Provided is a light source apparatus and an electrode design for use in a discharge chamber of the light source apparatus. The discharge chamber is configured to hold a gas discharge medium configured to output a light beam. The light source apparatus include a pair of opposed electrodes configured to excite a gas medium to form a discharge plasma. At least one electrode of the pair of opposing electrodes may include recessed portions or hollowed-out portions at each end of the electrode, or at other suitable locations. The disclosed electrode structures improve uniformity of the erosion profile of the electrodes, significantly extending the lifespan of the discharge chamber by redistributing the discharge particle flux through the electrode with an optimized design of the electrode geometry, as the local discharge particle flux is reduced at the recessed portions.

A laser chamber apparatus may include a pipe, an inner electrode extending along a longitudinal direction of the pipe and disposed in a through hole in the pipe, an outer electrode including a contact plate extending along the longitudinal direction of the pipe and being in contact with an outer circumferential surface of the pipe and a ladder section formed of bar members each having one end connected to the contact plate and juxtaposed along a longitudinal direction of the contact plate, and a leaf spring extending along the longitudinal direction of the pipe and configured to press the outer electrode against the pipe. The leaf spring may include leaf spring pieces separated by slits, and the leaf spring pieces may each include a bent section bent along the edge and are configured to press the bar members in a position shifted from the bent sections toward the edge.

Disclosed is a device for generating a laser radiation including a box and an electrode, the electrode including a column extending along an axial direction and a collar surrounding the column and having a first face perpendicular to the axial direction and a second face parallel to the first face, the second face facing the box. The generating device includes a ring having a third face bearing against the box, the ring defining a hole emerging on the third face and accommodating the collar, the hole being defined along the axial direction by a bearing face arranged in the ring, perpendicular to the axial direction and facing the box, the first face bearing against the bearing face.

An excimer laser chamber device may include: a the laser chamber; a first electrode provided in the laser chamber; a second electrode provided in the laser chamber to face the first electrode; an electrode holder provided in the laser chamber to be connected to a high voltage; at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder; a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode; and an electrode-gap-varying unit configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.

There is provided a laser system having a cylindrically-shaped annular minor with at least one opening in its surface; a pair of planar metallic electrodes disposed proximate opposite edges of the annular mirror, normal to the axis of the annular minor, the electrodes configured to have an RF field applied between them; a pair of end minors disposed at said at least one opening; and a ceramic material in the form of a disc, disposed in the internal volume of the annular minor, the ceramic material having a series of channels formed therein such that they generate a zig-zag pathway in the ceramic material, wherein (i) the zig-zag path, when filled with a gain medium, (ii) the annular minor and (iii) the pair of end minors, together constitute a laser cavity.

A laser chamber for a discharge excited gas laser apparatus may include: a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; a fan configured to flow laser gas between the first discharge electrode and the second discharge electrode; a first insulating member disposed upstream and downstream of a laser gas flow from the first discharge electrode; a metallic damper member disposed upstream of the laser gas flow from the second discharge electrode; and a second insulating member disposed downstream of the laser gas flow from the second discharge electrode.

A dielectric electrode assembly, and a method of manufacture thereof, including: a dielectric tube having a cylindrical cross-section and a relative dielectric constant, ε.sub.2, the dielectric tube filled with a gas having a relative dielectric constant, ε.sub.1; a structural dielectric having a relative dielectric constant, ε.sub.3 surrounding the dielectric tube; metal electrodes on opposite sides of the structural dielectric, the metal electrodes having a flat cross-sectional geometry; and the structural dielectric made from a material selected such that the relative dielectric constants of the structural dielectric, the dielectric tube, and the gas are interrelated and a uniform electric field is generated within the dielectric tube when power is applied to the metal electrodes.

A light emitting sealed body includes: a housing which stores a discharge gas and is provided with a first opening to which first light is incident along a first optical axis and a second opening from which second light is emitted along a second optical axis; a first window portion which hermetically seals the first opening; a second window portion which hermetically seals the second opening; and a first electrode and a second electrode. The housing is formed of a light shielding material which does not transmit the first light and the second light. An internal space is defined by the housing, the first window portion, and the second window portion and the internal space is filled with the discharge gas. The first opening and the second opening are disposed so that the first optical axis and the second optical axis intersect each other.

A cylindrical electrode module of a fiber optic laser system includes an inner cylinder having an inner repeating pattern of longitudinally-aligned positive and negative electrodes on an outer surface of the inner cylinder. The cylindrical electrode mode includes an outer cylinder that encloses the inner cylinder. The outer cylinder that has an outer repeating pattern of longitudinally-aligned negative and positive electrodes on an inner surface of the inner cylinder that are in corresponding and complementary, parallel alignment with the positive and negative electrodes of the inner repeating pattern on the outer surface of the inner cylinder. The cylindrical electrode module includes an optical fiber having an input end configured to align with and be optically coupled to a pump laser. The optical fiber is wrapped around the inner cylinder within the outer cylinder to form a cylindrical fiber assembly. The electrodes are activated to achieve quasi-phase matching.

Discharge electrodes include a cathode and an anode. The anode is disposed to face the cathode in a discharge direction perpendicular to a longitudinal direction of the cathode, and includes an electrode base 1, and a coating layer that covers a portion of a surface of the electrode base. First corners in a cross section perpendicular to the longitudinal direction connect first straight sections formed of first side surfaces that are side surfaces of the electrode base to a first curved section formed of a first discharge surface that is a discharge surface of the electrode base. The first corners are closer to the cathode in the discharge direction than second corners connecting second straight sections formed of second side surfaces that are side surfaces of the coating layer to a second curved section formed of a second discharge surface that is a discharge surface of the coating layer.