According to an aspect, a light source device includes: a light emitting device that emits a light beam capable of being modulated; and a scanning device that deflects the light beam in a first direction and a second direction intersecting the first direction. The light beam has a light quantity varying region in which a light quantity decreases outward from a center of the light beam in at least one of the first direction or the second direction. The scanning device overlaps the light quantity varying regions of a plurality of the light beams with each other with respect to a scanning direction along directions in which the light quantities of the light beams decrease.

An apparatus for irradiating semiconductor material is disclosed having, a laser generating a primary laser beam, an optical system and a means for shaping the primary laser beam, comprising a plurality of apertures for shaping the primary laser beam into a plurality of secondary laser beams. Wherein the shape and/or size of the individual apertures corresponds to that of a common region of a semiconductor material layer to be irradiated. The optical system is adapted for superposing the secondary laser beams to irradiate said common region. Further, the use of such an apparatus in semiconductor device manufacturing is disclosed.

Hybrid imaging systems incorporating conventional optical elements and metasurface elements with light sources and/or detectors, and methods of the manufacture and operation of such optical arrangements are provided. Systems and methods describe the integration of apertures with metasurface elements and refractive optics with metasurface elements in illumination sources and sensors.

A beam homogenizer for homogenizing a beam of radiation and an illumination system and metrology apparatus comprising such a beam homogenizer as provided. The beam homogenizer comprises a filter system having a controllable radial absorption profile and configured to output a filtered beam and an optical mixing element configured to homogenize the filtered beam. The filter system may be configured to homogenize the angular beam profile radially and said optical mixing element may be configured to homogenize the angular beam profile azimuthally.

A spatial frequency filter device is for use with a laser beam. The device includes: a neutral region, which is configured to transmit or reflect the laser beam; and a deflecting region, which radially adjoins the neutral region and is configured to deflect beam components of the laser beam from a beam axis of the laser beam. The deflecting region has a constant portion, in which a deflecting effect on the beam components of the laser beam for each location in the constant portion is configured to be independent of a distance of a location from the neutral region. the deflecting region has a variation portion, in which the deflecting effect on the beam components of the laser beam is configured to vary, dependent on a distance from the neutral region.

Aspects of the present disclosure involve a system and method for suppressing a Poisson spot. A Poisson spot is a bright spot in the geometrical shadow of circular/spherical shapes. A broad class of telescopes that involve simultaneous transmit and receive require suppression of the reflected light from the secondary mirror on the detector. In one embodiment, coronagraphy petal-shaped masks are fabricated using photolithography and wire-EDM for the suppression of the Poisson spot. The petal-shaped masks can be designed and fabricated to operate at varying Fresnel numbers and petal tip radius-of-curvature (ROC).

A method of position control of an optical component relative to a surface is disclosed. The method may include: obtaining a first signal by a first position measurement process; controlling relative movement between the optical component and the surface for a first range of motion using the first signal; obtaining a second signal by a second position measurement process different than the first position measurement process; and controlling relative movement between the optical component and the surface for a second range of motion using the second signal, the second range of motion being nearer the surface than the first range of motion.

The invention relates to a holographic display device for representing a two-dimensional and/or three-dimensional scene. The holographic display device comprises at least one spatial light modulator device and an optical component. The at least one spatial light modulator device is provided in order to reconstruct the scene and in order to generate at least one virtual visibility region in an observer plane. The optical component is configured with at least two regions that have a different transparency to one another, the value of the transparency respectively lying between 0 and 1. Furthermore, the optical component is arranged in the display device in such a way that it provides filtering, to be carried out at least partially, of a diffraction order spot in at least one diffraction order inside the virtual visibility region.

A texture image acquiring device, a display device and a collimator are disclosed. The texture image acquiring device (10) includes a collimator (110) and an image sensor (120). The collimator (110) includes a lens array (111), a first diaphragm layer (112), and a second diaphragm layer (113). The lens array (111) is configured to allow light rays to be converged and incident on the first diaphragm layer (112). The first diaphragm layer (112) is configured to allow light rays incident on the first diaphragm layer (112) to pass through and be incident on the second diaphragm layer (113), and to restrict an angle of light rays capable of passing through the first diaphragm layer (112). The second diaphragm layer (113) is configured to allow light rays incident on the second diaphragm layer (113) to pass through, and to restrict an angle of light rays capable of passing through the second diaphragm layer (113). The image sensor (120) is configured to sense light rays incident on the image sensor (120) for acquiring a texture image. The texture image acquiring device (10) has a light and thin structure, and can improve the accuracy of the acquired texture image.

A lens plate (10) for a rain and/or light sensor is proposed. The lens plate (10) has a base body (18), at least one light limitation structure (21), and at least one lens structure (28), the light limitation structure (21) extending into the base body (18) from a lower side (14) of the lens plate (10), a contour (27) of the light limitation structure (21) facing away from the lower side (14) of the lens plate (10) limiting the lens structure (28) circumferentially, and the contour (27) being substantially triangular. Furthermore, a rain and/or light sensor (8) is proposed.