UV mask and fabrication method thereof
09638845 ยท 2017-05-02
Assignee
- Boe Technology Group Co., Ltd. (Beijing, CN)
- Beijing Boe Optoelectronics Technology Co., Ltd. (Beijing, CN)
Inventors
Cpc classification
G02B1/10
PHYSICS
G02B5/208
PHYSICS
G03F1/58
PHYSICS
G02F1/133388
PHYSICS
International classification
G03F1/58
PHYSICS
H01L29/786
ELECTRICITY
G02B1/10
PHYSICS
G02F1/1335
PHYSICS
Abstract
A UV mask and a fabrication method thereof. The UV mask fabrication method includes: forming a UV shielding layer on a coverage area of a base substrate by using a color filter layer mask plate and a black matrix mask plate; or forming a UV shielding layer on the base substrate by using the color filter layer mask plate. In this way, the cost spent in manufacturing a display device by using a special mask plate (mask) to fabricate the UV mask is reduced.
Claims
1. A manufacturing method of a UV mask, the UV mask used for UV curing a sealant in a display panel, and the method comprises: forming a UV light-shielding layer on a covering region of a base substrate by using a color filter layer mask and a black matrix mask; or, forming a UV light-shielding layer on the base substrate by the color filter layer mask; wherein the base substrate on which the UV light-shielding layer is formed is hanged over the display panel; wherein the covering region of the base substrate is configured to include a display region corresponding to an effective display region in the display panel and an edge region surrounding the display region; a boundary line of the edge region that is close to the display region coincides with a boundary line of the display region, and under a case in that the display region is positioned to align with the effective display region of the display panel, the edge region is positioned between the effective display region of the display panel and the sealant; wherein the forming the UV light-shielding layer on the base substrate by a color filter layer mask comprises: forming a pattern of a first UV light-shielding layer, wherein a pattern of a first region, a pattern of a second region and a pattern of a third region are formed on the covering region of the base substrate by at least one of a red color filter layer mask, a green color filter layer mask and a blue color filter layer mask; forming a pattern of a second UV light-shielding layer, wherein the second UV light-shielding layer is formed in gaps between the pattern of the first region, the pattern of the second region and the pattern of the third region on the base substrate by the red color filter layer mask or the green color filter layer mask or the blue color filter layer mask.
2. The manufacturing method of a UV mask according to claim 1, further comprises: dividing the covering region of the base substrate into a plurality of sub-regions arranged along a gate line direction of the display panel, and dividing each of the sub-regions into a first region, a second region and a third region arranged in order along the gate line direction.
3. The manufacturing method of a UV mask according to claim 1, wherein the forming a pattern of a second UV light-shielding layer in gaps between the pattern of the first region, the pattern of the second region and the pattern of the third region on the base substrate by the red color filter layer mask or the green color filter layer mask or the blue color filter layer mask comprises: by taking a position during forming the pattern of the first UV light-shielding layer as a reference position, after moving the red color filter layer mask or the green color filter layer mask or the blue color filter layer mask along the gate line direction of the display panel by a predetermined distance, the pattern of the second UV light-shielding layer is formed in the gaps between the pattern of the first region, the pattern of the second region and the pattern of the third region.
4. The manufacturing method of a UV mask according to claim 3, wherein the predetermined distance is a half of a pitch between the pattern of the first region, the pattern of the second region and the pattern of the third region along the gate line direction.
5. The manufacturing method of a UV mask according to claim 1, wherein the pattern of the first region, the pattern of the second region and the pattern of the third region have equal or unequal distances along the gate line direction.
6. The manufacturing method of a UV mask according to claim 1, wherein the UV light-shielding layer is made of opaque resin or opaque metal material.
7. The manufacturing method of a UV mask according to claim 1, wherein an overcoat layer is formed on an entire surface of the base substrate to cover and protect the UV light-shielding layer.
8. A manufacturing method of a UV mask, the UV mask used for UV curing a sealant in a display panel, and the method comprises: forming a UV light-shielding layer on a covering region of a base substrate by using a color filter layer mask and a black matrix mask; or, forming a UV light-shielding layer on the base substrate by the color filter layer mask; wherein the base substrate on which the UV light-shielding layer is formed is hanged over the display panel; wherein the covering region of the base substrate is configured to include a display region corresponding to an effective display region in the display panel and an edge region surrounding the display region; a boundary line of the edge region that is close to the display region coincides with a boundary line of the display region, and under a case in that the display region is positioned to align with the effective display region of the display panel, the edge region is positioned between the effective display region of the display panel and the sealant; wherein the forming the UV light-shielding layer on the base substrate by a color filter layer mask comprises: forming a pattern of a first UV light-shielding layer on the base substrate by using at least one of a red color filter layer mask, a green color filter layer mask and a blue color filter layer mask, the pattern of the first UV light-shielding layer including a pattern of a first region, a pattern of a second region and a pattern of a third region, wherein during forming the pattern of the first UV light-shielding layer, parameters of an exposure process are adjusted such that the pattern of the first region, the pattern of the second region and the pattern of the third region are joined seamlessly.
9. The manufacturing method of a UV mask according to claim 8, wherein the pattern of the first region, the pattern of the second region and the pattern of the third region have equal or unequal distances along the gate line direction.
10. The manufacturing method of a UV mask according to claim 8, wherein the UV light-shielding layer is made of opaque resin or opaque metal material.
11. The manufacturing method of a UV mask according to claim 8, wherein an overcoat layer is formed on an entire surface of the base substrate to cover and protect the UV light-shielding layer.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) In order to clearly illustrate the technical solution of the embodiments of the invention, the drawings of the embodiments will be briefly described in the following; it is obvious that the described drawings are only related to some embodiments of the invention and thus are not limitative of the invention.
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DETAILED DESCRIPTION
(16) In order to make objects, technical details and advantages of the embodiments of the invention apparent, the technical solutions of the embodiment will be described in a clearly and fully understandable way in connection with the drawings related to the embodiments of the invention. It is obvious that the described embodiments are just a part but not all of the embodiments of the invention. Based on the described embodiments herein, those skilled in the art can obtain other embodiment(s), without any inventive work, which should be within the scope of the invention.
(17) During a curing process of a sealant, as shown in
(18) In general, in a structure shown in
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(20) In order to solve the high manufacturing cost problem of the display device caused by a special mask used for manufacturing a UV mask in prior art, embodiments of the present invention utilizes a existing mask used for the mass production in prior art to manufacture the UV mask. In embodiment of the present invention, a UV light-shielding layer is formed on a base substrate by using a color filter layer mask and a black matrix mask. Alternatively, the UV light-shielding layer is formed on the base substrate by the color filter layer mask. A covering region of the base substrate is designed to comprise a display region corresponding to the effective display region (the A/A region) in a display panel and an edge region M surrounding the display region. A boundary line of the edge region M that is close to the display region coincides with a boundary line of the display region and when the display region is positioned to align with the effective display region in the display panel, the edge region is positioned between the effective display region of the display panel and the sealant.
(21) According to embodiments of the present invention, manufacturing way of the UV mask may vary according to different practical application circumstances. Specifically, there are the following two application circumstances.
(22) In a first application circumstance, a CF structure shown in
(23) In a second application circumstance, a CF structure shown in
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(25) Firstly, a covering region of a surface of the base substrate to be used to manufacture the UV mask is divided into a display region corresponding to the A/A region of the display panel and an edge region M surrounding the display region. Furthermore, the display region is divided into a black matrix region and a pixel region that is further divided into a red (R) pixel region, a green (G) pixel region and a blue (B) pixel region.
(26) Then, a UV light-shielding layer is formed on the covering region, comprising:
(27) 1. Forming a Pattern of a First UV Light-Shielding Layer.
(28) The pattern of the first UV light-shielding layer is formed on the base substrate which includes a pattern corresponding to the black matrix in the effective display region and a pattern of the edge region M.
(29) In this step, the pattern corresponding to the black matrix in the A/A region and the pattern of the edge region M are formed with a existing black matrix mask (a BM mask). For example, during fabrication, a black light-shielding resin material may be used, or an opaque metal material may be used to form it.
(30) 2. Forming a Pattern of a Second UV Light-Shielding Layer.
(31) The forming the second UV light-shielding layer includes forming a pattern corresponding to the pixel region in the A/A region on the base substrate, specifically, forming patterns corresponding to a red color filter layer (the R pixel region), a green color filter layer (the G pixel region) and a blue color filter layer (the B pixel region) on the base substrate by a red color filter layer mask, a green color filter layer mask and a blue color filter layer mask. In an embodiment of the present invention, a exiting red color filter layer mask is used to form the pattern of the R pixel region, a existing green color filter layer mask is used to form the pattern of the G pixel region, and a existing blue color filter layer mask is used to form the pattern of the B pixel region.
(32) The forming the UV mask is completed by the above-mentioned process.
(33) For example, an overcoat layer 12 may be further formed on a surface of the completed UV mask to protect the UV mask.
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(35) Firstly, a covering region of a surface of a base substrate for fabricating the UV mask is divided into a plurality of sub-regions arranged in order along a gate line direction of the display panel. For example, each of the sub-regions includes a first region, a second region and a third region arranged in order along the gate line direction. The first region, second region and third region all include an edge region M.
(36) Then, a UV light-shielding layer is formed on the base substrate by a color filter layer mask. For example, the forming the UV light-shielding layer may include:
(37) 1. A Pattern of a First UV Light-Shielding Layer is Formed.
(38) The pattern of the first UV light-shielding layer is formed on the base substrate and a pattern including the first region, the second region and the third region is formed by a patterning process. In an embodiment of the present invention, it may includes in order forming a pattern of the first region with a existing red mask, forming a pattern of the second region with a existing green mask, and forming a pattern of the third region with a existing blue mask.
(39) The above-mentioned patterns of the first region, the second region and the third region may be a red pixel region, a green pixel region and a blue pixel region in order. Of course, an order may be changed and is not limited herein.
(40) In addition, the patterns of the first region, the second region and the third region may be formed by using one of the red mask, the green mask and the blue mask. Generally, on the array substrate, the RGB pixels are of the same size. Therefore, the patterns of the first region, the second region and the third region may be formed by moving the one of the red mask, the green mask and the blue mask by a certain distance.
(41) 2. A Pattern of a Second UV Light-Shielding Layer is Formed.
(42) The pattern of the second UV light-shielding layer is formed in gaps between the pattern of the first region, the pattern of the second region and the pattern of the third region on the base substrate.
(43) In the process of fabricating the first UV light-shielding layer, due to parameter setting of an exposure process, relatively large gaps may exist between any two of the pattern of the first region, the pattern of the second region and the pattern of the third region. At the same time, generally, when fabricating the R, G and B masks of the color filter substrate in an original predetermined order, certain gaps may exist between pixel regions for forming the pattern of the BM. Therefore, the pattern of the second UV light-shielding layer needs to be formed in regions corresponding to the above-mentioned gaps. The first region, the second region and the third region herein include a part positioned in the edge region M. For example, by taking a position during forming the pattern of the first UV light-shielding layer as a reference position, after moving the red mask or the blue mask or the green mask along the gate line direction of the display panel by a predetermined distance D, the pattern of the second UV light-shielding layer is formed in the gaps between any two of the pattern of the first region, the pattern of the second region and the pattern of the third region.
(44) For example, in order to ensure that the pattern of the second UV light-shielding layer can completely cover the above-mentioned gaps, the distance D may be a half of a pitch between the pattern of the first region, the pattern of the second region or the pattern of the third region along the gate line direction.
(45) It is to be noted that as shown in
(46) The fabrication of the UV mask is completed by the above-mentioned process.
(47) For example, an overcoat layer 12 may be further formed on a surface of the completed UV mask to protect the UV mask.
(48) The manufacturing method for the UV mask shown in
(49) Firstly, a covering region of a surface of a base substrate for fabricating the UV mask is divided into a plurality of sub-regions arranged in order along a gate line direction. For example, each of the sub-regions includes a first region, a second region and a third region arranged in order along the gate line direction of the display panel. The first region may be a red pixel region, the second region may be a green pixel region and the third region may be a blue pixel region. An edge region M may also be included in the first region, the second region and the third region and it is possible to control size of the edge region M by moving the R, g and B mask by a certain distance.
(50) Then, a UV light-shielding layer is formed on the base substrate. For example, patterns including the first region, the second region and the third region may be formed in turn by a patterning process. In this process, by adjusting parameters of an exposure process, the pattern of the first region, the pattern of the second region and the pattern of the third region may be joined seamlessly. In this variation, an exiting red mask may be used to form the pattern of the first region, a existing green mask may be used to form the pattern of the second region, and a existing blue mask may be used to form the pattern of the third region.
(51) Of course, one of the red, green and blue masks may be used. In this case, by adjusting parameters of the exposure process, the pattern of the first region, the pattern of the second region and the pattern of the third region may be joined seamlessly, thus the fabrication of the UV mask is accomplished with one process.
(52) The above-mentioned method is also applicable to the fabrication of high resolution panels. For a high resolution product, a pixel size is relatively small in a certain area, which can be realized by adjusting parameters of the exposure process, such as by lowering exposure amount.
(53) The embodiment of the invention being thus described, it will be obvious that the same may be varied in many ways. Such variations are not to be regarded as a departure from the spirit and scope of the invention, and all such modifications as would be obvious to those skilled in the art are intended to be included within the scope of the following claims.
(54) The application claims priority to the Chinese patent application No. 201310097951.0 filed on Mar. 25, 2013, which is incorporated herein by reference in its entirety.