H01S3/0906

EXCIMER LASER CHAMBER DEVICE

An excimer laser chamber device may include: a the laser chamber; a first electrode provided in the laser chamber; a second electrode provided in the laser chamber to face the first electrode; an electrode holder provided in the laser chamber to be connected to a high voltage; at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder; a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode; and an electrode-gap-varying unit configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.

Excimer laser chamber device

An excimer laser chamber device may include: a the laser chamber; a first electrode provided in the laser chamber; a second electrode provided in the laser chamber to face the first electrode; an electrode holder provided in the laser chamber to be connected to a high voltage; at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder; a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode; and an electrode-gap-varying unit configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.

Optical signal waveguide dispersion filter

An apparatus includes a curved multimode polymer waveguide having at least one inflection point and a doped region being doped with an amplifying dopant. An optical pump source or electrical pump source is configured to excite the doped region and amplify the optical signal transmitting along the curved multimode polymer waveguide.

OPTICAL SIGNAL WAVEGUIDE DISPERSION FILTER
20170155224 · 2017-06-01 ·

An apparatus includes a curved multimode polymer waveguide having at least one inflection point and a doped region being doped with an amplifying dopant. An optical pump source or electrical pump source is configured to excite the doped region and amplify the optical signal transmitting along the curved multimode polymer waveguide.

Trichel pulse energy devices
09653874 · 2017-05-16 ·

Coherent Trichel Pulse transient energy emissions by directing energetic triggers for driving to unstable a Trichel Pulse generator (TPG) charged electrode or gap to elicit a phased or delayed emitted photon energy Trichel Pulse and electronic driven current pulse nearly contemporaneously due to electronic flow eruptive cascade into the discharge gap. Triggered random laser spherical emission or directed energy provided by concentric spherical or linear resonator mirrors optically pumping the spherical center TPG glow region of maximum energy densities at the spherical center provided with take off linear transmission of the resonator stimulated emissions providing linear propagation and targeting.

Air-cooled carbon-dioxide laser
09614342 · 2017-04-04 · ·

A carbon dioxide waveguide-laser includes an elongated resonator unit and an elongated power-supply unit. The resonator and power-supply units are spaced by a cooling unit including a plurality of longitudinally extending, spaced-apart fins, with fans arranged to drive air through the spaces between the fins.

LASER BASED ON A DIELECTRIC RESONATOR WITH GAS OR PLASMA AT POPULATION INVERSION

An optical cavity resonator, comprising a transparent or nearly transparent dielectric, and having gas or plasma provided thereabout, the resonator constructed to have an optical resonance that extends to partially spatially overlap with said gas or plasma, the gas or plasma providing an optical gain at a frequency overlapping a resonant frequency of said resonator, wherein the optical cavity, with plasma, is constructed to be pumped so that the plasma is able to amplify light at a frequency approximately related to an atomic transition of said gas or plasma.

GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
20250364771 · 2025-11-27 · ·

A gas laser apparatus according to an aspect of the present disclosure includes a laser chamber, a primary electrode, a preliminary ionization electrode, a power supplier, and a processor. The laser chamber is configured to encapsulate a laser gas containing a fluorine gas. The primary electrode is disposed in the laser chamber. The preliminary ionization electrode is disposed in the laser chamber. The power supplier is configured to supply power to the primary electrode and the preliminary ionization electrode. The processor is configured to control the power supplier to perform first discharge control that causes the preliminary ionization electrode and the primary electrode to perform discharge, and second discharge control that causes only the preliminary ionization electrode to perform discharge without causing the primary electrode to perform discharge.