Interconnect structure with redundant electrical connectors and associated systems and methods
09818728 · 2017-11-14
Assignee
Inventors
Cpc classification
H01L2224/1145
ELECTRICITY
H01L25/18
ELECTRICITY
H01L2224/0401
ELECTRICITY
H01L2224/1329
ELECTRICITY
H01L2224/81193
ELECTRICITY
H01L2224/131
ELECTRICITY
H01L23/481
ELECTRICITY
H01L2224/133
ELECTRICITY
H01L2225/06513
ELECTRICITY
H01L2225/06517
ELECTRICITY
H01L23/49816
ELECTRICITY
H01L2224/131
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/8385
ELECTRICITY
H01L2924/16251
ELECTRICITY
H01L2224/16113
ELECTRICITY
H01L2224/02371
ELECTRICITY
H01L23/49833
ELECTRICITY
H01L2225/06544
ELECTRICITY
H01L2224/1411
ELECTRICITY
H01L2225/06541
ELECTRICITY
H01L2224/13024
ELECTRICITY
H01L2924/16235
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2225/06555
ELECTRICITY
H01L25/50
ELECTRICITY
H01L2224/05548
ELECTRICITY
H01L23/3128
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/133
ELECTRICITY
H01L2224/02372
ELECTRICITY
H01L2224/16148
ELECTRICITY
H01L2224/83487
ELECTRICITY
H01L2224/1329
ELECTRICITY
H01L2225/06582
ELECTRICITY
H01L24/02
ELECTRICITY
H01L2224/1145
ELECTRICITY
H01L2224/8385
ELECTRICITY
H01L2224/13565
ELECTRICITY
H01L2224/83487
ELECTRICITY
H01L2224/17107
ELECTRICITY
International classification
H01L25/065
ELECTRICITY
H01L25/18
ELECTRICITY
H01L21/768
ELECTRICITY
H01L23/48
ELECTRICITY
Abstract
Semiconductor die assemblies having interconnect structures with redundant electrical connectors are disclosed herein. In one embodiment, a semiconductor die assembly includes a first semiconductor die, a second semiconductor die, and an interconnect structure between the first and the second semiconductor dies. The interconnect structure includes a first conductive film coupled to the first semiconductor die and a second conductive film coupled to the second semiconductor die. The interconnect structure further includes a plurality of redundant electrical connectors extending between the first and second conductive films and electrically coupled to one another via the first conductive film.
Claims
1. A method of forming a semiconductor die assembly, the method comprising: forming a first conductive film on a first semiconductor die; forming a second conductive film on a second semiconductor die; forming a plurality of redundant electrical connectors on the first conductive film such that each of the redundant electrical connectors is electrically coupled to each of the other redundant electrical connectors via the first conductive film; and coupling the redundant electrical connectors to the second conductive film.
2. The method of claim 1 wherein coupling the redundant electrical connectors to the second conductive film includes forming a solder bond between each of the redundant electrical connectors and the second conductive film.
3. The method of claim 1 wherein coupling the redundant electrical connectors to the second conductive film includes forming a solder bond between each of the redundant electrical connectors and a corresponding bond pad on the second conductive film.
4. A method of forming a semiconductor die assembly, the method comprising: forming a first conductive film on a first semiconductor die; forming a second conductive film on a second semiconductor die; forming a plurality of redundant electrical connectors on the first conductive film; and coupling the redundant electrical connectors to the second conductive film by forming a solder bond between each of the redundant electrical connectors and the second conductive film, wherein the solder bond of at least one of the redundant electrical connectors fails to electrically connect at least one of the redundant electrical connectors with a corresponding one of the bond pads.
5. The method of claim 3, further comprising forming a through-substrate via (TSV) that extends through a substrate of the first semiconductor die, wherein forming the first conductive film further includes coupling the TSV to the first conductive film.
6. The method of claim 1 wherein: forming the first conductive film includes forming a first conductive trace; and forming the second conductive film includes forming a second conductive trace.
7. A method of forming a semiconductor die assembly, comprising: forming a first conductive trace on a first semiconductor die; forming a plurality of conductive members on the first conductive trace such that the conductive members are electrically coupled to the other conductive members via the first conductive trace, wherein the conductive members project away from the first semiconductor die; disposing a conductive bond material on each of the conductive members; and reflowing the conductive bond material to couple individual ones of the plurality of conductive members to a second conductive trace of a second semiconductor die.
8. The method of claim 7 wherein disposing the conductive bond material includes disposing metal solder on each of the conductive members.
9. A method of forming a semiconductor die assembly, comprising: forming a first conductive trace on a first semiconductor die; forming a plurality of conductive members on the first conductive trace that project away from the first semiconductor die; disposing a conductive bond material on each of the conductive members; and reflowing the conductive bond material to couple individual ones of the plurality of conductive members to a second conductive trace of a second semiconductor die, wherein after reflowing the conductive bond material, the conductive bond material on at least one of the conductive members fails to form a solder joint with the second conductive trace.
10. The method of claim 7 wherein reflowing the conductive bond material includes reflowing the conductive bond material between bond pads on the conductive second trace and corresponding ones of the conductive members.
11. The method of claim 7 wherein forming the conductive members includes forming a plurality of conductive pillars on the first conductive trace.
12. The method of claim 7 wherein: the first semiconductor die includes a substrate and a through-substrate via (TSV) extending through the substrate; the first trace extends laterally away from the TSV; and forming the conductive members includes forming one or more the conductive members between the TSV and the second trace.
13. The method of claim 1 wherein forming the second conductive film includes forming the second conductive film on a dielectric material over the second semiconductor die, wherein the dielectric material at least partially surrounds the second semiconductor die.
14. The method of claim 1 wherein the redundant electrical connectors extend at least partially through a dielectric material formed over the first semiconductor die.
15. The method of claim 1 wherein the plurality of redundant electrical connectors are formed directly on the first conductive film.
16. The method of claim 7 wherein the first conductive trace is formed on a dielectric material that is over and at least partially surrounds the first semiconductor die.
17. The method of claim 7 wherein the conductive members formed on the first conductive trace extend at least partially through a dielectric material formed over the first semiconductor die.
18. The method of claim 7 wherein the conductive members are formed directly on the first conductive trace film.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
(7) Specific details of several embodiments of stacked semiconductor die assemblies having interconnect structures with redundant electrical connectors and associated systems and methods are described below. The terms “semiconductor device” and “semiconductor die” generally refer to a solid-state device that includes semiconductor material, such as a logic device, memory device, or other semiconductor circuit, component, etc. Also, the terms “semiconductor device” and “semiconductor die” can refer to a finished device or to an assembly or other structure at various stages of processing before becoming a finished device. Depending upon the context in which it is used, the term “substrate” can refer to a wafer-level substrate or to a singulated, die-level substrate. A person skilled in the relevant art will recognize that suitable steps of the methods described herein can be performed at the wafer level or at the die level. Furthermore, unless the context indicates otherwise, structures disclosed herein can be formed using conventional semiconductor-manufacturing techniques. Materials can be deposited, for example, using chemical vapor deposition, physical vapor deposition, atomic layer deposition, spin coating, and/or other suitable techniques. Similarly, materials can be removed, for example, using plasma etching, wet etching, chemical-mechanical planarization, or other suitable techniques. A person skilled in the relevant art will also understand that the technology may have additional embodiments, and that the technology may be practiced without several of the details of the embodiments described below with reference to
(8) As used herein, the terms “vertical,” “lateral,” “upper” and “lower” can refer to relative directions or positions of features in the semiconductor die assemblies in view of the orientation shown in the Figures. For example, “upper” or “uppermost” can refer to a feature positioned closer to the top of a page than another feature. These terms, however, should be construed broadly to include semiconductor devices having other orientations.
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(10) The assembly 100 can further include a thermally conductive casing 110 (“casing 110”). The casing 110 can include a cap portion 112 and a wall portion 113 attached to or integrally formed with the cap portion 112. The cap portion 112 can be attached to the top-most first semiconductor die 102a by a first bond material 114a (e.g., an adhesive). The wall portion 113 can extend vertically away from the cap portion 112 and be attached to a peripheral portion 106 of the first semiconductor die 102a (known to those skilled in the art as a “porch” or “shelf) by a second bond material 114b (e.g., an adhesive). In addition to providing a protective covering, the casing 110 can serve as a heat spreader to absorb and dissipate thermal energy away from the semiconductor dies 102. The casing 110 can accordingly be made from a thermally conductive material, such as nickel (Ni), copper (Cu), aluminum (Al), ceramic materials with high thermal conductivities (e.g., aluminum nitride), and/or other suitable thermally conductive materials.
(11) In some embodiments, the first bond material 114a and/or the second bond material 114b can be made from what are known in the art as “thermal bond materials” or “TIMs”, which are designed to increase the thermal contact conductance at surface junctions (e.g., between a die surface and a heat spreader). TIMs can include silicone-based greases, gels, or adhesives that are doped with conductive materials (e.g., carbon nano-tubes, solder materials, diamond-like carbon (DLC), etc.), as well as phase-change materials. In other embodiments, the first bond material 114a and/or the second bond material 114b can include other suitable materials, such as metals (e.g., copper) and/or other suitable thermally conductive materials.
(12) Some or all of the first and/or second semiconductor dies 102 can be at least partially encapsulated in a dielectric underfill material 116. The underfill material 116 can be deposited or otherwise formed around and/or between some or all of the dies to enhance a mechanical connection with a die and/or to provide electrical isolation between conductive features and/or structures (e.g., interconnects). The underfill material 116 can be a non-conductive epoxy paste, a capillary underfill, a non-conductive film, a molded underfill, and/or include other suitable electrically-insulative materials. In several embodiments, the underfill material 116 can be selected based on its thermal conductivity to enhance heat dissipation through the dies of the assembly 100. In some embodiments, the underfill material 116 can be used in lieu the first bond material 114a and/or the second bond material 114b to attach the casing 110 to the top-most first semiconductor die 102a
(13) The semiconductor dies 102 can each be formed from a semiconductor substrate, such as silicon, silicon-on-insulator, compound semiconductor (e.g., Gallium Nitride), or other suitable substrate. The semiconductor substrate can be cut or singulated into semiconductor dies having any of variety of integrate circuit components or functional features, such as dynamic random-access memory (DRAM), static random-access memory (SRAM), flash memory, other forms of integrated circuit devices, including memory, processing circuits, imaging components, and/or other semiconductor devices. In selected embodiments, the assembly 100 can be configured as a hybrid memory cube (HMC) in which the first semiconductor dies 102a provide data storage (e.g., DRAM dies) and the second semiconductor die 102b provides memory control (e.g., DRAM control) within the HMC. In some embodiments, the assembly 100 can include other semiconductor dies in addition to and/or in lieu of one or more of the semiconductor dies 102. For example, such semiconductor dies can include integrated circuit components other than data storage and/or memory control components. Further, although the assembly 100 includes nine dies stacked on the interposer 120, in other embodiments the assembly 100 can include fewer than nine dies (e.g., six dies) or more than nine dies (e.g., twelve dies, fourteen dies, sixteen dies, thirty-two dies, etc.). For example, in one embodiment, the assembly 100 can include four memory dies stacked on two logic dies. Also, in various embodiments, the semiconductor dies 102 can have different sizes. For example, in some embodiments the second semiconductor die 102b can have the same footprint as at least one of the first semiconductor dies 102a.
(14) As further shown in
(15) The interconnect structures 130 can each include a plurality of redundant electrical connectors 134 (“redundant connectors 134”) coupled between individual first traces 140a and individual second traces 140b of adjacent semiconductor dies 102. As such, each pair of first and second traces 140a and 140b is electrically and thermally coupled together by a plurality of the redundant connectors 134. In one aspect of this embodiment, the redundant connectors 134 can improve process yield during manufacturing. For example, as described in greater detail below, the individual structures 130 are less prone to open circuit relative to conventional interconnects or other electrical connectors because there are a plurality of redundant connectors spaced apart from each other along the traces 140a and 140b. In another aspect of this embodiment, the redundant connectors 134 can enhance thermal conduction through the stack of semiconductor dies 102 and toward the cap portion 112 of the casing 110. In particular, the redundant connectors 134 can provide multiple heat transfer paths between adjacent semiconductor dies 102. In several embodiments, the redundant connectors 134 can be spaced apart from one another along the individual traces 140a and 140b to distribute heat laterally across the semiconductor dies 102. In additional or alternate embodiments, additional redundant electrical connectors 138 (shown in hidden lines) can extend between interior portions (e.g., between the TSVs 142) and/or outer portions (e.g., toward the edges of the dies 102) of the semiconductor dies 102 to further distribute heat.
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(17) In general, one challenge with solder bond materials is that they can fail to properly bond an interconnect to a bond pad.
(18) Interconnect structures configured in accordance with several embodiments of the present technology, however, can address these and other limitations of conventional interconnects and related structures. Referring again to
(19) Another advantage of the interconnect structures of the various embodiments is that the redundant electrical connectors can reduce the current density through a conductive joint (e.g., through the bond material 235 of the redundant interconnects 234). For example, an interconnect structure having ten redundant connectors can have about a ten-fold reduction in current density through each of its conductive joints. A related advantage is that the lower current density can reduce electromigration. For example, a lower current density can reduce electromigration through tin/silver-based (SnAg) solder joints, which are typically much more susceptible to electromigration than other interconnect materials (e.g., copper). In some embodiments, the number of redundant electrical connectors can be selected to achieve a certain reduction in electromigration balanced against a potential increase in capacitance across the interconnect structure.
(20) A further advantage of the interconnect structures of the various embodiments is that the redundant electrical connectors can be closely packed.
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(29) Any one of the interconnect structures and/or semiconductor die assemblies described above with reference to
(30) From the foregoing, it will be appreciated that specific embodiments of the technology have been described herein for purposes of illustration, but that various modifications may be made without deviating from the disclosure. For example, although several of the embodiments of the semiconductor dies assemblies are described with respect to HMCs, in other embodiments the semiconductor die assemblies can be configured as other memory devices or other types of stacked die assemblies. In addition, while in the illustrated embodiments certain features or components have been shown as having certain arrangements or configurations, other arrangements and configurations are possible. For example, while the TSV 442 (