Method for making a shielded integrated circuit (IC) package with an electrically conductive polymer layer
09761538 · 2017-09-12
Assignee
Inventors
- Rennier Rodriguez (Bulacan, PH)
- Frederick Arellano (Pulo Cabuyao Laguna, PH)
- Aiza Marie Agudon (Calamba, PH)
Cpc classification
H01L21/78
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/97
ELECTRICITY
H01L24/97
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L23/552
ELECTRICITY
H01L2224/97
ELECTRICITY
H01L2224/16227
ELECTRICITY
H01L24/73
ELECTRICITY
International classification
H01L21/78
ELECTRICITY
H01L23/552
ELECTRICITY
H01L21/48
ELECTRICITY
Abstract
A method for making shielded integrated circuit (IC) packages includes providing spaced apart IC dies carried by a substrate and covered by a common encapsulating material, and cutting through the common encapsulating material between adjacent IC dies to define spaced apart IC packages carried by the substrate. An electrically conductive layer is positioned over the spaced apart IC packages and fills spaces between adjacent IC packages. The method further includes cutting through the electrically conductive layer between adjacent IC packages and through the substrate to form the shielded IC packages.
Claims
1. A method for making a plurality of shielded integrated circuit (IC) packages comprising: providing a plurality of spaced apart IC dies carried by a substrate and covered by a common encapsulating material; cutting through the common encapsulating material between adjacent IC dies to define a plurality of spaced apart IC packages carried by the substrate; positioning an electrically conductive layer over the plurality of spaced apart IC packages and completely filling spaces between adjacent IC packages, wherein the completely filling the spaces between the adjacent IC packages is performed by a deposition process without filling the spaces followed by a drive-in process; and cutting through the electrically conductive layer between adjacent IC packages and through the substrate to form the plurality of shielded IC packages.
2. The method according to claim 1, wherein positioning the electrically conductive layer comprises: positioning an electrically conductive polymer layer over the plurality of spaced apart IC packages and over the spaces between adjacent IC packages, with the electrically conductive polymer layer being a solid material carried by a film; applying pressure and heat to the electrically conductive polymer layer so that the solid material transforms to a soft material so as to flow over the plurality of spaced apart IC packages and filling the spaces between adjacent IC packages; and cooling the electrically conductive polymer layer from the soft material back to the solid material providing the electrically conductive layer.
3. The method according to claim 2, further comprising separating the film from the electrically conductive layer.
4. The method according to claim 1, wherein the substrate is exposed after cutting the encapsulating material between adjacent IC dies.
5. The method according to claim 1, wherein the electrically conductive layer is on an upper surface and sidewalls of each IC package.
6. The method according to claim 2, wherein the electrically conductive polymer layer comprises a non-conductive polymer with conductive fillers mixed therein.
7. The method according to claim 6, wherein the non-conductive polymer is thermosetting.
8. The method according to claim 2, wherein the heat applied to the electrically conductive polymer layer is within a range of 100-150° C.
9. The method according to claim 2, wherein the pressure applied to the electrically conductive polymer layer is within a range of 200-400 kPa.
10. The method according to claim 1, wherein a thickness of the electrically conductive layer is within a range of 5-15 microns.
11. The method according to claim 1, wherein the substrate is exposed after cutting the encapsulating material between adjacent IC dies, and wherein the electrically conductive layer is on an upper surface and sidewalls of each IC package.
12. A method for making a plurality of shielded integrated circuit (IC) packages comprising: providing a plurality of spaced apart IC dies carried by a substrate and covered by a common encapsulating material; forming openings in the common encapsulating material between adjacent IC dies; forming an electrically conductive layer over the common encapsulating material and the openings; after forming the electrically conductive layer, transporting material from the electrically conductive layer to fill the opening; and cutting through the electrically conductive layer between adjacent ones of the plurality of spaced apart IC dies and through the substrate to form the plurality of shielded IC packages.
13. The method according to claim 11, wherein positioning the electrically conductive layer comprises: positioning an electrically conductive polymer layer over the plurality of spaced apart IC packages and over the spaces between adjacent IC packages, with the electrically conductive polymer layer being a solid material carried by a film; applying pressure and heat to the electrically conductive polymer layer so that the solid material transforms to a soft material so as to flow over the plurality of spaced apart IC packages and filling the spaces between adjacent IC packages; and cooling the electrically conductive polymer layer from the soft material back to the solid material providing the electrically conductive layer.
14. The method according to claim 13, further comprising separating the film from the electrically conductive layer.
15. The method according to claim 13, wherein the electrically conductive polymer layer comprises a non-conductive polymer with conductive fillers mixed therein.
16. The method according to claim 15, wherein the non-conductive polymer is thermosetting.
17. The method according to claim 13, wherein the heat applied to the electrically conductive polymer layer is within a range of 100-150° C.; and the pressure applied to the electrically conductive polymer layer is within a range of 200-400 kPa.
18. The method according to claim 11, wherein a thickness of the electrically conductive layer is within a range of 5-15 microns.
19. A method for making a plurality of shielded integrated circuit (IC) packages comprising: providing a plurality of spaced apart IC dies carried by a substrate and covered by a common encapsulating material; cutting through the common encapsulating material between adjacent IC dies to define a plurality of spaced apart IC packages carried by the substrate; positioning an electrically conductive polymer layer over the plurality of spaced apart IC packages and over the spaces between adjacent IC packages, with the electrically conductive polymer layer being a solid material carried by a film; applying pressure and heat to the electrically conductive polymer layer so that the solid material transforms to a soft material so as to flow over the plurality of spaced apart IC packages and filling the spaces between adjacent IC packages; cooling the electrically conductive polymer layer from the soft material back to the solid material providing an electrically conductive layer; and cutting through the electrically conductive layer between adjacent IC packages and through the substrate to form the plurality of shielded IC packages.
20. The method according to claim 19, further comprising separating the film from the electrically conductive layer.
21. The method according to claim 19, wherein the substrate is exposed after cutting the encapsulating material between adjacent IC dies.
22. The method according to claim 19, wherein the electrically conductive layer is on an upper surface and sidewalls of each IC package.
23. The method according to claim 19, wherein the electrically conductive polymer layer comprises a non-conductive polymer with conductive fillers mixed therein.
24. The method according to claim 23, wherein the non-conductive polymer is thermosetting.
25. The method according to claim 19, wherein the heat applied to the electrically conductive polymer layer is within a range of 100-150° C., and the pressure applied to the electrically conductive polymer layer is within a range of 200-400 kPa.
26. A method for making a plurality of shielded integrated circuit (IC) packages comprising: providing a plurality of spaced apart IC dies carried by a substrate and covered by a common encapsulating material; positioning an electrically conductive polymer layer over the common encapsulating material, with the electrically conductive polymer layer being a solid material carried by a film; applying pressure and heat to the electrically conductive polymer layer so that the solid material transforms to a soft material so as to flow over the common encapsulating material; cooling the electrically conductive polymer layer from the soft material back to the solid material providing; and cutting through the electrically conductive layer between adjacent IC dies, through the common encapsulating material and through the substrate to form the plurality of shielded IC packages.
27. The method according to claim 26, further comprising separating the film from the electrically conductive layer.
28. The method according to claim 26, wherein the electrically conductive polymer layer comprises a non-conductive polymer with conductive fillers mixed therein.
29. The method according to claim 28, wherein the non-conductive polymer is thermosetting.
30. The method according to claim 26, wherein the heat applied to the electrically conductive polymer layer is within a range of 100-150° C., and wherein the pressure applied to the electrically conductive polymer layer is within a range of 200-400 kPa.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
(8) The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like numbers refer to like elements throughout.
(9) A method for making a plurality of shielded integrated circuit (IC) packages 24 will now be discussed in reference to the flowchart 100 in
(10) Each IC die 40 is secured to the substrate 30 by an adhesive layer 32. Each IC die 40 may be electrically coupled to the substrate 30 through the use of wire bonds, for example. Alternatively, a flip chip may be used.
(11) The method further includes at Block 106 cutting through the common encapsulating material 50 between adjacent IC dies 40 to define a plurality of spaced apart IC packages 22 carried by the substrate 30, as illustrated in
(12) An electrically conductive polymer layer 70 is positioned over the plurality of spaced apart IC packages 22 and over the spaces 60 between spaced apart IC packages 22 at Block 108 and as illustrated in
(13) The electrically conductive polymer layer 70 comprises a non-conductive polymer with conductive fillers mixed therein. The non-conductive polymer is thermosetting. The conductive fillers, for example, may include aluminum, copper, chromium, stannum, gold, silver, nickel or any combination thereof. Nonetheless, the conductive fillers are not limited to these metal materials.
(14) Pressure and heat are simultaneously applied at Block 110 to the electrically conductive polymer layer 70. The pressure and heat causes the electrically conductive polymer layer 70, which is a solid material, to transform to a soft material so as to flow over the plurality of spaced apart IC packages 22 and filling the spaces 60 between adjacent IC packages. The soft material is a gel like material that can easily spread through small intersections and interfaces.
(15) The heat applied to the electrically conductive polymer layer 70 is within a range of 100-150° C., for example. The pressure applied to the electrically conductive polymer layer 70 is within a range of 200-400 kPa, for example.
(16) The electrically conductive polymer layer 70 is cooled at Block 112 from the soft material back to the solid material. The cooling may be to room temperature or lower, for example. This provides an electrically conductive layer 80 over the plurality of IC packages 22 and the spaces 60 between adjacent IC packages. The film 72 is then removed or separated from the electrically conductive layer 80 at Block 114. Since the substrate 30 is exposed between adjacent IC packages, this allows the electrically conductive layer 80 to be grounded.
(17) The method further includes at Block 116 cutting through the electrically conductive layer 80 between adjacent IC packages 22 and through the substrate 30 to form the plurality of shielded IC packages 24. As best illustrated in
(18) A thickness of the electrically conductive layer 80 may be within a range of 5-15 microns, for example. Use of the electrically conductive polymer layer 70 advantageously allows the thickness of the electrically conductive layer 80 to be controlled so that a uniform thickness is provided. Use of the electrically conductive polymer layer 70 also advantageously provides a shielded IC package 24 in a relatively straightforward manner.
(19) As an option, if the sides of the IC packages 22 do not need to be shielded, then the step of cutting through the common encapsulating material 50 between adjacent IC dies 40 is not performed. Reference is now directed to the flowchart 200 illustrated in
(20) An electrically conductive polymer layer 70 is positioned over the common encapsulating material 50 at Block 206, with the electrically conductive polymer layer being a solid material carried by a film 72. Pressure and heat are applied to the electrically conductive polymer layer 70 so that the solid material transforms to a soft material so as to flow over the common encapsulating material 50 at Block 208.
(21) The electrically conductive polymer layer 70 is cooled from the soft material back to the solid material at Block 210. The film 72 is separated from the electrically conductive layer 70 at Block 212. The method further comprises cutting through the electrically conductive layer 70 between adjacent IC dies 40, through the common encapsulating material 50 and through the substrate 30 to form the plurality of shielded IC packages at Block 214. The method ends at Block 216.
(22) Many modifications and other embodiments of the invention will come to the mind of one skilled in the art having the benefit of the teachings presented in the foregoing descriptions and the associated drawings. Therefore, it is understood that the invention is not to be limited to the specific embodiments disclosed, and that modifications and embodiments are intended to be included within the scope of the appended claims.