Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/70
Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
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H01L21/71
Manufacture of specific parts of devices defined in group H01L21/70
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H01L21/768
Applying interconnections to be used for carrying current between separate components within a device; comprising conductors and dielectrics
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H01L21/76801
characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
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H01L21/76829
characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
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H01L21/76831
in via holes or trenches, e.g. non-conductive sidewall liners
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