A method of assembling a nozzle assembly is disclosed. The method includes: providing a nozzle member having a central passage defined by at least an inner side surface and an inner distal surface; inserting a fluid atomizer into the central passage of the nozzle member; and, with a distal surface of the fluid atomizer arranged adjacent the inner distal surface of the nozzle member, flexing legs of the fluid atomizer in a radially-outward direction for engaging each leg of the legs with the inner side surface of the nozzle member. A fluid atomizer is also disclosed. A nozzle assembly is also disclosed. A method of utilizing a nozzle assembly is also disclosed.

Exemplary semiconductor processing chamber showerheads include an inner core region. The inner core region may define a plurality of apertures. The showerheads may include an outer core region disposed about an outer periphery of the inner core region. The outer core region may define an annular channel. The showerheads may include a heating element disposed within the annular channel. The showerheads may include an annular liner disposed about an outer periphery of the outer core region. The inner core region and the outer core region may include an aluminum alloy. The annular liner may have a lower thermal conductivity than the aluminum alloy.

A material dispense tip includes an elongated hole in an elongated neck that extends from an input end of the neck to an output end of the neck. The hole at the output end of the neck has a first diameter. The output end of the neck is positioned against a die surface. A punch is inserted into the hole at the input end of the neck. An external force is applied to the neck to cause the output end of the neck to be deformed under compression by the die surface, to reduce the diameter of the hole at the output end of the neck from the first diameter to a second diameter that is less than the first diameter.

A method of assembling a nozzle assembly is disclosed. The method includes: providing a nozzle member having a central passage defined by at least an inner side surface and an inner distal surface; inserting a fluid atomizer into the central passage of the nozzle member; and, with a distal surface of the fluid atomizer arranged adjacent the inner distal surface of the nozzle member, flexing legs of the fluid atomizer in a radially-outward direction for engaging each leg of the legs with the inner side surface of the nozzle member. A fluid atomizer is also disclosed. A nozzle assembly is also disclosed. A method of utilizing a nozzle assembly is also disclosed.

A method of manufacturing an orifice is provided to make the orifice capable of spraying a very small amount of fluid in an ultra-high pressure and very low temperature environments. The method also makes it possible to provide the orifice with reduced volume and mass. More specifically, the method effectively realizes a desired hydraulic performance through a simple manufacturing method in which a part of a capillary pipe is pressed to form a channel region having a cross section close to a rectangular shape.

A rotary atomiser bell cup comprising a bell portion for spraying media in use and a hub portion via which the bell portion is rotatingly drivable in use, wherein the hub portion is a machined metal portion and the bell portion has been built up on the hub using an additive manufacturing process.

A material dispense tip includes an elongated hole in an elongated neck that extends from an input end of the neck to an output end of the neck. The hole at the output end of the neck has a first diameter. The output end of the neck is positioned against a die surface. A punch is inserted into the hole at the input end of the neck. An external force is applied to the neck to cause the output end of the neck to be deformed under compression by the die surface, to reduce the diameter of the hole at the output end of the neck from the first diameter to a second diameter that is less than the first diameter.

Provided are a method of manufacturing an orifice and an orifice manufactured by the same. An object of the present invention is to provide a method of manufacturing an orifice spraying a very small amount of fluid in ultra-high pressure and very low temperature environments and reducing a volume and a mass, and an orifice manufactured by the same. More specifically, an object of the present invention is directed to providing a method of manufacturing an orifice capable of manufacturing an orifice effectively realizing a desired hydraulic performance by a simple manufacturing method of allowing a channel region having a cross section close to a rectangular shape to be formed by pressing a part of a capillary pipe, and an orifice manufactured by the same.

Methods of manufacturing a semiconductor processing chamber showerheads may include forming a melted aluminum alloy composition, cooling the melted aluminum alloy composition at a rate of at least 103 K/sec to form solid aluminum alloy particles, and forming a core region of a showerhead from the solid aluminum alloy particles. The core region of the showerhead may include an inner core region and an outer core region that may be coupled together. The inner core region may define a plurality of apertures. The outer core region may define a channel that receives a heating element. The methods may include coating the core region with one of aluminum or aluminum oxide and joining a peripheral edge of the outer core region with an inner edge of a metallic annular liner. The metallic annular liner may have a lower thermal conductivity than the core region of the showerhead.

This invention discloses a method for producing a shower nozzle which includes following steps of perforating a water outlet plate by laser in order to form a plurality of water outlet holes, welding a joint head and the water outlet plate to a casing, and polishing a welding portion where the joint head and the water outlet plate are welded to the casing before executing a surface treatment. This invention integrates the water outlet holes with the water outlet plate through laser perforation, then polishing the surface after welding each component together into one, thereby executing the surface treatment at one time, simplifying the process, increasing the efficiency, and achieving the seamless surface and color constancy.