POWER SEMICONDUCTOR COOLING ASSEMBLY
20230052028 · 2023-02-16
Inventors
Cpc classification
H01L23/36
ELECTRICITY
H01L23/3735
ELECTRICITY
H01L23/051
ELECTRICITY
International classification
Abstract
A power switch module includes a semiconductor die and a conductive busbar. The semiconductor die is electrically conductively mounted to the busbar. The module also includes a dielectric coolant fluid and the busbar and the semiconductor die mounted thereto are immersed in the dielectric coolant fluid.
Claims
1. A power switch module comprising: a semiconductor die; and a conductive busbar having the semiconductor die electrically conductively mounted to it; and a dielectric coolant fluid wherein the busbar and the semiconductor die mounted thereto are immersed in the dielectric coolant fluid.
2. The module of claim 1, wherein the semiconductor die is electrically connected to the busbar by being sintered directly thereto.
3. The module of claim 1, wherein the semiconductor die is mounted to two busbars.
4. The module of claim 1, wherein the semiconductor die is attached to busbars on opposite sides and the module receives cooling through those busbars from coolant fluid at the two sides.
5. The module of claim 1, wherein the busbar is made of copper.
6. The module of claim 1, wherein the coolant is forcibly and continuously flowed past the busbar(s).
7. The module of claim 6, wherein the semiconductor die and the busbar are provided in a module housing having an inlet and an outlet, wherein coolant flows into the inlet and out of the outlet.
8. The module of claim 7, wherein the inlet and the outlet are placed at opposite ends of the housing.
9. The module of claim 1, wherein the busbar is formed in a pattern of channels to improve heat transfer.
10. A power converter assembly comprising: one or more power switch modules as claimed in claim a.
11. A power converter assembly as claimed in claim 8, wherein the assembly is configured for use in an aircraft power system.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0012] The following descriptions should not be considered limiting in any way. With reference to the accompanying drawings, like elements are numbered alike:
[0013]
[0014]
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[0019]
[0020]
DETAILED DESCRIPTION
[0021]
[0022] As can be seen, there are several layers of different materials between the semiconductor chip 1 and the cooling assembly, and, particularly, the cooling fluid that would flow inside the heat sink 7 beneath the base plate 4. This provides a relatively high thermal impedance thus limiting the ability of the assembly to dissipate heat from the chip 1.
[0023] Some methods have been proposed to improve cooling, such as shown in
[0024] Reducing the thermal impedance e.g. by eliminating some or all of the intermediate layers and/or improving the thermal conductivity of remaining layers results in improved cooling of the semiconductor chip.
[0025] To achieve improved cooling, in the assembly of this disclosure, rather than the chip being mounted to a busbar and then the busbar being mounted via a dielectric layer to a base plate below with coolant fluid flows, the cooling is provided by the chip and busbar to which it is (directly) mounted being immersed in coolant fluid as shown in
[0026]
[0027]
[0028] The shape of the busbar can be designed to facilitate the transfer of heat from the busbar to the coolant. The busbar can be designed to form different coolant channel patterns such as that shown in
[0029] The direct attachment of the busbar(s) to the chip also increases the mechanical strength of the assembly.
[0030] As mentioned above, to ensure the necessary electrical isolation, the coolant fluid must be non-electrically conductive. It should also be non-combustible, have a high thermal coefficient and low viscosity.
[0031] To further increase the transfer surface from the heat source (the semiconductor die) to the coolant fluid, conductive connections can be used. The high thermal conductivity of the busbars e.g. of copper, is used to spread the heat and thus increase the thermal conductivity in the heat dissipation path.
[0032] The immersion of the switching cell in the cooling fluid thus minimises the thermal impedance between the device and the coolant.
[0033] The effect of the reduction in thermal impedance can be shown using thermal impedance equivalent circuits to compare various designs.
[0034] In
[0035] Zch: thermal impedance of the semiconductor chip
[0036] Zcbu: thermal impedance of the copper busbar (including attachment, i.e. solder)
[0037] Zcs: thermal impedance of the ceramic substrate (including attachment)
[0038] Zcb: thermal impedance of the copper bonding layer
[0039] Zbp: thermal impedance of the baseplate
[0040] Ztim: thermal impedance of the thermal interface material
[0041] Zhs: thermal impedance of the heat-sink and to the ambient
[0042] Z.sub.CoA: thermal impedance of the coolant and to the ambient
[0043]
[0044] The described assembly enables power electronic converters and the like to be developed with greatly increased power densities compared to existing designs. This is a critical performance indicator in many fields e.g. in aerospace power converter applications. The design can also provide improved voltage insulation for smaller dimensions. Further, uniform thermal heat can result in reliability improvements of the overall assembly.
[0045] While the present disclosure has been described with reference to an exemplary embodiment or embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the present disclosure. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the present disclosure without departing from the essential scope thereof. Therefore, it is intended that the present disclosure not be limited to the particular embodiment disclosed as the best mode contemplated for carrying out this present disclosure, but that the present disclosure will include all embodiments falling within the scope of the claims.