Nested phase-locked loops (PLLs) utilize resonators of different quality factors, oscillation frequencies, and tunability. A reference clock signal for a first PLL is based on a free running bulk acoustic wave (BAW) resonator. The first PLL utilizes an LC oscillator as a voltage controlled oscillator. A crystal oscillator supplies a reference clock signal to a second PLL. Feedback dividers of the first and second PLLs are coupled to the LC oscillator. A delta sigma modulator coupled to the loop filter of the second PLL controls the feedback divider of the first PLL. The first PLL utilizes a high update rate to ensure that the jitter power spectral density is spread over a wide frequency range. The nested PLL architecture allows the overall phase noise plot to follow that of the crystal resonator at low frequencies, the BAW resonator at mid-frequencies, and the LC resonator at high frequencies.

Techniques for improving Bulk Acoustic Wave (BAW) reflector and resonator structures are disclosed, including filters, oscillators and systems that may include such devices. A Bulk Acoustic Wave (BAW) resonator of this disclosure may comprise a substrate and an active piezoelectric resonant volume. The active piezoelectric resonant volume of the Bulk Acoustic Wave (BAW) resonator may have a main resonant frequency. The active piezoelectric resonant volume of the Bulk Acoustic Wave (BAW) resonator may comprise first and second piezoelectric layers having respective piezoelectric axis that substantially oppose one another. A first patterned layer may be disposed within the active piezoelectric volume. This may, but need not facilitate suppression of spurious modes. The main resonant frequency of the Bulk Acoustic Wave (BAW) resonator may be in a super high frequency (SHF) band. The main resonant frequency of the Bulk Acoustic Wave (BAW) resonator may be in an extremely high frequency (EHF) band.

Nested phase-locked loops (PLLs) utilize resonators of different quality factors, oscillation frequencies, and tunability. A reference clock signal for a first PLL is based on a free running bulk acoustic wave (BAW) resonator. The first PLL utilizes an LC oscillator as a voltage controlled oscillator. A crystal oscillator supplies a reference clock signal to a second PLL. Feedback dividers of the first and second PLLs are coupled to the LC oscillator. A delta sigma modulator coupled to the loop filter of the second PLL controls the feedback divider of the first PLL. The first PLL utilizes a high update rate to ensure that the jitter power spectral density is spread over a wide frequency range. The nested PLL architecture allows the overall phase noise plot to follow that of the crystal resonator at low frequencies, the BAW resonator at mid-frequencies, and the LC resonator at high frequencies.

In an example, a system includes a BAW resonator. The system also includes a first heater configured to heat the BAW resonator, where the first heater is controlled by a first control loop. The system includes a circuit coupled to the BAW resonator. The system also includes a second heater configured to heat the circuit, where the second heater is controlled by a second control loop.

An oscillator circuit includes a first BAW oscillator, a first coupling stage, a second BAW oscillator, and a second coupling stage. The first BAW oscillator is configured to generate a first output signal at a frequency. The first coupling stage is coupled to the first BAW oscillator, and is configured to amplify the first output signal. The second BAW oscillator is coupled to the first coupling stage, and is configured to generate a second output signal at the frequency. The second output signal differs in phase from the first output signal. The second coupling stage is coupled to the first BAW oscillator and the second BAW oscillator, and is configured to amplify the second output signal and drive the first BAW oscillator.

A circuit device includes an oscillation circuit generating an oscillation signal by oscillating a vibrator, a temperature sensor circuit performing an intermittent operation, a logic circuit performing temperature compensation processing based on an output of the temperature sensor circuit, and a power supply circuit supplying power to the oscillation circuit. The oscillation circuit is disposed in a circuit region, the temperature sensor circuit and the logic circuit are disposed in a circuit region, and the power supply circuit is disposed in a circuit region, which is positioned between the circuit region and the circuit region.

A circuit device includes an oscillation circuit generating an oscillation signal by oscillating a vibrator, a temperature sensor circuit performing an intermittent operation, a logic circuit performing temperature compensation processing based on an output of the temperature sensor circuit, and a power supply circuit supplying power to the oscillation circuit. Further, the logic circuit or the power supply circuit is disposed between the oscillation circuit and the temperature sensor circuit.

A temperature compensated oscillator circuit includes a first oscillator, a second oscillator, a first divider, a second divider, a frequency ratio circuit, and a temperature compensation circuit. The first divider is coupled to the first oscillator, and is configured to divide a frequency of a first oscillator signal generated by the first oscillator. The second divider is coupled to the second oscillator, and is configured to divide a frequency of a second oscillator signal generated by the second oscillator. The frequency ratio circuit is coupled to the first divider and the second divider, and is configured to determine a frequency ratio of an output of the first divider to an output of the second divider. The temperature compensation circuit is coupled to the frequency ratio circuit and the first oscillator, and is configured to generate a compensated frequency based on the frequency ratio and the first oscillator signal.

A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.

An oscillator includes an external terminal, a resonator, and an oscillation circuit that oscillates the resonator. The oscillation circuit includes an amplification circuit and a current source that supplies a current to the amplification circuit, and the current is variably set according to a control signal input from the external terminal.