Electronic circuit package using composite magnetic sealing material

Abstract

Disclosed herein is an electronic circuit package includes a substrate having a power supply pattern, an electronic component mounted on a surface of the substrate, and a composite molding member having conductivity that covers the surface of the substrate so as to embed the electronic component and that is connected to the power supply pattern. The composite molding member includes a resin material and a first filler blended in the resin material and containing 32 to 39 wt. % of a metal material composed mainly of Ni in Fe.

Claims

1. An electronic circuit package comprising: a substrate having a power supply pattern; an electronic component mounted on a surface of the substrate; a composite molding member having conductivity that covers the surface of the substrate so as to embed the electronic component, the composite molding member being connected to the power supply pattern, the composite molding member including a resin material and a first filler blended in the resin material, the first filler containing 32 to 39 wt. % of a metal material composed mainly of Ni in Fe; and a metal coating covering a surface of the first filler, the metal coating having a higher conductivity than that of the first filler.

2. The electronic circuit package as claimed in claim 1, wherein the composite molding member further includes a second filler having a smaller size than that of the first filler.

3. The electronic circuit package as claimed in claim 2, wherein a surface of the second filler is covered with a metal coating.

4. The electronic circuit package as claimed in claim 2, wherein the second filler is formed of a magnetic material.

5. The electronic circuit package as claimed in claim 2, wherein the second filler is formed of a conductive material.

6. The electronic circuit package as claimed in claim 2, wherein the second filler is formed of an insulating material.

7. The electronic circuit package as claimed in claim 2, wherein a blending ratio of the first and second fillers in the composite molding member is equal to or higher than 50 vol. % and equal to or lower than 85 vol. %.

8. The electronic circuit package as claimed in claim 2, wherein a blending ratio of the first filler to a total amount of the first and second fillers is equal to or higher than 50 vol. % and equal to or lower than 99 vol. %.

9. The electronic circuit package as claimed in claim 1, further comprising an insulating coating that insulates the electronic component and its terminal electrode from the composite molding member.

10. The electronic circuit package as claimed in claim 1, wherein the composite molding member contacts the power supply pattern exposed to the surface of the substrate.

11. The electronic circuit package as claimed in claim 10, wherein the composite molding member further contacts the power supply pattern exposed to a side surface of the substrate.

12. The electronic circuit package as claimed in claim 1, wherein the composite molding member contacts the power supply pattern exposed to a side surface of the substrate.

13. The electronic circuit package as claimed in claim 1, wherein the substrate includes a side surface having a side surface upper part and a side surface lower part protruding from the side surface upper part, wherein the power supply pattern is exposed to the side surface upper part of the substrate, and wherein the composite molding member covers the side surface upper part of the substrate without covering the side surface lower part of the substrate.

14. The electronic circuit package as claimed in claim 1, further comprising a metal film that covers the composite molding member, the metal film having higher conductivity than that of the composite molding member.

15. The electronic circuit package as claimed in claim 1, further comprising a magnetic film that covers the composite molding member, the magnetic film having higher permeability than that of the composite molding member.

16. The electronic circuit package as claimed in claim 1, wherein the metal material further includes 0.1 to 8 wt. % of Co relative to a total weight of the first filler.

17. The electronic circuit package as claimed in claim 1, wherein a thermal expansion coefficient of the composite molding member is equal to or lower than 15 ppm/ C.

18. The electronic circuit package as claimed in claim 1, wherein a thickness of the composite molding member at a portion above the electronic component is equal to or larger than 50 m.

19. The electronic circuit package as claimed in claim 18, wherein the thickness of the composite molding member at a portion above the electronic component is equal to or larger than 100 m and equal to or smaller than 300 m.

20. An electronic circuit package comprising: a substrate having a power supply pattern; an electronic component mounted on a surface of the substrate; and a composite molding member having conductivity that covers the surface of the substrate so as to embed the electronic component, the composite molding member being connected to the power supply pattern, the composite molding member including: a resin material; a first filler blended in the resin material, the first filler containing 32 to 39 wt. % of a metal material composed mainly of Ni in Fe, and a second filler blended in the resin material, the second filler having a smaller size than that of the first filler.

21. An electronic circuit package comprising: a substrate having a power supply pattern; an electronic component mounted on a surface of the substrate; and a composite molding member having conductivity that covers the surface of the substrate so as to embed the electronic component, the composite molding member being connected to the power supply pattern, wherein the power supply pattern is exposed to the surface of the substrate and wherein the composite molding member contacts the power supply pattern and includes a resin material and a first filler blended in the resin material, the first filler containing 32 to 39 wt. % of a metal material composed mainly of Ni in Fe.

22. An electronic circuit package comprising: a substrate having a power supply pattern; an electronic component mounted on a surface of the substrate; and a composite molding member having conductivity that covers the surface of the substrate so as to embed the electronic component, the composite molding member being connected to the power supply pattern, wherein the composite molding member includes a resin material and a first filler blended in the resin material, the first filler containing 32 to 39 wt. % of a metal material that is composed mainly of Ni in Fe and that includes 0.1 to 8 wt. % of Co relative to a total weight of the first filler.

23. An electronic circuit package comprising: a substrate having a power supply pattern; an electronic component mounted on a surface of the substrate; and a composite molding member having conductivity that covers the surface of the substrate so as to embed the electronic component, the composite molding member being connected to the power supply pattern and having a thermal expansion coefficient equal to or lower than 15 ppm/ C., wherein the composite molding member includes a resin material and a first filler blended in the resin material, the first filler containing 32 to 39 wt. % of a metal material composed mainly of Ni in Fe.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The above features and advantages of the present invention will be more apparent from the following description of certain preferred embodiments taken in conjunction with the accompanying drawings, in which:

(2) FIG. 1 is a cross-sectional view illustrating a configuration of an electronic circuit package according to a first embodiment of the present invention;

(3) FIGS. 2 to 6 are process views for explaining a manufacturing method for the electronic circuit package shown in FIG. 1;

(4) FIG. 7 is a cross-sectional view for explaining a structure of a first filler;

(5) FIGS. 8A to 8C are cross-sectional views for explaining a structure of a second filler;

(6) FIG. 9 is a cross-sectional view illustrating a configuration of an electronic circuit package according to a second embodiment of the present invention;

(7) FIG. 10 is a cross-sectional view illustrating a configuration of an electronic circuit package according to a third embodiment of the present invention;

(8) FIG. 11 is a cross-sectional view illustrating a configuration of an electronic circuit package according to a fourth embodiment of the present invention;

(9) FIG. 12 is a cross-sectional view illustrating a configuration of an electronic circuit package according to a fifth embodiment of the present invention;

(10) FIG. 13 is a cross-sectional view illustrating a configuration of an electronic circuit package according to a sixth embodiment of the present invention;

(11) FIG. 14 is a cross-sectional view illustrating a configuration of an electronic circuit package according to a seventh embodiment of the present invention;

(12) FIG. 15 is a cross-sectional view illustrating a configuration of an electronic circuit package according to an eighth embodiment of the present invention;

(13) FIG. 16 is a cross-sectional view illustrating a configuration of an electronic circuit package according to a modification of the eighth embodiment of the present invention;

(14) FIG. 17 is a cross-sectional view illustrating a configuration of an electronic circuit package according to a ninth embodiment of the present invention; and

(15) FIG. 18 is a graph indicating measurement results of examples.

DETAILED DESCRIPTION OF THE EMBODIMENTS

(16) Preferred embodiments of the present invention will be explained below in detail with reference to the accompanying drawings.

(17) <First Embodiment>

(18) FIG. 1 is a cross-sectional view illustrating a configuration of an electronic circuit package 11 according to the first embodiment of the present invention.

(19) As illustrated in FIG. 1, the electronic circuit package 11 according to the present embodiment includes a substrate 20, a plurality of electronic components 31 and 32 mounted on the substrate 20, and a composite molding member 40 having a conductivity covering a front surface 21 of the substrate 20 so as to embed the electronic components 31 and 32.

(20) Although the type of the electronic circuit package 11 according to the present embodiment is not especially limited, examples thereof include a high-frequency module handling a high-frequency signal, a power supply module performing power supply control, an SIP (System-In-Package) having a 2.5D structure or a 3D structure, and a semiconductor package for radio communication or digital circuit. Although only two electronic components 31 and 32 are illustrated in FIG. 1, more electronic components are incorporated actually.

(21) The substrate 20 has a double-sided and multilayer wiring structure in which a large number of wirings are embedded therein and may be any type of substrate including: a thermosetting resin based organic substrate such as an FR-4, an FR-5, a BT, a cyanate ester substrate, a phenol substrate, or an imide substrate; a thermoplastic resin based organic substrate such as a liquid crystal polymer; an LTCC substrate; an HTCC substrate; and a flexible substrate. In the present embodiment, the substrate 20 has a four-layer structure including wiring layers formed on the front surface 21 and a back surface 22 and two wiring layers embedded therein. Land patterns 23 are an internal electrode for connecting to the electronic components 31 and 32. The land patterns 23 and each of the electronic components 31 and 32 are electrically and mechanically connected to each other through a respective solder 24 (or a conductive paste). For example, the electronic component 31 is a semiconductor chip such as a controller, and electronic component 32 is a passive component such as a capacitor or a coil. Some electronic components (e.g., thinned semiconductor chip) may be embedded in the substrate 20.

(22) The land patterns 23 are connected to external terminals 26 formed on the back surface 22 of the substrate 20 through internal wirings 25 formed inside the substrate 20. Upon actual use, the electronic circuit package 11A is mounted on an unillustrated mother board, and land patterns on the mother board and the external terminals 26 of the electronic circuit package 11A are electrically connected. A material for a conductor forming the land patterns 23, internal wirings 25, and external terminals 26 may be a metal such as copper, silver, gold, nickel, chrome, aluminum, palladium, indium, or a metal alloy thereof or may be a conductive material using resin or glass as a binder; however, when the substrate 20 is an organic substrate or a flexible substrate, copper or silver is preferably used in terms of cost and conductivity. The above conductive materials may be formed by using various methods such as printing, plating, foil lamination, sputtering, vapor deposition, and inkjet. In addition, a low-resistance metal such as Au, Pd, Ag, Sn, and the like may be formed on the land patterns 23 by means of plating, spattering, evaporating, and the like, or an antioxidizing film such as CuOSP and the like may be formed on the land patterns 23.

(23) The electronic components 31, 32, and their terminal electrodes and the solders 24 are covered with insulating coatings 51 and 52, respectively, and thereby insulated from the composite molding member 40. Although the insulating coating 51 is provided between the electronic component 31 and the substrate 20 in the example of FIG. 1, it may be provided so as to cover the entire electronic component 31. On the other hand, the insulating coating 52 is provided so as to cover the entire electronic component 32.

(24) As illustrated in FIG. 1, a power supply pattern 23G led out from the land pattern 23 is exposed without being covered with the insulating coating 51 or 52 and contacts the composite molding member 40. The power supply pattern 23G is typically a ground pattern to which a ground potential is applied, but not limited thereto as long as it is a pattern to which a fixed potential is applied.

(25) The composite molding member 40 covers the front surface 21 of the substrate 20 so as to embed the electronic components 31 and 32 therein. The composite molding member 40 has a conductivity and high permeability. Thus, the composite molding member 40 serves as an electromagnetic shielding and a magnetic shielding in addition to an ordinary function of a molding member. In the present embodiment, a side surface 42 of the composite molding member 40 and a side surface 27 of the substrate 20 form the same plane. Although details of the composite molding member 40 are described later, the composite molding member 40 is made of a composite material having very small thermal expansion coefficient (equal to or lower than 15 ppm/ C., for example) compared with an ordinary molding material.

(26) The following describes a manufacturing method for the electronic circuit package 11 according to the present embodiment.

(27) FIGS. 2 to 6 are process views for explaining a manufacturing method for the electronic circuit package 11.

(28) As illustrated in FIG. 2, an assembly substrate 20A having a multilayer wiring structure is prepared. A plurality of the land patterns 23 and a plurality of the ground patterns 23G are formed on the front surface 21 of the assembly substrate 20A, and a plurality of the external terminals 26 are formed on the back surface 22 of the assembly substrate 20A. Further, a plurality of the internal wirings 25 are formed in an inner layer of the assembly substrate 20A. A dashed line a in FIGS. 2 to 5 denotes a part to be cut in a subsequent dicing process.

(29) Then, as illustrated in FIG. 2, the plurality of electronic components 31 and 32 are mounted on the front surface 21 of the assembly substrate 20A so as to be connected to the land patterns 23. Specifically, the solder 24 is provided on the land pattern 23, followed by mounting of the electronic components 31 and 32 and by reflowing, whereby the electronic components 31 and 32 are connected to the land patterns 23.

(30) Then, as illustrated in FIG. 3, the electronic components 31, 32, and the terminal electrodes and solders 24 of the respective electronic components 31, 32 are covered with the insulating coatings 51 and 52, respectively. At this time, at least a part of the power supply pattern 23G needs to be exposed without being covered with the insulating coating 51 or 52.

(31) Then, as illustrated in FIG. 4, the composite molding member 40 is used to cover the surface 21 of the aggregate substrate 20A so as to embed the electronic components 31 and 32 therein. A formation method for the composite molding member 40 includes transfer molding, compression molding, injection molding, cast molding, vacuum cast molding, dispensing, and a method using a slit nozzle. Thereafter, as illustrated in FIG. 5, the upper surface of the composite molding member 40 is polished to adjust the thickness of the composite molding member 40. Although the thickness of the composite molding member 40 is not particularly limited, the thickness of the composite molding member 40 at a portion above the tallest electronic component among all the electronic components including the electronic components 31 and 32 is preferably equal to or larger than 50 m and more preferably equal to or larger than 100 m. This can sufficiently reduce volume resistivity of the composite molding member 40. However, in the present invention, polishing of the upper surface of the composite molding member 40 is optional.

(32) Then, as illustrated in FIG. 6, the aggregate substrate 20A is cut along the dashed lines a into individual substrates 20, whereby the electronic circuit package 11 according to the present embodiment is completed.

(33) Next, a molding material constituting the composite molding member 40 will be described in detail.

(34) The molding material constituting the composite molding member 40 has magnetism and conductivity unlike general molding materials. The composite molding member 40 is connected to the power supply pattern 23G and is thus applied with a fixed potential such as a ground potential. As a result, a composite shielding structure having both a magnetic shielding function and an electromagnetic shielding function can be provided.

(35) The composite molding member 40 includes a binder and a first filler having magnetism and conductivity. Although not especially limited, the resin binder preferably composed mainly of a thermosetting resin material. Specifically, the binder is preferably composed mainly of an epoxy resin, a phenol resin, a urethane resin, a silicone resin, or an imide resin and more preferably uses a base resin and a curing agent used for an epoxy resin-based or a phenol resin-based semiconductor sealing material.

(36) The most preferable is the epoxy resin having a reactive epoxy group at its terminal, which can be combined with various types of curing agents and curing accelerators. Examples of the epoxy resin include a bisphenol A epoxy resin, a bisphenol F epoxy resin, a phenoxy type epoxy resin, a naphthalene type epoxy resin, a multifunctional-type epoxy resin (dicyclopentadiene type epoxy resin, etc.), a biphenyl-type (bifunctional) epoxy resin, and an epoxy resin having a special structure. Among them, the biphenyl type epoxy resin, naphthalene type epoxy resin, and dicyclopentadiene type epoxy resin are useful since they can attain low thermal expansion. Examples of the curing agent or curing accelerator include amine-based compound alicyclic diamine, aromatic diamine, other amine-based compounds (imidazole, tertiary amine, etc.), an acid anhydride compound (high-temperature curing agent, etc.), a phenol resin (novolac type phenol resin, cresol novolac type phenol resin, etc.), an amino resin, dicyandiamide, and a Lewis acid complex compound. For material kneading, known means such as a kneader, three-roll mills, or a mixer may be used.

(37) FIG. 7 is a cross-sectional view illustrating an example of the first filler F1. It is preferable that the first filler F1 has a median diameter (D50) of d1 and that the surface thereof is applied with a metal coating M having higher conductivity than that of the first filler F1. Applying the metal coating M to the surface of the first filler F1 allows volume resistivity of the composite molding member 40 to be reduced further. The metal coating M is mainly composed of Au, Ag, Al, Mg, W, Mo, Zn, Ni, Fe, Pt, Pd, Sn, or Cu. The thickness of the metal coating M to be formed on the first filler F1 is preferably in a range of 1 nm to 3000 nm.

(38) The first magnetic filler F1 is formed of an FeNi based material and contains 32 to 39 wt. % of a soft magnetic metal material composed mainly of Ni. The remaining 61 to 68 wt. % is Fe. Such an FeNi based material is called Invar material. Using the Invar material for the first filler F1 can make the thermal expansion coefficient of the composite molding member 40 be equal to or less than, e.g., 15 ppm/ C. and can achieve high magnetic characteristics. The soft magnetic metal material composed of mainly Ni may contain a small amount of Co. That is, a part of Ni may be substituted for Co. The containing of Co enables a further reduction in the thermal expansion coefficient of the composite magnetic sealing material. The adding amount of Co to the total weight of the first filler F1 is preferably 0.1 wt. % or more and 8 wt. % or less.

(39) The shape of the first filler F1 is not especially limited. However, the magnetic filler 6 may preferably be formed into a spherical shape for high packing density. Further, fillers of different particle sizes may be blended as the first filler F1 for closest packing. Further, forming the first filler F1 into a spherical shape or substantially a spherical shape enables a reduction in damage to electronic components during molding. Particularly, for high packing density or closest packing, the shape of the first filler F1 is preferably a true sphere. The first filler F1 preferably has a high tap density and a small specific surface area. As a formation method for the first filler F1, there are known a water atomization method, a gas atomization method, and a centrifugal disc atomization method. Among them, the gas atomization method is most preferable since it can achieve a high tap density and reduce the specific surface area.

(40) The composite molding member 40 may contain, in addition to the first filler F1, a second filler F2a (FIG. 8A) formed of a magnetic material, a second filler F2b (FIG. 8B) formed of a conductive material, or a second filler F2c (FIG. 8C) formed of an insulating material. The median diameters d2 of the respective second fillers F2a, F2b, and F2c are smaller than the median diameter d1 of the first filler F1. This can increase the filling rate of the filler contained in the composite molding member 40. The surfaces of the respective second fillers F2a, F2b, and F2c are also each preferably covered with the metal coating M. This can reduce the volume resistivity of the composite molding member 40. The material and thickness of the metal coating M may be the same as those of the metal coating M to be applied to the first filler F1. The blending ratio of the total filler including the first filler F1 and the second filler F2a, F2b, or F2c to the binder is preferably 50 vol. % to 85 vol. %. Further, the blending ratio of the first filler F1 to the total filler is preferably 50 vol. % to 99 vol. %.

(41) The second filler F2a illustrated in FIG. 8A is formed of a magnetic material. The magnetic material may be composed of at least one material selected from a group consisting of Fe, an FeCo based alloy, an FeNi based alloy, an FeAl based alloy, an FeSi based alloy, an NiZn based spinel ferrite, an MnZn based spinel ferrite, an NiCuZn based spinel ferrite, an Mg based spinel ferrite, and an yttrium iron based garnet ferrite. The material of the second filler F2a may be the same as that of the first filler F1. The thickness of the metal coating M to be formed on the second filler F2a is preferably in a range of 1 nm to 2000 nm.

(42) The second filler F2b illustrated in FIG. 8B is formed of a conductive material. The conductive material may be composed of mainly Au, Ag, Al, Mg, W, Mo, Zn, Ni, Fe, Pt, Pd, Sn, or Cu. Even when the conductive material is used as the material of the second filler F2b, the surface of the second filler F2b may be covered with the metal coating M.

(43) The second filler F2c illustrated in FIG. 8C is formed of an insulating material. The insulating material may be composed of fused silica, calcium carbonate, magnesium oxide, aluminum oxide, titanium oxide, or a heat resistant resin. The heat resistant resin may be a thermosetting resin or a thermoplastic resin. Particularly, a material having a smaller thermal expansion coefficient than that of the first filler F1, such as SiO.sub.2, ZrW.sub.2O.sub.8, (ZrO).sub.2P.sub.2O.sub.7, KZr.sub.2(PO.sub.4), or KZr.sub.2(WO.sub.4) (PO.sub.4).sub.2, or a material having a negative thermal expansion coefficient is preferably used. When the above second filler F2c is added to the composite molding member 40, it is possible to further reduce the thermal expansion coefficient. Further, the following materials may be added: flame retardant such as aluminum oxide or magnesium oxide; carbon black, pigment, or dye for coloring; surface-treated nanosilica having a particle diameter of 100 nm or less for enhancement of slidability, flowability, and dispersibility/kneadability; and a wax component for enhancement of mold releasability. The thickness of the metal coating M to be formed on the second filler F2c is preferably in a range of 1 nm to 2000 nm. In the present invention, the composite material constituting the composite molding member 40 need not necessarily contain the second filler (F2a, F2b, or F2c).

(44) The composite material constituting the composite molding member 40 may be a liquid or solid, depending on selection of a base resin and a curing agent according to the molding method therefor. The composite material in a solid state may be formed into a tablet shape for transfer molding and into a granular shape for injection molding or compression molding. The molding method using the composite material may be appropriately selected from among the followings: transfer molding; compression molding; injection molding; cast molding; vacuum cast molding; vacuum printing; printing; dispensing; and a method using a slit nozzle. A molding condition may be appropriately selected from combinations of the base resin, curing agent and curing accelerator to be used. Further, after-cure treatment may be applied as needed after the molding.

(45) As described above, in the electronic circuit package 11 according to the present embodiment, the composite molding member 40 has conductivity, so that the composite molding member 40 itself functions as an electromagnetic shield for the electronic circuit package 11. As a result, electromagnetic waves emitted from the electronic components 31 and 32 or electromagnetic waves coming from the outside are converted into a current inside the composite molding member 40 to be made to flow outside through the power supply pattern 23G. Further, the first filler F1 contained in the composite molding member 40 is formed of an Invar material, it is therefore possible to prevent warpage of the substrate, interfacial peeling in the molding material, cracking of the molding material, and the like due to a temperature change while ensuring magnetic shielding characteristics.

(46) <Second Embodiment>

(47) FIG. 9 is a cross-sectional view illustrating the configuration of an electronic circuit package 12 according to the second embodiment of the present invention.

(48) As illustrated in FIG. 9, in the electronic circuit package 12 according to the present embodiment, the planar size of the composite molding member 40 is slightly larger than the planar size of the substrate 20 and, thus, the side surface 27 of the substrate 20 is covered with the composite molding member 40. To the side surface 27 of the substrate 20, a power supply pattern 25G constituting a part of an internal wiring 25 is exposed, and the exposed power supply pattern 25G and the composite molding member 40 contact each other. As a result, the composite molding member 40 is applied with a fixed potential (typically, a ground potential) through the power supply pattern 25G. In the present embodiment, the power supply pattern 23G is not provided on the surface 21 of the substrate 20, or even when the power supply pattern 23G is provided, it is covered with the insulating coatings 51 and 52, with the result that the power supply pattern 23G and the composite molding member 40 do not contact each other. Other configurations are the same as those of the electronic circuit package 11 according to the first embodiment, so the same reference numerals are given to the same elements, and overlapping description will be omitted.

(49) In the electronic circuit package 12 according to the present embodiment, the power supply pattern 25G exposed to the side surface 27 of the substrate 20 and the composite molding member 40 contact each other, so that the power supply pattern 23G need not be exposed to the surface 21 of the substrate 20. As a result, for example, the insulating coatings 51 and 52 can be formed on the entire surface of the surface 21 of the substrate 20, thereby simplifying the manufacturing process.

(50) The electronic circuit package 12 according to the present embodiment can be manufactured by cutting the aggregate substrate 20A into individual substrates 20 and then forming the composite molding member 40 on the upper and side surfaces 21 and 27 of the substrate 20.

(51) <Third Embodiment>

(52) FIG. 10 is a cross-sectional view illustrating the configuration of an electronic circuit package 13 according to the third embodiment of the present invention.

(53) As illustrated in FIG. 10, in the electronic circuit package 13 according to the present embodiment, the side surface 27 of the substrate 20 is formed into a step shape. Specifically, the side surface 27 has a shape in which a side surface lower part 27b protrudes from a side surface upper part 27a. To the side surface upper part 27a, the power supply pattern 25G is exposed, and the exposed power supply pattern 25G and the composite molding member 40 contact each other. The power supply pattern 25G is not exposed to the side surface lower part 27b, and the side surface lower part 27b and a side surface 42 of the composite molding member 40 constitute the same plane. Other configurations are the same as those of the electronic circuit package 12 according to the second embodiment, so the same reference numerals are given to the same elements, and overlapping description will be omitted.

(54) In the electronic circuit package 13 according to the present embodiment, the power supply pattern 25G exposed to the side surface upper part 27a of the substrate 20 and the composite molding member 40 contact each other, so that the power supply pattern 23G need not be exposed to the surface 21 of the substrate 20. As a result, as in the second embodiment, the insulating coatings 51 and 52 can be formed on the entire surface of the surface 21 of the substrate 20, thereby simplifying the manufacturing process.

(55) The electronic circuit package 13 according to the present embodiment can be manufactured by forming a groove constituting the side surface upper part 27a in the aggregate substrate 20A, then forming the composite molding member 40 in the upper surface 21 of the substrate 20 so as to fill the groove therewith, and afterwards cutting the aggregate substrate 20A into individual substrates 20.

(56) <Fourth Embodiment>

(57) FIG. 11 is a cross-sectional view illustrating the configuration of an electronic circuit package 14 according to the fourth embodiment of the present invention.

(58) As illustrated in FIG. 11, the electronic circuit package 14 according to the present embodiment differs from the electronic circuit package 12 according to the second embodiment in that the power supply pattern 23G provided on the surface 21 of the substrate 20 and the composite molding member 40 contact each other. Other configurations are the same as those of the electronic circuit package 12 according to the second embodiment, so the same reference numerals are given to the same elements, and overlapping description will be omitted.

(59) In the electronic circuit package 14 according to the present embodiment, the composite molding member 40 is connected to the power supply patterns 23G and 25G at both the upper and side surfaces 21 and 27 of the substrate 20, so that it is possible to make the potential (typically, a ground potential) of the composite molding member 40 more stable than in the electronic circuit package 12 according to the second embodiment.

(60) <Fifth Embodiment>

(61) FIG. 12 is a cross-sectional view illustrating the configuration of an electronic circuit package 15 according to the fifth embodiment of the present invention.

(62) As illustrated in FIG. 12, the electronic circuit package 15 according to the present embodiment differs from the electronic circuit package 13 according to the third embodiment in that the power supply pattern 23G provided on the surface 21 of the substrate 20 and the composite molding member 40 contact each other. Other configurations are the same as those of the electronic circuit package 13 according to the third embodiment, so the same reference numerals are given to the same elements, and overlapping description will be omitted.

(63) In the electronic circuit package 15 according to the present embodiment, the composite molding member 40 is connected to the power supply patterns 23G and 25G at both the upper surface 21 and the side surface upper part 27a of the substrate 20, so that it is possible to make the potential (typically, a ground potential) of the composite molding member 40 more stable than in the electronic circuit package 13 according to the third embodiment.

(64) <Sixth Embodiment>

(65) FIG. 13 is a cross-sectional view illustrating the configuration of an electronic circuit package 16 according to the sixth embodiment of the present invention.

(66) As illustrated in FIG. 13, the electronic circuit package 16 according to the present embodiment differs from the electronic circuit package 11 according to the first embodiment in that an independent power supply pattern 29G is additionally provided on the surface 21 of the substrate 20. Other configurations are the same as those of the electronic circuit package 11 according to the first embodiment, so the same reference numerals are given to the same elements, and overlapping description will be omitted.

(67) The power supply pattern 29G is a dedicated pattern for applying a fixed potential to the composite molding member 40. The power supply pattern 29G is not connected to the land patterns 23 and wirings on the upper surface 21 of the substrate 20 but independently provided. The power supply pattern 29G is applied, through the internal wiring 25 formed inside the substrate 20, with a fixed potential same as that applied to the power supply pattern 23G. As exemplified in the present embodiment, as a power supply pattern for applying a fixed potential to the composite molding member 40, not only the power supply pattern 23G led out from the land pattern 23, but also the independent dedicated power supply pattern 29G can be used. With this configuration, it is possible to make the potential (typically, a ground potential) of the composite molding member 40 more stable.

(68) <Seventh Embodiment>

(69) FIG. 14 is a cross-sectional view illustrating the configuration of an electronic circuit package 17 according to the seventh embodiment of the present invention.

(70) As illustrated in FIG. 14, the electronic circuit package 17 according to the present embodiment differs from the electronic circuit package 11 according to the first embodiment in that a metal film 60 is additionally formed so as to cover the upper and side surfaces 41 and 42 of the composite molding member 40 and the side surface 27 of the substrate 20. To the side surface 27 of the substrate 20, the power supply pattern 25G is exposed, and the exposed power supply pattern 25G contacts the metal film 60. Other configurations are the same as those of the electronic circuit package 11 according to the first embodiment, so the same reference numerals are given to the same elements, and overlapping description will be omitted.

(71) The metal film 60 serves as an electromagnetic shielding as well as the composite molding member 40 and is preferably mainly composed of at least one metal selected from a group consisting of Au, Ag, Cu, and Al. The metal film 60 preferably has a resistance as low as possible and most preferably uses Cu in terms of cost. It is necessary that the resistivity of the metal film 60 is lower than at least the resistivity of the composite molding member 40. An outer surface of the metal film 60 is preferably covered with an anticorrosive metal such as SUS, Ni, Cr, Ti, or brass or an antioxidant film made of a resin such as an epoxy resin, a phenol resin, an imide resin, an urethane resin, or a silicone resin. The reason for this is that the metal film 60 undergoes oxidative deterioration by an external environment such as heat or humidity; and, therefore, the aforementioned treatment is preferable to suppress and prevent the oxidative deterioration. A formation method for the metal film 60 may be appropriately selected from known methods, such as a sputtering method, a vapor-deposition method, an electroless plating method, an electrolytic plating method. Before formation of the metal film 60, pretreatment for enhancing adhesion, such as plasma treatment, coupling treatment, blast treatment, or etching treatment, may be performed. As a base of the metal film 60, a high adhesion metal film such as a titanium film, a chromium film, or an SUS film may be formed thinly in advance.

(72) As described above, the electronic circuit package 17 according to the present embodiment includes the metal film 60 connected to the power supply pattern 25G, so that it is possible to make the potential (typically, a ground potential) of the composite molding member 40 more stable than in the electronic circuit package 11 according to the first embodiment.

(73) <Eighth Embodiment>

(74) FIG. 15 is a cross-sectional view illustrating the configuration of an electronic circuit package 18 according to the eighth embodiment of the present invention.

(75) As illustrated in FIG. 15, the electronic circuit package 18 according to the present embodiment differs from the electronic circuit package 11 according to the first embodiment in that a magnetic film 70 is additionally formed so as to cover the upper surface 41 of the composite molding member 40. Other configurations are the same as those of the electronic circuit package 11 according to the first embodiment, so the same reference numerals are given to the same elements, and overlapping description will be omitted.

(76) The magnetic film 70 is a film formed of a composite magnetic material in which magnetic fillers are dispersed in a thermosetting resin material, a thin film formed of a soft magnetic material or a ferrite, or a foil or a bulk sheet and serves as a second magnetic shield. The effective permeability of the magnetic film 70 needs to be higher than that of the composite molding member 40 and is preferably twice or more higher than it.

(77) When a film formed of a composite magnetic material is selected as the magnetic film 70, an epoxy resin, a phenol resin, a silicone resin, a diallyl phthalate resin, a polyimide resin, an urethane resin, and the like may be used as the thermosetting resin material, and the magnetic film 70 can be formed by using a thick-film formation method such as a printing method, a molding method, a slit nozzle coating method, a spray method, a dispensing method, an injection method, a transfer method, a compression molding method, or a lamination method using an uncured sheet-like resin. Using the thermosetting resin material can enhance reliability required for electronic circuit packages such as heat resistance, insulating performance, impact resistance, falling resistance, and the like.

(78) As the magnetic filler, a ferrite or a soft magnetic metal is preferably used, and a soft magnetic metal having a high bulk permeability is more preferably used. As the ferrite or soft magnetic metal, one or two or more metals selected from a group consisting of Fe, Ni, Zn, Mn, Co, Cr, Mg, Al, and Si and oxides thereof may be exemplified. As specific examples, a ferrite such as an NiZn ferrite, an MnZn ferrite, an NiCuZn ferrite, a permalloy (FeNi alloy), a super permalloy (FeNiMo alloy), a sendust (FeSiAl alloy), an FeSi alloy, an FeCo alloy, an FeCr alloy, an FeCrSi alloy, an FeNiCo alloy, and Fe, and the like may be exemplified. The shape of the magnetic filler is not particularly limited; however, it may be formed into a spherical shape for a high filling level, and fillers having a plurality of different particle size distributions may be blended or combined for a densest filling structure. In order to maximize a shield effect by a permeability real component and a thermal conversion effect of a loss by a permeability imaginary component, it is more preferable to form the magnetic filler by making flat powder having an aspect ratio of 5 or more orientate.

(79) The surface of the magnetic filler is insulation-coated by an oxide of a metal such as Si, Al, Ti, or Mg, or an organic material for enhancing fluidity and adhesion. For the insulating coating, an oxide film may be formed by coating a thermosetting material on the surface of the magnetic filler or dehydration reaction of a metal alkoxide, and formation of a silicon oxide coating film is most preferable. It is more preferable to apply an organofunctional coupling treatment on the coating film thus formed.

(80) The composite magnetic material can be formed on the upper surface 41 of the composite molding member 40 using a known method such as a printing method, a molding method, a slit nozzle coating method, a spray method, a dispensing method, or a lamination method using an uncured sheet-like resin.

(81) When the thin film formed of a soft magnetic material or a ferrite is selected as the magnetic film 70, one or two or more metals selected from a group consisting of Fe, Ni, Zn, Mn, Co, Cr, Mg, Al, and Si and oxides thereof may be used. In this case, the magnetic film 70 can be formed on the upper surface 41 of the composite molding member 40 by using a plating method, a spray method, an AD method, and a thermal spraying method, as well as a thin-film formation method such as a sputtering method or a vapor-deposition method. In this case, the material for the magnetic film 70 may be appropriately selected based on a required permeability and frequency; however, in order to enhance a shield effect on a lower frequency side (kHz to 100 MHz), an alloy of FeCo, FeNi, FeAl, or FeSi is most preferably used. On the other hand, in order to enhance a shield effect on a higher frequency side (50 to several hundreds of MHz), a ferrite film formed of NiZn, MnZn, or NiCuZn, or Fe is most preferably used.

(82) When a foil or a bulk sheet is used as the magnetic film 70, it is possible to directly form the magnetic film 70 consisting of a foil or a bulk sheet on the upper surface 41 of the composite molding member 40 by previously setting the foil or bulk sheet in a mold for forming the composite molding member 40.

(83) As described above, in the electronic circuit package 18 according to the present embodiment, the magnetic film 70 having a higher permeability than that of the composite molding member 40 is formed on the upper surface 41 of the composite molding member 40, so that magnetic shielding characteristics can be further enhanced. Further, as exemplified by an electronic circuit package 18A shown in FIG. 16 according to a modification, the magnetic film 70 may be used to cover not only the upper surface 41 of the composite molding member 40, but also the side surface 42 of the composite molding member 40 and/or the side surface 27 of the substrate 20. With this configuration, it is possible to further enhance magnetic shielding characteristics in the side surface direction.

(84) <Ninth Embodiment>

(85) FIG. 17 is a cross-sectional view illustrating the configuration of an electronic circuit package 19 according to the ninth embodiment of the present invention.

(86) As illustrated in FIG. 17, the electronic circuit package 19 according to the present embodiment differs from the electronic circuit package 17 according to the seventh embodiment in that the magnetic film 70 is additionally formed so as to cover the upper surface 41 of the composite molding member 40 through the metal film 60. Other configurations are the same as those of the electronic circuit package 17 according to the seventh embodiment, so the same reference numerals are given to the same elements, and overlapping description will be omitted.

(87) In the electronic circuit package 19 according to the present embodiment, the surface of the composite molding member 40 serving as an electromagnetic shield and a magnetic shield is covered with the metal film 60 serving as an electromagnetic shield and the magnetic film 70 serving as a magnetic shield, so that it is possible to further enhance electromagnetic shielding characteristics and magnetic shielding characteristics.

(88) While the preferred embodiments of the present invention have been described, the present invention is not limited thereto. Thus, various modifications may be made without departing from the gist of the invention, and all of the modifications thereof are included in the scope of the present invention.

EXAMPLES

(89) First filler F1 having a median diameter (D50) of 10 m and second filler F2c having a median diameter (D50) of 0.7 m were prepared. The first filler F1 was formed of an Invar material with 64 wt. % of Fe and 36 wt. % of Ni, and an Ag having 50 nm thickness was plated on the surface thereof. The second filler F2c was formed of a heat resistant resin, and Ag having a thickness of 80 nm was plated on the surface thereof.

(90) Then, a biphenyl type epoxy resin, a phenol novolac type curing agent, and a catalyst (imidazole) were dissolved in butyl carbitol to prepare a binder. The above first filler F1 and second filler F2c were put into the binder, followed by stirring and kneading in a kneader, to obtain a pasty composite sealing material. The blending ratios of the first filler F1, second filler F2c, and binder in the composite sealing material were 50 vol. %, 25 vol. %, and 25 vol. %, respectively.

(91) Then, samples 1 to 3 having the same structure as that of the electronic circuit package 11 illustrated in FIG. 1 were actually produced. As the substrate 20, a multilayer resin substrate having a planar size of 8 mm8 mm and a thickness of 0.3 mm was used. As the composite molding member 40, the above composite sealing material was used to form the composite molding member 40 on the upper surface 21 of the substrate 20 by a vacuum printing method, followed by heating at 100 C. for four hours for removal of solvent and then post-curing at 180 C. for three hours.

(92) After the post-curing, the upper surface 41 of the composite molding member 40 was ground by a grinder for thickness adjustment. The thicknesses (t) of the composite molding member 40 at a portion above the highest electronic component were set to 100 m, 200 m, and 300 m in the samples 1, 2, and 3, respectively.

(93) As a comparative example, in place of the above composite molding member, a general molding material having neither magnetism nor conductivity was used for molding, and then a Cu film of a 6 m thickness was formed on the surface of the obtained molding member by a sputtering method, whereby a comparative sample was obtained. The Cu film was connected to a ground pattern.

(94) Then, the above samples were each reflow-mounted on a characteristic evaluation substrate, and a neighboring magnetic field measuring apparatus was used to measure a noise attenuation amount for evaluation of shielding characteristics. The results are illustrated in FIG. 18.

(95) As illustrated in FIG. 18, it is confirmed that the examples 1 to 3 exhibit a larger noise attenuation amount than the comparative sample in a frequency band of 20 MHz to 2.4 GHz. Particularly, in a frequency band of 20 MHz to 50 MHz, the examples 1 to 3 equally exhibit a larger noise attenuation amount than the comparative sample. Further, in a frequency band exceeding 50 MHz, the larger the thickness of the composite molding member 40 is, the larger the noise attenuation amount becomes, and the sample 3 exhibits a noise attenuation amount close to the measurement limit near 1 GHz.