A semiconductor device includes a first varactor diode and a second varactor diode. The second varactor diode is coupled in series with the first varactor diode and vertically disposed over the first varactor diode. By vertically disposing the second varactor diode over the first varactor diode, the space occupied by the pair of varactor diodes can be significantly reduced.

A method and stacked semiconductor device having a top surface, a bottom surface, and at least one side surface that connects the top surface with the bottom surface. The bottom surface is formed of a substrate layer or a rear side contact layer arranged below the substrate layer. On the substrate layer, a first semiconductor layer of a first conductivity type is arranged and on the first semiconductor layer at least one second semiconductor layer of a second conductivity type is arranged. The first and second semiconductor layers are formed of a III-V material or consist of a III-V material. The first and second conductivity types are different. The top surface is at least partially formed by a passivation layer. Along the side surface, an amorphized and/or insulating region extending to a depth is formed, and the depth is perpendicular or substantially perpendicular to the layer stack.

A semiconductor device is included a first semiconductor layer with n-type conductivity, containing a gallium nitride-based semiconductor, a second semiconductor layer with p-type conductivity, which is laminated directly on the first semiconductor layer and contains a gallium nitride-based semiconductor added with a p-type impurity at a concentration of 110.sup.20 cm.sup.3 or more, a first electrode disposed in contact with the first semiconductor layer, and a second electrode disposed in contact with the second semiconductor layer, and the semiconductor device functions as a pn-junction diode.

A stacked III-V semiconductor component having a stack with a top, a bottom, a side surface, and a longitudinal axis. The stack has a p.sup.+ region, an n.sup. layer, and an n.sup.+ region. The p.sup.+ region, the n.sup. layer, and the n.sup.+ region follow one another in the specified order along the longitudinal axis and are monolithic in design, and include a GaAs compound. The n.sup.+ region or the p.sup.+ region is a substrate layer. The stack has, in the region of the side surface, a first and a second peripheral, shoulder-like edge. The first edge is composed of the substrate layer; the second edge is composed of the n.sup. layer or of an intermediate layer adjacent to the n.sup. layer and to the p.sup.+ region and the first and the second peripheral edges each have a width of at least 10 m.

A stacked high-blocking III-V power semiconductor diode, with a p+ or n+ substrate layer, a p layer, an n region with a layer thickness of 10 m-150 m, and an n+ or p+ layer, wherein all layers comprise a GaAs compound, a first metallic contact layer and a second metallic contact layer and a hard mask layer with at least one seed opening, wherein the hard mask layer is integrally bonded to the substrate layer or integrally bonded to the p layer, the n region extends within the seed opening and over an edge region, adjacent to the seed opening, of a top side of the hard mask layer and the n region within the seed opening is integrally bonded to the p layer or to the n+ substrate layer and in the edge region of the top side of the hard mask layer to the hard mask layer.

A P-i-N diode structure includes a group III-N semiconductor material disposed on a substrate. An n-doped raised drain structure is disposed on the group III-N semiconductor material. An intrinsic group III-N semiconductor material is disposed on the n-doped raised drain structure. A p-doped group III-N semiconductor material is disposed on the intrinsic group III-N semiconductor material. A first electrode is connected to the p-doped group III-N semiconductor material. A second electrode is electrically coupled to the n-doped raised drain structure. In an embodiment, a group III-N transistor is electrically coupled to the P-i-N diode. In an embodiment, a group III-N transistor is electrically isolated from the P-i-N diode. In an embodiment, a gate electrode and an n-doped raised drain structure are electrically coupled to the n-doped raised drain structure and the second electrode of the P-i-N diode to form the group III-N transistor.

There is provided a nitride semiconductor substrate, including: a substrate configured as an n-type semiconductor substrate; and a drift layer provided on the substrate and configured as a gallium nitride layer containing donors and carbons, wherein a concentration of the donors in the drift layer is 5.010.sup.16/cm.sup.3 or less, and is equal to or more than a concentration of the carbons that function as acceptors in the drift layer, over an entire area of the drift layer, and a difference obtained by subtracting the concentration of the carbons that function as acceptors in the drift layer from the concentration of the donors in the drift layer, is gradually increased from a substrate side toward a surface side of the drift layer.

A nitride semiconductor device may comprise a p-type layer. The nitride semiconductor device may comprise a first n-type voltage-blocking layer in contact with the p-type layer. The nitride semiconductor device may comprise a second n-type voltage-blocking layer in contact with the first n-type voltage-blocking layer and separated from the p-type layer by the first n-type voltage-blocking layer. A donor concentration in the first n-type voltage-blocking layer may be lower than a donor concentration in the second n-type voltage-blocking layer. A carbon concentration in the first n-type voltage-blocking layer may be lower than a carbon concentration in the second n-type voltage-blocking layer.

A method of fabricating an electronic device includes providing a III-V substrate having a hexagonal crystal structure and a normal to a growth surface characterized by a misorientation from the <0001> direction of between 0.15 and 0.65 . The method also includes growing a first III-V epitaxial layer coupled to the III-V substrate and growing a second III-V epitaxial layer coupled to the first III-V epitaxial layer. The method further includes forming a first contact in electrical contact with the III-V substrate and forming a second contact in electrical contact with the second III-V epitaxial layer.

An integrated circuit structure includes a first semiconductor fin extending horizontally in a length direction and including a bottom portion and a top portion above the bottom portion, a bottom transistor associated with the bottom portion of the first semiconductor fin, a top transistor above the bottom transistor and associated with the top portion of the first semiconductor fin, and a first vertical diode. The first vertical diode includes: a bottom region associated with at least the bottom portion of the first semiconductor fin, the bottom region including one of n-type and p-type dopant; a top region associated with at least the top portion of the first semiconductor fin, the top region including the other of n-type and p-type dopant; a bottom terminal electrically connected to the bottom region; and a top terminal electrically connected to the top region at the top portion of the first semiconductor fin.