A semiconductor structure, including a plurality of connection patterns disposed on the substrate, and a merged pattern disposed between adjacent two of the connection patterns, wherein the merged pattern includes a first outer line, a central line and a second outer line sequentially arranged along a first direction and connected with each other, and an end surface of the first outer line, an end surface of the central line and an end surface of the second outer line are misaligned along the first direction.

The present disclosure provides a method for fabricating an integrated circuit (IC). The method includes receiving an IC layout having active regions, conductive contact features landing on the active regions, and a conductive via feature to be landing on a first subset of the conductive contact features and to be spaced from a second subset of the conductive contact features; evaluating a spatial parameter of the conductive via feature to the conductive contact features; and modifying the IC layout according to the spatial parameter such that the conductive via feature has a S-curved shape.

A package substrate of a semiconductor package includes conductive lines of a first layer disposed on a first surface of a base layer and conductive lines of a second layer disposed on a second surface of the base layer. An opening hole located between a first remaining portion and a second remaining portion to separate the first and second remaining portions from each other. The first remaining portion is electrically connected to a first conductive line among the conductive lines of the second layer, and the second remaining portion is electrically connected to a second conductive line among the conductive lines of the second layer.

The present disclosure provides a semiconductor device with a fuse structure and an anti-fuse structure and a method for forming the semiconductor device. The semiconductor device includes a first dielectric layer disposed over a semiconductor substrate, and a first electrode disposed over the first dielectric layer. The semiconductor device also includes a fuse link disposed over the first electrode, and a second electrode disposed over the fuse link. The semiconductor device further includes a third electrode disposed adjacent to the first electrode, and a second dielectric layer separating the first electrode from the first dielectric layer and the third electrode. The first electrode, the fuse link, and the second electrode form a fuse structure, and the first electrode, the third electrode, and a portion of the second dielectric layer between the first electrode and the third electrode form an anti-fuse structure.

A method for etching a metal containing feature is provided. Using a pattern mask, layers of material are etched to expose a portion of a metal containing feature. At least a portion of the exposed metal containing feature is etched, and is replaced by the growth of a filler dielectric. The etched portion of the metal containing feature and the filler dielectric reduce the unwanted conductivity between adjacent metal containing features.

A method of making a semiconductor device includes electrically connecting a component to a first side of a first fuse, wherein the first fuse is a first distance from the component. The method further includes electrically connecting the component to a first side of a second fuse, wherein the second fuse is a second distance from the component, and the second distance is different than the first distance. The method further includes electrically connecting a second side of the second fuse to a dummy vertical interconnect segment.

A method includes: forming a patterned dielectric layer, including a predetermined word line region and a predetermined pick-up neck region being separated by a first distance, and the patterned dielectric layer within the predetermined pick-up neck region has a second distance, wherein the first distance is smaller than or equal to the second distance; forming a spacer on sidewalls of the patterned dielectric layer; cutting off the spacer of a connecting portion of the predetermined word line region from the spacer of a remaining portion of the predetermined word line region; forming a mask pattern, including a first portion across the connecting portion and the predetermined pick-up neck region, wherein the spacer at the remaining portion is spaced apart from the first portion; and forming a dummy structure, word lines, and pick-up necks, wherein the dummy structure is located between the word lines and the pick-up necks.

A method for fabricating a semiconductor device includes following steps: A patterned mask layer including a plurality of standing walls and a covering part is formed on a surface of a semiconductor substrate, wherein two adjacent standing walls define a first opening exposing a part of the surface, and the covering part blankets the surface. A first patterned photoresist layer is formed to partially cover the covering part. A first etching process is performed to form a first trench in the substrate, passing through the surface and aligning with the first opening. A portion of the patterned mask layer is removed to form a second opening exposing another portion of the surface. A second etching process is performed to form a second trench in the substrate and define an active area on the surface. The depth of the first trench is greater than that of the second trench.

A top cap layer covering a first metal line and a second metal line, horizontally between the first metal line and the second metal line is, in sequential order, a post cap liner, an air gap and the post cap liner. A first set of metal lines embedded in an upper surface of a dielectric, a second set of metal lines embedded below the dielectric and above the electronic components, a post cap liner covering the first set of metal lines, a cavity which dissects a first metal line of the first set of metal lines and extends to a second metal line of the second set of metal lines and dissects the second set of metal lines. Forming a cavity in a first metal line embedded in an upper surface of a dielectric, where the first metal line and the dielectric are covered by a top cap layer.

A method of manufacturing a semiconductor device is provided. The method includes forming a plurality of metal lines on substrate, forming a sacrificial dielectric material layer between the metal lines, forming a hardmask over at least one of the metal lines, etching at least one of the metal lines that is not covered by the hardmask, treating the sacrificial dielectric material layer to soften the layer. The method also includes removing the treated sacrificial dielectric material layer.