PACKAGE STRUCTURE FOR POWER DEVICE
20210050320 ยท 2021-02-18
Assignee
Inventors
Cpc classification
H01L2224/40225
ELECTRICITY
H01L25/18
ELECTRICITY
H01L23/36
ELECTRICITY
H01L2924/16235
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/37193
ELECTRICITY
H01L2224/131
ELECTRICITY
H01L2224/16238
ELECTRICITY
H01L2924/16793
ELECTRICITY
H01L2224/17106
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/16225
ELECTRICITY
H01L2224/0603
ELECTRICITY
H01L2924/16152
ELECTRICITY
H01L2224/131
ELECTRICITY
H01L2224/40137
ELECTRICITY
H01L2924/16251
ELECTRICITY
H01L2924/16196
ELECTRICITY
H01L2224/16227
ELECTRICITY
H01L24/73
ELECTRICITY
H01L2224/1411
ELECTRICITY
H01L23/3735
ELECTRICITY
International classification
H01L23/373
ELECTRICITY
H01L23/498
ELECTRICITY
H01L25/07
ELECTRICITY
Abstract
A package structure for power devices includes a heat dissipation insulating substrate, a plurality of power devices, at least one conductive clip, and a heat dissipation baseplate. The heat dissipation insulating substrate has a first surface and a second surface opposite thereto, and the power devices form a bridge circuit topology and are disposed on the first surface, wherein active regions of at least one of the power devices are flip-chip bonded to the first surface. The conductive clip is configured to electrically connect at least one of the power devices to the first surface, and the heat dissipation baseplate is disposed at the second surface of the heat dissipation insulating substrate.
Claims
1. A package structure for power devices, comprising: a heat dissipation insulating substrate, comprising a first surface and a second surface opposite thereto; a plurality of power devices forming a bridge circuit topology and disposed on the first surface, wherein active regions of at least one of the power devices are flip-chip bonded to the first surface; at least one conductive clip, configured to electrically connect at least one of the power devices to the first surface; and a heat dissipation baseplate, disposed at the second surface of the heat dissipation insulating substrate.
2. The package structure for power devices according to claim 1, wherein one conductive clip electrically connects one or more of the power devices to the heat dissipation insulating substrate and is disposed at an opposite side of the power device opposite to a side where the power device is bonded to the heat dissipation insulating substrate.
3. The package structure for power devices according to claim 1, wherein a material of the conductive clip comprises aluminium, copper or graphite.
4. The package structure for power devices according to claim 1, wherein the plurality of power devices comprise vertical power devices, active regions of the vertical power devices are flip-chip bonded to the first surface, and the at least one conductive clip electrically connects non-active regions of the vertical power devices to the first surface.
5. The package structure for power devices according to claim 1, wherein the heat dissipation insulating substrate comprises a direct bonded copper (DBC) ceramic substrate, a direct plating copper (DPC) ceramic substrate, an insulating metal substrate (IMS) or a printed circuit board (PCB).
6. The package structure for power devices according to claim 1, wherein the heat dissipation insulating substrate comprises a patterned circuit, the patterned circuit contains a plurality of electrical functions and is electrically connected with the at least one conductive clip, and the patterned circuit is electrically connected with the plurality of power devices.
7. The package structure for power devices according to claim 6, wherein one conductive clip connects the patterned circuit of different electrical functions.
8. The package structure for power devices according to claim 1, wherein the second surface of the heat dissipation insulating substrate is monolithically formed with the heat dissipation baseplate or thermally contacts with the heat dissipation baseplate.
9. A package structure for power devices, comprising: a heat dissipation insulating substrate; a plurality of vertical power devices forming a bridge circuit topology, wherein active regions of at least one of the vertical power devices are flip-chip bonded to the heat dissipation insulating substrate; and at least one conductive clip, electrically connecting non-active regions of the vertical power devices, which are flip-chip bonded to the heat dissipation insulating substrate, to the heat dissipation insulating substrate.
10. The package structure for power devices according to claim 9, wherein the heat dissipation insulating substrate comprises a patterned circuit, the patterned circuit contains a plurality of electrical functions and is electrically connected with the at least one conductive clip, and the patterned circuit is electrically connected with the plurality of vertical power devices.
11. The package structure for power devices according to claim 10, wherein one conductive clip connects the patterned circuit of different electrical functions.
12. The package structure for power devices according to claim 9, further comprising a heat dissipation baseplate, disposed at another surface of the heat dissipation insulating substrate other than a surface where the heat dissipation insulating substrate is bonded to the plurality of vertical power devices.
13. The package structure for power devices according to claim 12, wherein the heat dissipation insulating substrate is monolithically formed with the heat dissipation baseplate or thermally contacts with the heat dissipation baseplate.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0021]
[0022]
[0023]
[0024]
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[0026]
[0027]
DESCRIPTION OF THE EMBODIMENTS
[0028] Many different implementations or examples are provided by the following disclosed content to implement different features of the invention. Certainly, these embodiments are only examples and are not intended to limit the scope and application of the invention. In addition, the relative thicknesses and positions of components, films, or regions may be reduced or enlarged for clarity. In addition, same or like reference numerals are used in the accompanying drawings to indicate same or like elements or features. Details of reference numerals that appear in one drawing may be omitted in the description of the following drawings.
[0029]
[0030] Referring to
[0031] In the first embodiment, the conductive clip 106 is configured to electrically connect at least one of the power devices 104 with the first surface 102a, wherein the material of the conductive clip 106 is, for example, aluminium, copper or graphite. Furthermore, one conductive clip 106 may electrically connect a plurality of power devices 104 to the heat dissipation insulating substrate 102 and is disposed at an opposite side 104b of the power device 104 opposite to a side where the power device 104 is bonded to the heat dissipation insulating substrate 102. However, the invention is not limited thereto, one conductive clip 106 may also only electrically connect one power device 104 to the heat dissipation insulating substrate 102. In one embodiment, if the power device 104 is a vertical power device, a part of the conductive clip 106 may electrically connect the non-active regions of the vertical power devices, and the other part of the conductive clip 106 may electrically connect the first surface 102a. In addition, mutual electric connection may be formed between the first surface 102a and the conductive clip 106 by virtue of a first conductive connection layer 110, and mutual electric connection may be formed between the power device 104 and the conductive clip 106 by virtue of a second conductive connection layer 112, but the invention is not limited thereto. The first conductive connection layer 110 and the second conductive connection layer 112 are, for example, sintered silver layers or other conductive connection layers.
[0032] Referring again to
[0033] The heat dissipation baseplate 108 is disposed at the second surface 102b of the heat dissipation insulating substrate 102, and may be mutually electrically connected via a third conducive connection layer 122, wherein the third conductive connection layer 122 is, for example, a sintered silver layer or other conductive connection layers. However, the invention is not limited thereto.
[0034] The second surface 102b of the heat dissipation insulating substrate 102 may also be monolithically formed with a heat dissipation baseplate 200 or thermally contact with the heat dissipation baseplate 200, as shown in
[0035]
[0036] Referring to
[0037]
[0038] Referring to
[0039]
[0040] In
[0041] The above circuits are only one embodiment of the package structure for power devices of the invention and are not intended to limit the application scope of the invention.
[0042] If the half-bridge circuit of
[0043] In addition, because the area and thermal conductivity coefficient of the conductive clip (such as a copper clip) are both higher than those of traditional aluminium metal wires for wire bonding, the thermal resistance (R.sub.JF) can be reduced from 0.14 C./W in the case of the traditional wiring to 0.10 C./W in the case of using the conductive clip, wherein the thermal resistance drop is as much as 30%.
[0044] Based on the above, according to the invention, the power devices are directly bonded to the heat dissipation insulating substrate through the flip-chip bonding technology, and the conductive clip is used as the connection configuration of the circuit. Therefore, by virtue of the properties of the heat dissipation insulating substrate and the conductive clip, such as low parasitic impedance and low parasitic inductance, the stray inductance and the thermal resistance of the power module can be reduced, which further reduces the electric power conversion loss, more evenly distributes the current, and decreases the voltage surge.
[0045] Although the invention is described with reference to the above embodiments, the embodiments are not intended to limit the invention. A person of ordinary skill in the art may make variations and modifications without departing from the spirit and scope of the invention. Therefore, the protection scope of the invention should be subject to the appended claims.