H01L29/0696

POWER SEMICONDUCTOR DEVICE

A power semiconductor device includes a P-type substrate, an N-type well region, a P-type body region, a gate oxide layer, a polysilicon gate, a first oxide layer, a first N+ contact region, a first P+ contact region, drain metal, a first-type doped region, and a gate oxide layer. An end of the P-type body region is flush with or exceeds an end of the polysilicon gate, wherein C.sub.gd of the power semiconductor device is reduced and a switching frequency of the power semiconductor device is increased. A polysilicon field plate connected with a source is introduced over a drift region that is not only shield an influence of the polysilicon gate on the drift region, thereby eliminating C.sub.gd caused by overlapping of traditional polysilicon gate and drift region, but also enable the power semiconductor device to have strong robustness against an hot carrier effect.

Semiconductor device having a super junction structure and method of manufacturing the same

A semiconductor device having a super junction and a method of manufacturing the semiconductor device capable of obtaining a high breakdown voltage are provided, whereby charge balance of the super junction is further accurately controlled in the semiconductor device that is implemented by an N-type pillar and a P-type pillar. The semiconductor device includes a semiconductor substrate; and a blocking layer including a first conductive type pillar and a second conductive type pillar that extend in a vertical direction on the semiconductor substrate and that are alternately arrayed in a horizontal direction, wherein, in the blocking layer, a density profile of a first conductive type dopant may be uniform in the horizontal direction, and the density profile of the first conductive type dopant may vary in the vertical direction.

Fortified trench planar MOS power transistor
11588045 · 2023-02-21 · ·

A MOS cell based on a simple and self-aligned process is provides a planar cell forming a horizontal MOS channel, and a plurality of trench regions, which are arranged at an angle with respect to the longitudinal direction of the planar cells. The new cell concept can adopt both planar MOS channels and Trench MOS channels in a single MOS cell structure, or planar MOS channels alone, while utilising the trenches to improve the current spreading of the planar MOS channels. Floating P-doped regions at the bottom of the trench regions protect the device against high peak electric fields. The orthogonal trench recesses are discontinued in their longitudinal direction to allow the planar channels to conduct electrons. The design can be applied to both IGBTs and MOSFETs based on silicon or wide bandgap materials.

SIC TRENCH MOSFET WITH LOW ON-RESISTANCE AND SWITCHING LOSS
20220367636 · 2022-11-17 · ·

An improved SiC trench MOSFET having first and second type gate trenches for formation of a gate electrode, and a grounded P-shield region under the gate electrode for gate oxide electric-field reduction is disclosed. The gate electrodes are disposed into the first type gate trench having a thick oxide layer on trench bottom. The grounded P-shield region surrounding the second type gate trench filled up with the thick oxide layer is connected with a source metal through a grounded P region. The device further comprises a current spreading region surrounding the first type gate trench for on-resistance reduction.

SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THEREOF
20220367708 · 2022-11-17 ·

A semiconductor structure and a method for forming a semiconductor structure are provided. The semiconductor structure includes a substrate; a doped region within the substrate; a pair of source/drain regions extending along a first direction on opposite sides of the doped region; a gate electrode disposed in the doped region, wherein the gate electrode has a plurality of first segments extending in parallel along the first direction; and a protection structure over the substrate and at least partially overlaps the gate electrode.

HIGH VOLTAGE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
20220367711 · 2022-11-17 ·

Disclosed is a high voltage semiconductor device and a method of manufacturing the same and, more particularly, to a high voltage semiconductor device and a method of manufacturing the same that enables an improvement in the breakdown voltage relative to the on-resistance by forming a top region in or at the surface of the substrate when the device includes a field plate adjacent to a gate electrode.

Power amplifier modules with flip-chip and non-flip-chip power transistor dies

An amplifier module includes a module substrate and first and second power transistor dies. The first power transistor die is coupled to a mounting surface of the module substrate, and has first and second input/output (I/O) contact pads and a first ground contact pad, all of which are all exposed at a surface of the first power transistor die that faces toward the mounting surface of the module substrate. The second power transistor die also is coupled to the mounting surface, and has third and fourth I/O contact pads and a second ground contact pad. The third and fourth I/O contact pads are exposed at a surface of the second power transistor die that faces away from the mounting surface of the module substrate, and the second ground contact pad is exposed at a surface of the second power transistor die that faces toward the mounting surface.

SCHOTTKY DIODE INTEGRATED INTO SUPERJUNCTION POWER MOSFETS
20230045954 · 2023-02-16 ·

A trench metal-oxide-semiconductor field-effect transistor (MOSFET) device comprises an active cell area including a plurality of superjunction trench power MOSFETs formed in an epitaxial layer. Each MOSFET includes source and body regions and a contact trench formed between first and second gate trenches. A region of the epitaxial layer between the gate trenches extends to the top surface of the epitaxial layer. An insulated gate electrode is formed in each gate trench. At least a portion of the contact trench extends from a top surface of the epitaxial layer to a depth that is shallower than the bottom of the body region.

Monolithic charge coupled field effect rectifier embedded in a charge coupled field effect transistor

An integrated circuit includes a MOSFET device and a monolithic diode device, wherein the monolithic diode device is electrically connected in parallel with a body diode of the MOSFET device. The monolithic diode device is configured so that a forward voltage drop Vf.sub.D2 of the monolithic diode device is less than a forward voltage drop Vf.sub.D1 of the body diode of the MOSFET device. The forward voltage drop Vf.sub.D2 is process tunable by controlling a gate oxide thickness, a channel length and body doping concentration level. The tunability of the forward voltage drop Vf.sub.D2 advantageously permits design of the integrated circuit to suit a wide range of applications according to requirements of switching speed and efficiency.

Semiconductor device

A semiconductor device includes a semiconductor part, first and second electrodes, and a control electrode. The semiconductor part is provided between the first and second electrodes. The control electrode is provided in a trench of the semiconductor part between the semiconductor part and the second electrode. The semiconductor part includes first to third layers. The first layer of a first conductivity type extends between the first and second electrodes. The second layer of a second conductivity type is provided between the first layer and the second electrode. The second layer is connected to the second electrode. The third layer of the second conductivity type is provided between the second layer and the control electrode. The third layer includes a second-conductivity-type impurity with a higher concentration than a second-conductivity-type impurity of the second layer. The third layer contacts the second electrode, and is electrically connected to the second electrode.