disclosure introduces a microelectronic device including a source side field plate in a microelectronic device. The microelectronic device may be configured as a metal oxide semiconductor (MOS) transistor, a laterally diffused metal oxide semiconductor (LDMOS) transistor, a drain extended metal oxide semiconductor (DEMOS) transistor, a bipolar junction transistor, a junction field effect transistor, a CMOS transistor, or a gated bipolar device. The source side field plate extends over the source region by a distance which is more than a quarter of the width of the source region. Transistors may suffer from Vt shifts during gate and drain stress over time. The source side field plate reduces the electric field of the transistor near the gate electrode corner on the source side of the transistor. The gate injection current on the source side and electron trapping in the gate oxide thereby reduced which reduces Vt shifts over time.
FIELD PLATING AT SOURCE SIDE OF GATE BIAS MOSFETS TO PREVENT VT SHIFT
The present disclosure introduces a microelectronic device including a source side field plate in a microelectronic device. The microelectronic device may be configured as a metal oxide semiconductor (MOS) transistor, a laterally diffused metal oxide semiconductor (LDMOS) transistor, a drain extended metal oxide semiconductor (DEMOS) transistor, a bipolar junction transistor, a junction field effect transistor, a CMOS transistor, or a gated bipolar device. The source side field plate extends over the source region by a distance which is more than a quarter of the width of the source region. Transistors may suffer from Vt shifts during gate and drain stress over time. The source side field plate reduces the electric field of the transistor near the gate electrode corner on the source side of the transistor. The gate injection current on the source side and electron trapping in the gate oxide thereby reduced which reduces Vt shifts over time.
Semiconductor devices having gate electrodes and methods of manufacturing the same
A semiconductor device includes a first fin that protrudes from a substrate and extends in a first direction, a second fin that protrudes from the substrate and extends in the first direction, the first fin and the second fin being spaced apart, a gate line including a dummy gate electrode and a gate electrode, the dummy gate electrode at least partially covering the first fin, the gate electrode at least partially covering the second fin, the dummy gate electrode including different materials from the gate electrode, the gate line covering the first fin and the second fin, the gate line extending in a second direction different from the first direction, and a gate dielectric layer between the gate electrode and the second fin.
Semiconductor devices having gate electrodes and methods of manufacturing the same
A semiconductor device includes a first fin that protrudes from a substrate and extends in a first direction, a second fin that protrudes from the substrate and extends in the first direction, the first fin and the second fin being spaced apart, a gate line including a dummy gate electrode and a gate electrode, the dummy gate electrode at least partially covering the first fin, the gate electrode at least partially covering the second fin, the dummy gate electrode including different materials from the gate electrode, the gate line covering the first fin and the second fin, the gate line extending in a second direction different from the first direction, and a gate dielectric layer between the gate electrode and the second fin.
Method of forming an array boundary structure to reduce dishing
A semiconductor structure including a semiconductor substrate and at least one patterned dielectric layer is provided. The semiconductor substrate includes a semiconductor portion, at least one first device, at least one second device and at least one first dummy ring. The at least one first device is disposed on a first region surrounded by the semiconductor portion. The at least one second device and the at least one first dummy ring are disposed on a second region, and the second region surrounds the first region. The at least one patterned dielectric layer covers the semiconductor substrate.