A wiring substrate includes a first insulating layer with a first opening, a second insulating layer with a second opening, a high-frequency wiring layer, a first wiring layer, a second wiring layer, and a plurality of conductive pillars. The high-frequency wiring layer including a high-frequency trace is sandwiched between the first insulating layer and the second insulating layer. The first opening and the second opening expose two sides of the high-frequency trace respectively. The high-frequency trace has a smooth surface which is not covered by the first insulating layer and the second insulating layer and has the roughness ranging between 0.1 and 2 μm. The first insulating layer and the second insulating layer are all located between the first wiring layer and the second wiring layer. The conductive pillars are disposed in the second insulating layer and connected to the high-frequency trace.

Disclosed are one or more preferred geometric configurations for a device communicably coupled to a power transmission line and capable of launching transverse electromagnetic waves onto the transmission line. The waves propagate data received from a data source and may include a reflector and a coupler adjacent to each other through a transverse magnetic wave that propagates longitudinally along the surface of the transmission line.

Disclosed are one or more preferred geometric configurations for a device communicably coupled to a power transmission line and capable of launching transverse electromagnetic waves onto the transmission line. The waves propagate data received from a data source and may include a reflector and a coupler adjacent to each other through a transverse magnetic wave that propagates longitudinally along the surface of the transmission line.

A transmission line for conveying a radio frequency (RF) signal between a first terminal and a second terminal. The transmission line comprises an inner conductor, a middle conductor and an outer conductor. The inner conductor comprises a length of conductive material having a first end for electrical connection with the first terminal and a second end for electrical connection with the second terminal. The middle conductor surrounds at least a part of the length of the inner conductor and is electrically connected to the electrical ground of the source. The outer conductor surrounds at least a part of the length of the middle conductor and is electrically connected to the electrical ground of the load.

A transmission line for conveying a radio frequency (RF) signal between a first terminal and a second terminal. The transmission line comprises an inner conductor, a middle conductor and an outer conductor. The inner conductor comprises a length of conductive material having a first end for electrical connection with the first terminal and a second end for electrical connection with the second terminal. The middle conductor surrounds at least a part of the length of the inner conductor and is electrically connected to the electrical ground of the source. The outer conductor surrounds at least a part of the length of the middle conductor and is electrically connected to the electrical ground of the load.

A plasma processing apparatus for processing an object to be processed with plasma, includes: a stage on which the object to be processed is placed; an electrode arranged at a position facing the stage and to which high-frequency power having a frequency of 30 MHz or more is supplied; and a waveguide configured to propagate electromagnetic waves generated based on the high-frequency power to a plasma processing space formed between the stage and the electrode, wherein the waveguide is formed in an annular shape in a plan view so that an end portion of the waveguide near the plasma processing space surrounds an outer periphery of the electrode, a plurality of pins are provided to protrude into the waveguide, and the plurality of pins are arranged at respective positions separated from one another along a circumferential direction in the plan view.

Embodiments of the invention provide a hollow cable for conveying radiofrequency and/or microwave frequency energy to an electrosurgical instrument that can fit within, e.g. slide relative to, the hollow cable. The hollow cable provides a bipolar electrical connection to the electrosurgical instrument that is maintained when the electrosurgical instrument is rotated relative to the hollow cable. The cable may comprise a hollow coaxial transmission line having a rotatable component mounted at its distal end. The rotatable component comprises a longitudinal passageway continuous with the hollow coaxial transmission line. The rotatable component is rotatable relative to the transmission line and comprises a first and second conductive portions that are respectively electrically connected to first and second terminals on the coaxial transmission line and which are configured to maintain an electrical connection with their respective terminal when rotated relative to the coaxial transmission line.

Embodiments of the invention provide a hollow cable for conveying radiofrequency and/or microwave frequency energy to an electrosurgical instrument that can fit within, e.g. slide relative to, the hollow cable. The hollow cable provides a bipolar electrical connection to the electrosurgical instrument that is maintained when the electrosurgical instrument is rotated relative to the hollow cable. The cable may comprise a hollow coaxial transmission line having a rotatable component mounted at its distal end. The rotatable component comprises a longitudinal passageway continuous with the hollow coaxial transmission line. The rotatable component is rotatable relative to the transmission line and comprises a first and second conductive portions that are respectively electrically connected to first and second terminals on the coaxial transmission line and which are configured to maintain an electrical connection with their respective terminal when rotated relative to the coaxial transmission line.

Power-combining devices, and more particularly spatial power-combining and related structural arrangements are disclosed. Such structural arrangements involve mechanical connections between center waveguide sections and input and/or output coaxial waveguide sections that provide scalable structures for different operating frequency bands, improved mechanical connections, and/or improved assembly. Exemplary structural arrangements include structures that extend through center waveguide sections and into input and/or output coaxial waveguide sections, integrated mechanical structures within the center waveguide section, compression fit arrangements, dielectric inserts arranged within channels of coaxial waveguide sections, and/or various combinations thereof.

Power-combining devices, and more particularly spatial power-combining and related structural arrangements are disclosed. Such structural arrangements involve mechanical connections between center waveguide sections and input and/or output coaxial waveguide sections that provide scalable structures for different operating frequency bands, improved mechanical connections, and/or improved assembly. Exemplary structural arrangements include structures that extend through center waveguide sections and into input and/or output coaxial waveguide sections, integrated mechanical structures within the center waveguide section, compression fit arrangements, dielectric inserts arranged within channels of coaxial waveguide sections, and/or various combinations thereof.