Electronic device comprising an electronic chip mounted on top of a support substrate
11488884 ยท 2022-11-01
Assignee
Inventors
Cpc classification
H01L23/36
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L23/5226
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/83192
ELECTRICITY
H01L2924/00012
ELECTRICITY
International classification
H01L23/522
ELECTRICITY
Abstract
A support substrate has a mounting face with a metal heat transfer layer. Holes are provided to extend at least partially through the metal heat transfer layer. Metal heat transfer elements are disposed in the holes of the metal heat transfer layer of the support substrate. An electronic integrated circuit (IC) chip has a rear face that is fixed to the mounting face of the support substrate via a layer of adhesive material. The metal heat transfer elements disposed in the holes of the metal layer of the support substrate extend to protrude, relative to the mounting face of the support substrate, into the layer of adhesive material.
Claims
1. An electronic device, comprising: a support substrate having a mounting face; an integrated circuit (IC) chip having a rear face fixed to the mounting face of the support substrate by a layer of adhesive material; wherein the support substrate includes a metal heat transfer layer at said mounting face, said metal heat transfer layer including a plurality of holes; and a plurality of metal heat transfer elements disposed in the plurality of holes of the metal heat transfer layer, said plurality of metal heat transfer elements extending to protrude, relative to the mounting face of the support substrate, into the layer of adhesive material; wherein surfaces of the plurality of metal heat transfer elements are spaced by a distance from the rear face of the IC chip.
2. The electronic device according to claim 1, wherein the support substrate includes an integrated network of electrical connections and the IC chip is not electrically connected to the integrated network of electrical connections via the metal heat transfer layer and the plurality of metal heat transfer elements.
3. The electronic device according to claim 1, wherein portions of the layer of adhesive material fills said distance between the metal heat transfer elements and the rear face of the IC chip.
4. The electronic device according to claim 1, wherein the support substrate includes an integrated network of electrical connections having front electrical connection blocks at the mounting face of the support substrate.
5. The electronic device according to claim 4, wherein the metal heat transfer layer and the front electrical connection blocks are at a same metal level of the support substrate.
6. The electronic device according to claim 4, further comprising electrical connection means linking the IC chip and the front electrical connection blocks.
7. The electronic device according to claim 6, wherein the electrical connection means comprise metal wires linking the front electrical connection blocks to front blocks of a front face of the IC chip.
8. The electronic device according to claim 6, further comprising an encapsulation block on top of the mounting face of the support substrate and within which the IC chip and the electrical connection means are embedded.
9. The electronic device according to claim 4, wherein top surfaces of the front electrical connection blocks and the metal heat transfer layer are coplanar with the mounting face of the support substrate.
10. The electronic device according to claim 1, wherein the plurality of holes extend completely through the metal heat transfer layer.
11. The electronic device according to claim 1, wherein the adhesive material is glue.
12. The electronic device according to claim 1, wherein each metal heat transfer element includes a first portion disposed in one of the plurality of holes and a second portion which extends out of said one of the plurality of holes to protrude above the mounting face of the metal heat transfer layer and into the layer of adhesive material.
13. An electronic device, comprising: a support substrate having a front face with electrical connection pads; a metal heat transfer layer in the support substrate, wherein the metal heat transfer layer has a mounting face coplanar with the front face and further includes a plurality of holes which extend through the metal heat transfer layer from the mounting face to a rear face of the metal heat transfer layer; and a plurality of metal heat transfer elements mounted within the plurality of holes of the metal heat transfer layer, each metal heat transfer element including a first portion disposed in the hole and a second portion which extends out of the hole to protrude above the mounting face of the metal heat transfer layer.
14. The electronic device according to claim 13, further comprising an integrated circuit (IC) chip having a rear face attached to the mounting face of the support substrate by a layer of adhesive material, wherein the second portion of each metal heat transfer element protrudes into the layer of adhesive material.
15. The electronic device according to claim 14, wherein an outer surface of each metal heat transfer element is spaced by a distance from the rear face of the IC chip, and wherein the adhesive material fills said distance.
16. The electronic device according to claim 14, further comprising bonding wires electrically connecting the IC chip to the electrical connection pads at the front face of the support substrate.
17. The electronic device according to claim 14, further comprising an encapsulation block on top of the mounting face of the support substrate, wherein the encapsulation block encapsulates the IC chip.
18. The electronic device according to claim 13, wherein the second portion has an outer surface having a domed shape.
19. An electronic device, comprising: a support substrate having a mounting face, wherein the support substrate includes an integrated network of electrical connections having front electrical connection blocks at the mounting face of the support substrate; an integrated circuit (IC) chip having a rear face fixed to the mounting face of the support substrate by a layer of adhesive material; wherein the support substrate includes a metal heat transfer layer at said mounting face, wherein the metal heat transfer layer and the front electrical connection blocks are at a same metal level of the support substrate, said metal heat transfer layer including a plurality of holes; and a plurality of metal heat transfer elements disposed in the plurality of holes of the metal heat transfer layer, said plurality of metal heat transfer elements extending to protrude, relative to the mounting face of the support substrate, into the layer of adhesive material.
20. The electronic device according to claim 19, wherein the support substrate includes an integrated network of electrical connections and the IC chip is not electrically connected to the integrated network of electrical connections via the metal heat transfer layer and the plurality of metal heat transfer elements.
21. The electronic device according to claim 19, further comprising electrical connection means linking the IC chip and the front electrical connection blocks.
22. The electronic device according to claim 21, wherein the electrical connection means comprise metal wires linking the front electrical connection blocks to front blocks of a front face of the IC chip.
23. The electronic device according to claim 21, further comprising an encapsulation block on top of the mounting face of the support substrate and within which the IC chip and the electrical connection means are embedded.
24. The electronic device according to claim 19, wherein top surfaces of the front electrical connection blocks and the metal heat transfer layer are coplanar with the mounting face of the support substrate.
25. The electronic device according to claim 19, wherein the plurality of holes extend completely through the metal heat transfer layer.
26. The electronic device according to claim 19, wherein the adhesive material is glue.
27. An electronic device, comprising: a support substrate having a mounting face, wherein the support substrate includes an integrated network of electrical connections having front electrical connection blocks at the mounting face of the support substrate; an integrated circuit (IC) chip having a rear face fixed to the mounting face of the support substrate by a layer of adhesive material; wherein the support substrate includes a metal heat transfer layer at said mounting face, said metal heat transfer layer including a plurality of holes, wherein top surfaces of the front electrical connection blocks and the metal heat transfer layer are coplanar with the mounting face of the support substrate; and a plurality of metal heat transfer elements disposed in the plurality of holes of the metal heat transfer layer, said plurality of metal heat transfer elements extending to protrude, relative to the mounting face of the support substrate, into the layer of adhesive material.
28. The electronic device according to claim 27, wherein the support substrate includes an integrated network of electrical connections and the IC chip is not electrically connected to the integrated network of electrical connections via the metal heat transfer layer and the plurality of metal heat transfer elements.
29. The electronic device according to claim 27, further comprising electrical connection means linking the IC chip and the front electrical connection blocks.
30. The electronic device according to claim 29, wherein the electrical connection means comprise metal wires linking the front electrical connection blocks to front blocks of a front face of the IC chip.
31. The electronic device according to claim 29, further comprising an encapsulation block on top of the mounting face of the support substrate and within which the IC chip and the electrical connection means are embedded.
32. The electronic device according to claim 27, wherein the plurality of holes extend completely through the metal heat transfer layer.
33. The electronic device according to claim 27, wherein the adhesive material is glue.
34. An electronic device, comprising: a support substrate having a mounting face; an integrated circuit (IC) chip having a rear face fixed to the mounting face of the support substrate by a layer of adhesive material; wherein the support substrate includes a metal heat transfer layer at said mounting face, said metal heat transfer layer including a plurality of holes, wherein the plurality of holes extend completely through the metal heat transfer layer; and a plurality of metal heat transfer elements disposed in the plurality of holes of the metal heat transfer layer, said plurality of metal heat transfer elements extending to protrude, relative to the mounting face of the support substrate, into the layer of adhesive material.
35. The electronic device according to claim 34, wherein the support substrate includes an integrated network of electrical connections and the IC chip is not electrically connected to the integrated network of electrical connections via the metal heat transfer layer and the plurality of metal heat transfer elements.
36. The electronic device according to claim 34, wherein the support substrate includes an integrated network of electrical connections having front electrical connection blocks at the mounting face of the support substrate.
37. The electronic device according to claim 34, further comprising electrical connection means linking the IC chip and the front electrical connection blocks.
38. The electronic device according to claim 37, wherein the electrical connection means comprise metal wires linking the front electrical connection blocks to front blocks of a front face of the IC chip.
39. The electronic device according to claim 37, further comprising an encapsulation block on top of the mounting face of the support substrate and within which the IC chip and the electrical connection means are embedded.
40. The electronic device according to claim 34, wherein the adhesive material is glue.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) An electronic device will now be described by way of non-limiting exemplary embodiment, illustrated by the drawing in which:
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DETAILED DESCRIPTION
(9) An electronic device 1 illustrated in
(10) The support substrate 2 is provided with a metal heat transfer layer 8 which is attached to the support substrate 2 on the side of its mounting face 3, and which extends opposite at least a part of the rear face 6 of the IC chip 5 and which possibly extends beyond at least a part of the peripheral edge of the IC chip 5. Advantageously, the metal heat transfer layer extends opposite the entire rear face 6 of the IC chip 5 and beyond the entire periphery of the IC chip 5.
(11) The metal layer 8 at the mounting face of the support substrate 2 has a plurality of holes 9 which are opposite and open on the side of the rear face 6 of the IC chip 5. The holes 9 can be produced to extend only partially though the thickness of the metal layer 8 or extend completely (entirely) through the thickness of the metal layer 8.
(12) The electronic device 1 comprises a plurality of metal heat transfer elements 10, in the approximate form of balls, which are fitted into the holes 9 of the metal layer 8 and which include a portion that protrudes relative to the facing face 3 of the support substrate 2 so that the protruding parts of the heat transfer elements extend above the upper surface of the metal layer and are embedded in the layer of adhesive material 7.
(13) The heat transfer elements 10 include a portion which at least partially fills the holes 9 and are linked (attached) to the metal layer 8 by brazing. Advantageously, the top surfaces of the heat transfer elements 10, which in an embodiment present an outer domed surface shape, are spaced at a distance from the rear face 6 of the IC chip 5.
(14) The support substrate 2 and the IC chip 5 are free of electrical connections via the metal heat transfer layer 8 and the metal heat transfer elements 10. The heat transfer elements 10 therefore have no electrical connection function between the IC chip 5 and the support substrate 2.
(15) A portion of the heat produced by the IC chip 5 is transferred to the support substrate 2 via the layer of adhesive material 7. By virtue of the existence of the metal heat transfer layer 8 and of the metal heat transfer elements 10, the flow of heat between the IC chip 5 and the support substrate 2 is considerably increased.
(16) The holes 9 and consequently the metal heat transfer elements 10 can be evenly distributed or, possibly, be more dense in the zone or zones of the IC chip 5 that produce the most heat.
(17) The support substrate 2 is provided with an integrated network of electrical connections 11 which is linked to the IC chip 5 by electrical connection means 12 (provided, for example, in the form of bonding wires).
(18) The metal heat transfer layer 8 and the metal heat transfer elements 10 on the one hand and the integrated network of electrical connections 11 and the electrical connection means 12 on the other hand are distinct.
(19) According to a variant embodiment, the integrated network of electrical connections 11 comprises front electrical connection blocks 13 on the side of the facing face 3 of the support substrate 2. The front blocks are formed beyond and at a distance from the peripheral edge of the IC chip 5 and at a distance from the metal heat transfer layer 8.
(20) The electrical connection means 12 comprise electrical wires 14 which link the front electrical connection blocks 13 and front electrical connection blocks 15 of the front face 16 of the IC chip 5.
(21) The integrated network of electrical connections 11 comprises rear electrical connection blocks 17 on the side of the rear face 4 of the support substrate 2, in order to connect the IC chip 5 to the outside.
(22) Advantageously, the metal heat transfer layer 8 and the front electrical connection blocks 13 are formed in one and the same metal level of the support substrate 2. In this configuration, top surfaces of the metal heat transfer layer 8 and front electrical connection blocks 13 may be coplanar with surface 3 of the substrate 2. The metal heat transfer elements 10 extend above this coplanar surface.
(23) The result of the above is that, in light of the mounting of the IC chip 5 on the support substrate 2 and of the electrical connection means 12 between the IC chip 5 and the support substrate 2, the metal layer 8 and the elements 10 constitute additional, exclusively heat-transfer oriented means.
(24) The electronic device 1 further comprises an encapsulation block 18 on top of the facing face 3 of the support substrate, in which the chip 5 and the electrical wires 14 are embedded.
(25) The electronic device 1 can be fabricated as follows.
(26) As illustrated in
(27) In a fabrication step illustrated in
(28) In a subsequent fabrication step illustrated in
(29) In a subsequent fabrication step illustrated in
(30) In a subsequent fabrication step illustrated in
(31) In a subsequent fabrication step illustrated in
(32) Finally, the encapsulation block 18 is formed.
(33) The electronic device 1 is then obtained.