A silicon carbide semiconductor device includes first semiconductor areas and second semiconductor areas. The first semiconductor areas have a first semiconductor layer of a second conductivity type, a second semiconductor layer of a first conductivity type, first semiconductor regions of the second conductivity type, second semiconductor regions of the first conductivity type, gate electrodes, and first electrodes. The second semiconductor areas have the first semiconductor layer, the second semiconductor layer, third semiconductor regions of the second conductivity type, the gate electrodes, and the first electrodes. The first semiconductor regions include low- impurity-concentration regions and high-impurity-concentration regions. The third semiconductor regions have a potential equal to that of the first electrodes. The first semiconductor regions are connected to the third semiconductor regions by MOS structures. In the first semiconductor regions, the high-impurity-concentration regions are provided at positions different from positions facing the first electrodes.

A method of writing data into a volatile thyristor memory cell array and maintaining the data with refresh is disclosed.

An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n epi layer, a p-well, trenched insulated gate regions formed in the p-well, and n+ regions between the gate regions, so that vertical NPN and PNP transistors are formed. The device may be formed of a matrix of cells or may be interdigitated. To turn the device on, a positive voltage is applied to the gate, referenced to the cathode. The cells further contain a vertical p-channel MOSFET, for rapidly turning the device off. The p-channel MOSFET may be made a depletion mode device by implanting boron ions at an angle into the trenches to create a p-channel. This allows the IGTO device to be turned off with a zero gate voltage while in a latch-up condition, when the device is acting like a thyristor.

An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n epi layer, a p-well, trenched insulated gate regions formed in the p-well, and n+ regions between the gate regions, so that vertical NPN and PNP transistors are formed. The device may be formed of a matrix of cells or may be interdigitated. To turn the device on, a positive voltage is applied to the gate, referenced to the cathode. The cells further contain a vertical p-channel MOSFET, for rapidly turning the device off. The p-channel MOSFET may be made a depletion mode device by implanting boron ions at an angle into the trenches to create a p-channel. This allows the IGTO device to be turned off with a zero gate voltage while in a latch-up condition, when the device is acting like a thyristor.

A thyristor is formed from a vertical stack of first, second, third, and fourth semiconductor regions of alternated conductivity types. The fourth semiconductor region is interrupted in a gate area of the thyristor. The fourth semiconductor region is further interrupted in a continuous corridor that extends longitudinally from the gate area towards an outer lateral edge of the fourth semiconductor region. A gate metal layer extends over the gate area of the thyristor. A cathode metal layer extends over the fourth semiconductor region but not over the continuous corridor.

An ESD Protection Device includes a semiconductor body including a substrate, conductivity regions, and emitter and collector portions. Laterally adjacent first and second conductivity regions are arranged at least partially within the semiconductor body. The emitter and collector portions are disposed in contact with and arranged over the first and second conductivity regions respectively. The third conductivity region is disposed between the second conductivity region and the collector portion. The first and third conductivity regions have a first conductivity type. The second conductivity region, and the emitter and collector portions have a second conductivity type different from the first conductivity type. When an electrostatic discharge level exceeds a predetermined level, a first discharge current passes between the emitter portion and the collector portion through the first and second conductivity regions. A second discharge current subsequently occurs and passes between the first and third conductivity regions through the second conductivity region.

A method of writing data into a volatile thyristor memory cell array and maintaining the data with refresh is disclosed.

Operations with reduced current overall are performed on single thyristor memory cells forming a volatile memory cell cross-point array. A first voltage is applied across a first group of memory cells for the operation and a lower second voltage is applied across other groups of memory cells. The first voltage is then applied across a second group of memory cells while the second voltage is applied across the other groups including the first group of memory cells and repeated until the operations covers all the groups.

An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n epi layer, a p-well, an n-layer over the p-well, p+ regions over the n-layer, trenched gate regions formed in the p-well, and n+ regions between the gate regions, so that vertical npn and pnp transistors are formed. The device is formed of a matrix of cells. To turn the device on, a positive voltage is applied to the gate, referenced to the cathode. The cells contain a vertical p-channel MOSFET, for shorting the base of the npn transistor to its emitter, to turn the npn transistor off when the p-channel MOSFET is turned on by a slight negative voltage applied to the gate. One or more p-layers are implanted into the p-well, below the n-layer, for independently controlling the turn-on and turn-off threshold voltages and the breakdown voltage.

The invention relates to a turn-off power semiconductor device comprising a plurality of thyristor cells, each thyristor cell comprising a cathode region; a base layer; a drift layer; an anode layer; a gate electrode which is arranged lateral to the cathode region in contact with the base layer; a cathode electrode; and an anode electrode. Interfaces between the cathode regions and the cathode electrodes as well as interfaces between the base layers and the gate electrodes of the plurality of thyristor cells are flat and coplanar. In addition, the base layer includes a gate well region extending from its contact with the gate electrode to a depth, which is at least half of the depth of the cathode region, wherein, for any depth, the minimum doping concentration of the gate well region at this depth is 50% above a doping concentration of the base layer between the cathode region and the gate well region at this depth and at a lateral position, which has in an orthogonal projection onto a plane parallel to the first main side a distance of 2 m from the cathode region. The base layer includes a compensated region of the second conductivity type, the compensated region being arranged directly adjacent to the first main side and between the cathode region and the gate well region, wherein the density of first conductivity type impurities relative to the net doping concentration in the compensated region is at least 0.4.