Manufacturing method and electronic module with new routing possibilities
RE049970 ยท 2024-05-14
Assignee
Inventors
Cpc classification
H01L2224/92144
ELECTRICITY
H01L24/20
ELECTRICITY
H01L21/4821
ELECTRICITY
H01L23/5389
ELECTRICITY
H05K1/18
ELECTRICITY
H01L2224/83192
ELECTRICITY
H01L24/19
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L2224/20
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L2224/04105
ELECTRICITY
H01L23/552
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2224/8385
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L24/31
ELECTRICITY
International classification
H05K1/18
ELECTRICITY
H01L21/48
ELECTRICITY
H01L23/538
ELECTRICITY
Abstract
.[.Disclosed is an electronic module with high routing efficiency and other new possibilities in conductor design. The electronic module comprises a wiring layer (3), a component (1) having a surface with contact terminals (2) and first contact elements (6) that connect at least some of the contact terminals (2) to the wiring layer (3). The electronic module is provided with at least one conducting pattern (4) on the surface of the component (1) but spaced apart from the contact terminals (2). The electronic module further comprises a dielectric (5) and at least one second contact element (7) that connects the conducting pattern (4) to the wiring layer (3) through a portion of said dielectric (5). Methods of manufacturing such modules are also disclosed..]. .Iadd.An electronic module including a first wiring layer, a dielectric supporting the first wiring layer, wherein the first wiring layer is embedded in the dielectric, a component having a first surface and at least one contact terminal on the first surface, an additional passivation layer on the first surface of the component and in contact with the dielectric, a conducting pattern on the additional passivation layer on the first surface of the component and spaced apart from each of the at least one contact terminal, at least one first contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the at least one contact terminal, and at least one second contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the conducting pattern..Iaddend.
Claims
.[.1. An electronic module comprising: a first wiring layer, a dielectric supporting the first wiring layer, a component having a first surface and at least one contact terminal on the first surface, said at least one contact terminal having a contact bump protruding from the first surface of the component, an additional passivation layer on the first surface of the component and in contact with the dielectric, a conducting pattern on the additional passivation layer on the first surface of the component and spaced apart from each of the at least one contact terminal, wherein the contact bump and the conducting pattern are made of same material or materials and are similar in structure at least one first contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the at least one contact terminal, and at least one second contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the conducting pattern..].
.[.2. The electronic module of claim 1, wherein the at least one first contact element comprises a plurality of first contact elements, and the at least one contact terminal comprises a contact terminal for each of the first contact elements..].
.[.3. The electronic module of claim 1, wherein the at least one second contact element comprises at least two second contact elements for making at least two electrical connection between the first wiring layer and the conducting pattern at at least two contact locations..].
.[.4. The electronic module of claim 3, wherein the first wiring layer comprises at least two separate conducting lines electrically connected to each other by means of the at least two second contact elements and the conducting pattern..].
.[.5. The electronic module of claim 3, wherein the first wiring layer comprises at least two separate conducting lines and at least one of said conducting lines crosses the conducting pattern between said at least two contact locations..].
.[.6. The electronic module according to claim 1, wherein the additional passivation layer contains polymer or epoxy..].
.[.7. The electronic module according to claim 1, wherein the thickness of the additional passivation layer is between 3 and 10 micrometers..].
.[.8. The electronic module according to claim 1, wherein the dielectric comprises a layer of insulating adhesive between the component and the first wiring layer..].
.[.9. The electronic module according to claim 1, wherein the first wiring layer, the conducting pattern, the component, the first contact elements, and the second contact elements are embedded in the dielectric..].
.[.10. The electronic module according to claim 1, wherein the first wiring layer comprises at least one conducting line, the module comprises at least one electrically conducting path from the conducting pattern to the at least one contact terminal, and each electrically conducting path from the conducting pattern to the at least one contact terminal passes through the at least one second contact element, the at least one conducting line, and the at least one first contact elements..].
.[.11. The electronic module of claim 10, wherein the at least one second contact element comprises at least two second contact elements for making at least two electrical connections between the first wiring layer and the conducting pattern at at least two contact locations..].
.[.12. The electronic module of claim 11, wherein the first wiring layer comprises at least two separate conducting lines electrically connected to each other by means of the at least two second contact elements and the conducting pattern, wherein the first wiring layer comprises at least two separate conducting lines and at least one of said conducting lines crosses the conducting pattern between said at least two contact locations..].
.[.13. The electronic module according to claim 1, having a spacing between the first wiring layer and the first surface of the component, wherein the spacing is less than 100 micrometers..].
.[.14. The electronic module according to claim 1, wherein the conducting pattern is a planar structure intended to be connected to a ground potential for proving a shield against electromagnetic interference between the component and the first wiring layer..].
.[.15. The electronic module according to claim 1, comprising a plurality of conducting patterns on the additional passivation layer on the first surface of the component, wherein each conducting pattern is spaced apart from each contact terminal..].
.[.16. The method of claim 1, wherein the method comprises: growing conductive material to form first contact elements, and simultaneously growing conductive material to form the second contact elements..].
.[.17. An electronic module comprising: a first wiring layer, a dielectric supporting the first wiring layer, a component having a first surface and at least one contact terminal on the first surface, said at least one contact terminal having at least one contact bump protruding from the first surface of the component and having a thickness of less than 70 micrometers, an additional passivation layer on the first surface of the component and in contact with the dielectric, a conducting pattern on the additional passivation layer on the first surface of the component and spaced apart from each of the at least one contact terminal, wherein the conducting pattern has a thickness from a surface of the additional passivation layer of less than 70 micrometers, at least one first contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the at least one contact terminal, and at least one second contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the conducting pattern..].
.[.18. The electronic module according to claim 17, comprising a plurality of conducting patterns on the additional passivation layer on the first surface of the component, wherein each conducting pattern is spaced apart from each contact terminal..].
.[.19. An electronic module comprising: a first wiring layer, a dielectric supporting the first wiring layer, a component having a first surface and at least one contact terminal on the first surface, an additional passivation layer on the first surface of the component and in contact with the dielectric, a conducting pattern on the additional passivation layer on the first surface of the component and spaced apart from each of the at least one contact terminal, at least one first contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the at least one contact terminal, each of the at least one first contact element having a first height from the respective contact terminal to the respective portion of the first wiring layer, said first height being less than 70 micrometers, and each of the at least one first contact element having a maximum width in a direction parallel to the first surface of the component, said width being less than 100 micrometers, and at least one second contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the conducting pattern, each of the at least one second contact element has a second height from the respective conducting pattern to the respective portion of the first wiring layer, said second height being less than 70 micrometers..].
.[.20. The electronic module according to claim 19, comprising a plurality of conducting patterns on the additional passivation layer on the first surface of the component, wherein each conducting pattern is spaced apart from each contact terminal..].
.Iadd.21. An electronic module comprising: a dielectric; a first wiring layer embedded within the dielectric; a component having a first surface and at least one contact terminal on the first surface, said at least one contact terminal having a contact bump protruding from the first surface of the component; an additional passivation layer on the first surface of the component and in contact with the dielectric; a conducting pattern on the additional passivation layer on the first surface of the component and spaced apart from each of the at least one contact terminal, wherein the contact bump and the conducting pattern are made of same material or materials and are similar in structure; at least one first contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the at least one contact terminal; and at least one second contact element extending inside the dielectric for making at least one electrical connection between the first wiring layer and the conducting pattern..Iaddend.
.Iadd.22. The electronic module of claim 21, wherein the at least one first contact element comprises a plurality of first contact elements, and the at least one contact terminal comprises a contact terminal for each of the plurality of first contact elements..Iaddend.
.Iadd.23. The electronic module of claim 21, wherein the at least one second contact element comprises at least two second contact elements for making at least two electrical connections between the first wiring layer and the conducting pattern at at least two contact locations..Iaddend.
.Iadd.24. The electronic module of claim 23, wherein the first wiring layer comprises at least two separate conducting lines electrically connected to each other by means of the at least two second contact elements and the conducting pattern..Iaddend.
.Iadd.25. The electronic module of claim 23, wherein the first wiring layer comprises at least two separate conducting lines, and at least one of said two separate conducting lines crosses the conducting pattern between said at least two contact locations..Iaddend.
.Iadd.26. The electronic module of claim 21, wherein the additional passivation layer contains polymer or epoxy..Iaddend.
.Iadd.27. The electronic module of claim 21, wherein a thickness of the additional passivation layer is between 3 and 10 micrometers..Iaddend.
.Iadd.28. The electronic module of claim 21, wherein the dielectric comprises a layer of insulating adhesive between the component and the first wiring layer..Iaddend.
.Iadd.29. The electronic module of claim 21, wherein the conducting pattern, the component, the at least one first contact element, and the at least one second contact element are embedded in the dielectric..Iaddend.
.Iadd.30. The electronic module of claim 21, further comprising: at least one electrically conducting path from the conducting pattern to the at least one contact terminal, wherein the first wiring layer comprises at least one conducting line, and wherein the at least one electrically conducting path from the conducting pattern to the at least one contact terminal passes through the at least one second contact element, the at least one conducting line, and the at least one first contact element..Iaddend.
.Iadd.31. The electronic module of claim 30, wherein the at least one second contact element comprises at least two second contact elements for making at least two electrical connections between the first wiring layer and the conducting pattern at at least two contact locations..Iaddend.
.Iadd.32. The electronic module of claim 31, wherein the first wiring layer comprises at least two separate conducting lines electrically connected to each other by means of the at least two second contact elements and the conducting pattern, and wherein at least one of said two separate conducting lines crosses the conducting pattern between said at least two contact locations..Iaddend.
.Iadd.33. The electronic module of claim 21, wherein the conducting pattern is a planar structure configured to be connected to a ground potential to thereby act as a shield against electromagnetic interference between the component and the first wiring layer..Iaddend.
.Iadd.34. The electronic module of claim 21, further comprising a plurality of conducting patterns on the additional passivation layer on the first surface of the component, wherein each of the plurality of conducting patterns is spaced apart from each of the at least one contact terminal..Iaddend.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1) For a more complete understanding of the present invention and the advantages thereof, the invention is now described with the aid of the examples and with reference to the following drawings, in which:
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BEST MODE FOR CARRYING OUT THE INVENTION
(16)
(17) The electronic module of
(18) As can be seen in
(19)
(20) In the embodiments of
(21)
(22)
(23) In each of the first to fourth embodiments shown in
(24) As shown by
(25) The embodiments of
(26) As shown by
(27) The embodiment of
(28)
(29) In accordance with
(30) Then, the foil for the first wiring layer 3 is provided with first contact openings 16 located according to the positions designed for the first contact elements 6, and second contact openings 17 that are respectively located according to the positions designed for the second contact elements. Such holes can be manufactured with one of several chemical or mechanical manufacturing methods. Possible methods include, e.g. selective chemical etching, boring and laser drilling.
(31) One of the possible modifications is to use a layered foil material as the starting material. The selected foil material can include, for example, one layer of copper and an insulating layer on top of it. The starting material foil may also comprise a carrier foil on top of the foil for the first wiring layer 3. The carrier foil is totally optional but it may be provide certain benefits in the manufacturing process. Thus, the starting material can be a suitable foil with carrier, for instance. The carrier can be any suitable commercially available material, in any suitable thickness. The material of the carrier foil can be, for example, copper. The carrier foil is later released from the foil structure, facilitated by a release layer on the surface of the carrier foil facing the layer 3.
(32)
(33) Next, the component 1 is embedded in insulating material that forms part of the dielectric 5. This is done by laminating layer or layers of insulating material between the intermediate product of
(34) As can be seen in
(35) Then, a micro via metallization is performed. This can be done by copper deposition to the micro via, for instance.
(36) During the micro via metallization step, the contact holes are filled with one or more conducting materials, such as copper. The filled contact holes form the first contact elements 6 and the second contact elements 7 via respectively the first contact openings 16 and the second contact openings 17. From the metallurgical point of view, such first and second contact elements 6, 7 extend from the surface of the contact terminals 2 and the conducting patterns 4 respectively into the first and second contact openings 16, 17 in the first wiring layer 3. However, when referring to the height of the first and second contact elements 6, 7 in this document, the contact element may also be thought to end at the surface of the first wiring layer 3 facing the component 1. In this interpretation, the rest of the metal of the first and second contact elements 6, 7 is considered as part of the conducting lines 8 in the first wiring layer 3. This assumption is practical, but as stated already above, from the metallurgical point of view there is a hole in the conducting line 8 into which the material of the first or second contact element 6, 7 protrudes, when the process of
(37)
(38) The module of
(39) Also other methods can be used in manufacturing the electronic modules according to the embodiments. Examples of such other possible methods include modifications of the methods described in the U.S. patent application Ser. Nos. 10/550,023, 10/572,340, 11/659,190, 11/570,673, 11/667,429, 11/791,547, 11/587,586 and 11/917,711, which are incorporated herein by reference.
(40) The dimensions of the various elements of the electronic modules can be selected according to the requirements of the application for which the embodiments are designed. The drawings of this document have not been drawn is scale but have been drafted for the purpose of illustrating the mutual relations of the relevant features according to the embodiments. However, some non-binding guidelines for the relevant dimensions are discussed in the following with reference to
(41)
(42) As can be seen from the above exemplifying values, the spacing between the component 1 and the conducting lines 8 can be less than 30 micrometers, for instance.
(43) In an embodiment, the first contact elements 6 are narrower that the contact terminals 2 with which they make contact. In such an embodiment, the width of the first contact element 6 can be, for example, between 60% and 90% of the respective width of the respective contact terminal 2.
(44) The embodiments of the electronic module generally comprise a first wiring layer 3, a dielectric 5 supporting the first wiring layer 3 and a component 1 having a first surface and at least one contact terminal 2 on the first surface. There is an additional passivation layer 9 on the first surface of the component 1, which additional passivation layer 9 is in contact with the dielectric 5. There is also a conducting pattern 4 on the first surface side of the component 1, more particularly on the additional passivation layer 9. The conducting pattern 4 is not in direct contact with the at least one contact terminal 2 but is spaced apart from each of said contact terminals 2. Of course, the presence of one or more of such conducting patterns 4 does not exclude the possibility of the electronic module further comprising other conducting tracks on the first surface side of the component 1 that are in fact in direct contact with the contact terminals 2. The embodiments of the electronic module also comprise at least one first contact element 6 that extends inside the dielectric 5 and forms at least one electrical connection between the first wiring layer 3 and the at least one contact terminal 2. The embodiments of the electronic module further comprise at least one second contact element 7 that also extends inside the dielectric 5 and forms at least one electrical connection between the first wiring layer 3 and the conducting pattern 4.
(45) The embodiments of the electronic module that are designed for the purpose of enhancing wireability typically comprise the first wiring layer 3 and the component 1 having contact terminals 2 and the first surface extending between the contact terminals 2. The electronic module further comprises the conducting pattern 4 on the first surface side of the component 1 and spaced apart from the contact terminals 2. The electronic module is also provided with the first contact elements 6 connecting at least some of the contact terminals 2 to the first wiring layer (3), and the second contact elements 7 connecting the conducting pattern 4 to the first wiring layer 3 at at least two contact locations. In addition, the electronic module comprises the dielectric 5 between the first wiring layer 3 and the conducting pattern 4.
(46) In a further embodiment, the component comprises an additional passivation layer 9 on the first surface between the contact terminals 2. In such an embodiment, the conducting pattern 4 can be manufactured on the surface of the additional passivation layer 9.
(47) In a further embodiment, the first wiring layer 3 comprises at least two separate conducting lines 8 that are electrically connected to each other by means of the second contact elements 7 and the conducting pattern 4.
(48) In an even further embodiment, the first wiring layer 3 comprises at least two separate conducting lines 8 and at least one of said conducting lines 8 crosses the conducting pattern 4 between said at least two contact locations.
(49) In an even further embodiment, the module structure is an embedded structure such as the first wiring layer 3, the conducting pattern 4, the component 1, the first contact elements 6, and the second contact elements 7 are embedded in the dielectric 5.
(50) In a further embodiment having the conducting lines 8 in the first wiring layer 3, the module comprises at least one electrically conducting path from the conducting pattern 4 to the contact terminals 2 such that each of said paths passes through at least one of the second contact elements 7, at least one of the conducting lines 8, and at least of the first contact elements 6.
(51) In an embodiment, there is a spacing of less than 100 micrometers between the first wiring layer 3 and the first surface of the component 1. In a further embodiment, the spacing is in the range of 10 to 60 micrometers.
(52) In an embodiment, each of the first contact elements 6 has a first height of less than 70 micrometers from the respective contact terminal 2 to the respective portion of the first wiring layer 3. In a further embodiment, the first height is in the range of 10 to 30 micrometers.
(53) In an embodiment, each of the second contact elements 7 has a second height of less than 70 micrometers from the respective conducting pattern 4 to the respective portion of the first wiring layer 3. In a further embodiment, the second height is in the range of 10 to 30 micrometers.
(54) In a further embodiment, the first contact elements 6 and the second contact elements 7 are made of same materials and are similar in structure.
(55) In an embodiment, each of the first contact elements 6 has a maximum width of less than 100 micrometers in the direction parallel to the first surface of the component 1. In a further embodiment, the width is in the range of 15 to 50 micrometers.
(56) In an embodiment, the conducting pattern has a thickness of less than 70 micrometers from the first surface of the component 1. In a further embodiment, the thickness is in the range of 5 to 20 micrometers.
(57) In an embodiment, the contact terminals 2 are contact bumps protruding from the first surface of the component 1 and having thicknesses of less than 70 micrometers, for example 10 to 30 micrometers.
(58) In a further embodiment, the contact terminals 2 are contact bumps protruding from the first surface of the component 1, and the contact bumps and the conducting pattern 4 are made of same materials and are similar in structure.
(59) In an embodiment, the conducting pattern 4 is a planar structure intended to be connected to a ground potential for proving a shield against electromagnetic interference between the component 1 and the first wiring layer 3.
(60) In an embodiment, the electronic module comprises a plurality of conducting patterns 4 on the first surface side of the component 1, which conducting patterns 4 are spaced apart from the contact terminals 2.
(61) An embodiment of a method for manufacturing the above-described electronic modules comprises: providing a component 1 having a first surface and at least one contact terminal 2 on the first surface, providing an additional passivation layer 9 on the first surface of the component 1, providing a conducting pattern 4 on the additional passivation layer 9, which conducting pattern 4 is spaced apart from each of the at least one contact terminal 2, providing a first wiring layer 3, providing a dielectric 5 in contact with the additional passivation layer 9, which dielectric 5 supports the first wiring layer 3, providing at least one first contact element 6 extending inside the dielectric 5 for making at least one electrical connection between the first wiring layer 3 and the at least one contact terminal 2, and providing at least one second contact element 7 extending inside the dielectric 5 for making at least one electrical connection between the first wiring layer 3 and the conducting pattern 4.
(62) Another embodiment of a method for manufacturing the above-described electronic modules comprises: providing the first wiring layer 3, providing the component 1 having the contact terminals 2 and the first surface extending between the contact terminals 2, providing an additional passivation layer 9 on the first surface of the component 1, providing the conducting pattern 4 on the additional passivation layer 9 and spaced apart from the contact terminals 2, providing the dielectric 5 that extends between the first wiring layer 3 and the conducting pattern 4, providing the first contact elements 6 connecting at least some of the contact terminals 2 to the first wiring layer 3, and providing the second contact elements 7 connecting the conducting pattern 4 to the first wiring layer 3 at the at least two contact locations.
(63) Another embodiment of the method comprises growing conductive material on the contact terminals 2 of the component 1 to form part of the contact terminals 2, and simultaneously growing conductive material on the additional passivation layer 9 to form the conducting pattern 4. Such growing may be affected by a suitable deposition method, such as chemical and/or electrochemical plating.
(64) A further embodiment of the method comprises growing conductive material to form first contact elements 6, and simultaneously growing conductive material to form the second contact elements 7. Also in this embodiment, the growing may be affected by a suitable deposition method, such as chemical and/or electrochemical plating. Other possible deposition methods include vaporization and sputtering, for instance. Alternatively, the conductive material may be conductive paste, conductive polymer, conductive adhesive or solder, for instance.
(65) The component 1 described in the above embodiments can be any suitable component. Component can be, for example, a semiconductor chip, such as a microcircuit. The component 1 can also be a LED, resistor, capacitor, inductor etc. if desired. All the components of suitable size and having suitably located contact terminals 2, or other corresponding terminals, can be used in the described electronic modules.
(66) In case of a microcircuit, the chip comprises pre-processed microelectronic devices on its active surface and typically a additional passivation layer 9 over the microelectronic devices that protect the active surface of the chip. The micro-circuits can be so called bare chips, i.e. chips that have not been subject to packaging process but are substantially in the form they left the semiconductor manufacturing process and the succeeding dicing. The chips may have pre-processed contact bumps as their contact terminals 2, or be bumpless chips without such contact bumps. The contact bumps are suitably manufactured at the same time and in the same process with the manufacture of the conducting patterns 4. In case the contact lands of the component are made of aluminium (Al) and the material of the first contact terminals 6 is mainly copper, it would be beneficial to provide the contact terminals 2 with an interlayer for matching the properties of aluminium and copper. Such an interlayer may contain at least one of: chrome (Cr), titanium-wolfram (TiW), nickel (Ni) and gold (Au).
(67) The first and second contact elements 6 and 7 can be made of metal, for instance. The first and second contact elements 6 and 7 can be, for example, solid metal structures produced by chemical vapour deposition and/or electrolytic plating. The contact elements can contain two or more metals as layers, for instance. It is also possible that the contact elements are made of one metal only. Such one metal may be copper (Cu), for instance.
(68) The electronic modules in the above embodiments comprise the dielectric 5 that supports the conducting lines 8. The dielectric 5 also fills the gap between the component 1 and the conducting lines 8. The dielectric 5 serves as an electrical insulator and also as a mechanical structural element binding and attaching the component 1, conducting lines 8 and the other structural parts together to form a single structural entity. The dielectric 5 can comprise one layer or several layers of dielectric material that are bonded together by lamination during the manufacturing process. In addition to the layer-form dielectric materials, the dielectric can also contain portions made of insulating adhesives, for instance. For example, the portion of the dielectric 5 between the component 1 and the conducting lines 8 can be conveniently made of electrically insulating adhesive 18, for instance. In general, the layers may contain mutually same dielectric material or materials, or may be of different dielectric materials. At least one of the layers may be, for example, an epoxy layer reinforced with glass fibres, such as a layer manufactured from FR4 sheet. Also other layers and materials can be used as is known in the circuit board manufacturing industry.
(69) In the embodiments of
(70) The above embodiments can be modified also so that two redistribution layers are manufactured on the component, whereby wiring capability is further increased at least in some applications.
(71) The component 1 of
(72) The component 1 of
(73) The electronic module of
(74) As can be seen in
(75)
(76)
(77) The above description is only to exemplify the invention and is not intended to limit the scope of protection offered by the claims. The claims are also intended to cover the equivalents thereof and not to be construed literally.