The present invention relates to a transmission device for a phase shifter and an actuator device for a phase shifter. The transmission device includes a support, a lead screw nut mechanism and an automatic locking device. The automatic locking device includes a shaft connector rotatably supported on the support and configured to be in transmission connection with a driven connector of a driving device; a locking connector which is in transmission connection with the shaft connector, is in transmission connection with the lead screw, has a locking element and is movable relative to the shaft connector and the lead screw; and a locking spring. When the driven connector is decoupled to the shaft connector, the locking spring biases the locking connector in a first position, in which the locking element engages a counter-locking element on the support. When the driven connector is decoupled to the shaft connector, the locking connector is moved by the driven connector to a second position, in which the locking element disengages the counter-locking element on the support. Calibration of the phase shifter may be saved when the driving device is replaced or repaired.

The present invention relates to a cavity filter including: an RF signal connecting portion spaced apart, by a predetermined distance, from an outer member having an electrode pad provided on a surface thereof; and a terminal portion configured to electrically connect the electrode pad of the outer member and the RF signal connecting portion so as to absorb assembly tolerance existing at the predetermined distance and to prevent disconnection of the electric flow between the electrode pad and the RF signal connecting portion, wherein a part of the terminal portion, positioned between the electrode pad and the RF signal connecting portion, is elastically deformed to absorb assembly tolerance existing in a terminal insertion port. Therefore, the cavity filter can efficiently absorb assembly tolerance which occurs through assembly design, and prevent disconnection of an electric flow, thereby preventing degradation in performance of an antenna device.

A plasma processing apparatus for processing an object to be processed with plasma, includes: a stage on which the object to be processed is placed; an electrode arranged at a position facing the stage and to which high-frequency power having a frequency of 30 MHz or more is supplied; and a waveguide configured to propagate electromagnetic waves generated based on the high-frequency power to a plasma processing space formed between the stage and the electrode, wherein the waveguide is formed in an annular shape in a plan view so that an end portion of the waveguide near the plasma processing space surrounds an outer periphery of the electrode, a plurality of pins are provided to protrude into the waveguide, and the plurality of pins are arranged at respective positions separated from one another along a circumferential direction in the plan view.

The present invention relates to a cavity filter and, in particular, provides an advantage of preventing performance deterioration of an antenna device by efficiently absorbing an assembly tolerance which may occur due to assembly design and preventing an interruption of an electrical flow, by comprising: an RF signal connecting part provided to be spaced apart at a predetermined distance from an external member having an electrode pad formed on one surface thereof; a terminal part which electrically connects the electrode pad of the external member to the RF signal connecting part, while absorbing an assembly tolerance existing within the predetermined distance and simultaneously preventing an interruption of an electrical flow between the electrode pad and the RF signal connecting part; a dielectric body which is inserted into a terminal insertion hole so as to surround the outside of the terminal part; and an elastic member which has a portion of the edge supported by the dielectric body and which elastically supports the terminal part by means of an operation in which a hollow part is deformed in the vertical direction when an assembly force is transmitted to the terminal part supported to pass through the hollow part, wherein the terminal part comprises one terminal brought into contact with the electrode pad and the other terminal connected to the RF signal connecting part.

The present invention relates to a cavity filter and a connecting structure included therein. The cavity filter includes: an RF signal connecting portion spaced apart, by a predetermined distance, from an outer member having an electrode pad provided on a surface thereof; and a terminal portion configured to electrically connect the electrode pad of the outer member and the RF signal connecting portion so as to absorb assembly tolerance existing at the predetermined distance and to prevent disconnection of the electric flow between the electrode pad and the RF signal connecting portion, wherein the terminal portion includes: a first side terminal contacted with the electrode pad; and a second side terminal having a housing space in which a part of the first side terminal is housed, and connected to the RF signal connecting portion, wherein the first side terminal is provided as an elastic deformable body whose part is radially widened or narrowed against an assembly force provided by an assembler. Therefore, the cavity filter can efficiently absorb assembly tolerance which occurs through assembly design, and prevent disconnection of an electric flow, thereby preventing degradation in performance of an antenna device.

A device that includes a first board, a second board, and coaxial cable coupled to the first board and the second board. The coaxial cable includes a multi-line coaxial cable configured to provide at least two electrical paths for electrical currents between the first board and the second board. A first plug is coupled to the first board. A second plug is coupled to the second board. The coaxial cable includes a first receptable and a second receptable. The first receptable is configured to couple to the first plug. The second receptable is configured to couple to the second plug. The coaxial cable is configured to provide (i) a first electrical path for a first electrical current between the first board and the second board, and (ii) a second electrical path for a second electrical current between the first board and the second board.

The present invention relates to a cavity filter including: an RF signal connecting portion spaced apart, by a predetermined distance, from an outer member having an electrode pad provided on a surface thereof; and a terminal portion configured to electrically connect the electrode pad of the outer member and the RF signal connecting portion so as to absorb assembly tolerance existing at the predetermined distance and to prevent disconnection of the electric flow between the electrode pad and the RF signal connecting portion, wherein a part of the terminal portion, positioned between the electrode pad and the RF signal connecting portion, is elastically deformed to absorb assembly tolerance existing in a terminal insertion port. Therefore, the cavity filter can efficiently absorb assembly tolerance which occurs through assembly design, and prevent disconnection of an electric flow, thereby preventing degradation in performance of an antenna device.

The present invention relates to a transmission device for a phase shifter and an actuator device for a phase shifter. The transmission device includes a support, a lead screw nut mechanism and an automatic locking device. The automatic locking device includes a shaft connector rotatably supported on the support and configured to be in transmission connection with a driven connector of a driving device; a locking connector which is in transmission connection with the shaft connector, is in transmission connection with the lead screw, has a locking element and is movable relative to the shaft connector and the lead screw; and a locking spring. When the driven connector is decoupled to the shaft connector, the locking spring biases the locking connector in a first position, in which the locking element engages a counter-locking element on the support. When the driven connector is decoupled to the shaft connector, the locking connector is moved by the driven connector to a second position, in which the locking element disengages the counter-locking element on the support. Calibration of the phase shifter may be saved when the driving device is replaced or repaired.

An optimized coaxial transmission line having joined segments of coaxial transmission lines is provided. First insulating supports positioned at flange joints within the joined segments are provided. Second insulating supports are positioned a distance x, where

[00001]$x=\frac{1}{4}.Math.\lambda +n.Math.\frac{1}{2}.Math.\lambda ,$

from the first insulating supports to cancel reflections created by the insulating supports. Preferably, x=¼λ, and the second insulating supports are positioned for one quarter of a wavelength at either FM frequencies, VHF frequencies, UHF frequencies, or IBOC frequencies. A method for optimizing a transmission line by frequency is also provided. First, segments of coaxial transmission lines are joined together, each segment having a first insulating support positioned at a flange joints within the joined segment. Next, a second insulating support is positioned along the length of each segment of coaxial transmission line a distance x from said first insulating support, where

[00002]$x=\frac{1}{4}.Math.\lambda +n.Math.\frac{1}{2}.Math.\lambda .$

A signal generator produces an output signal in response to an input step signal using two transmission lines with characteristic impedances corresponding to the impedances of a signal source and a load. The input signal is applied to the inner conductor of the first transmission line, which has the outer shield grounded. The input signal is applied to the outer shield of the second transmission line, which has a floating outer shield. The inner conductor and the outer shield of the first transmission line are open at the second end. The inner conductor and the outer shield of the second transmission line are shorted at the second end. This transmission line is bridged by two resistors, the junction of which is connected to the inner conductor of the transmission line. The output signal has a first step at half the input voltage and a second step at the input voltage.