3D semiconductor packages and methods of forming 3D semiconductor package are described herein. The 3D semiconductor packages are formed by mounting a die stack on an interposer, dispensing a thermal interface material (TIM) layer over the die stack and placing a heat spreading element over and attached to the die stack by the TIM layer. The TIM layer provides a reliable adhesion layer and an efficient thermally conductive path between the die stack and interposer to the heat spreading element. As such, delamination of the TIM layer from the heat spreading element is prevented, efficient heat transfer from the die stack to the heat spreading element is provided, and a thermal resistance along thermal paths through the TIM layer between the interposer and heat spreading element are reduced. Thus, the TIM layer reduces overall operating temperatures and increases overall reliability of the 3D semiconductor packages.

An integrated circuit structure includes a first layer comprising silicon and at least one of carbon, oxygen, or hydrogen, and a device layer including a plurality of transistors above the first layer. A first interconnect structure is above the device layer and includes first conductive interconnect features. A second interconnect structure is below the first layer and includes second conductive interconnect features. In an example, one or more of the second conductive interconnect features pass through a bottom surface of the first layer. One or more third conductive interconnect features vertically extend through the device layer to a top surface of the first layer. In an example, the one or more third conductive interconnect features are in contact with the corresponding one or more of the second conductive interconnect features that pass through the bottom surface of the first layer.

An interconnect structure and a method of forming the interconnect structure are provided. The interconnect structure includes a metal line layer and a top via layer that each include a plurality of alternating first layers composed of a first metal and second layers composed of a second metal, whereby the second layers are thinner than the first layers.

A semiconductor device includes a first substrate, an insulation layer, and a first electrode. The first substrate contains a first semiconductor material. The insulation layer includes a first surface, a second surface, and a third surface. The first electrode includes a fourth surface, a fifth surface, and a sixth surface, and contains a porous first conductive material. The second surface and the fifth surface configure the same surface. The third surface faces the sixth surface. A distance between the first surface and the first substrate is less than a distance between the second surface and the first substrate. A distance between the fourth surface and the first substrate is less than a distance between the fifth surface and the first substrate.

A method providing a high aspect ratio through substrate via in a substrate is described. The through substrate via has vertical sidewalls and a horizontal bottom. The substrate has a horizontal field area surrounding the through substrate via. A metallic barrier layer is deposited on the sidewalls of the through substrate via. A nitridation process converts a surface portion of the metallic barrier layer to a nitride surface layer. The nitride surface layer enhances the nucleation of subsequent depositions. A first metal layer is deposited to fill a portion of the through substrate via and cover the horizontal field area. A thermal anneal step to reflow a portion of the first metal layer on the horizontal field area into the through substrate via. A second metal layer is deposited over the first metal layer to fill a remaining portion of the through substrate via. Another aspect of the invention is a device created by the method.

An apparatus comprises a through via formed in a substrate. The through via is coupled between a first side and a second side of the substrate. The through via comprises a bottom portion adjacent to the second side of the substrate, wherein the bottom portion is formed of a conductive material. The through via further comprises sidewall portions formed of the conductive material and a middle portion formed between the sidewall portions, wherein the middle portion is formed of a dielectric material.

An inventive semiconductor device includes: a semiconductor chip including an integrated circuit; a plurality of electrode pads provided on the semiconductor chip and connected to the integrated circuit; a rewiring to which the electrode pads are electrically connected together, the rewiring being exposed on an outermost surface of the semiconductor chip and having an exposed surface area greater than the total area of the electrode pads; and a resin package which seals the semiconductor chip.

Techniques are disclosed for providing a decoupled via fill. Given a via trench, a first barrier layer is conformally deposited onto the bottom and sidewalls of the trench. A first metal fill is blanket deposited into the trench. The non-selective deposition is subsequently recessed so that only a portion of the trench is filled with the first metal. The previously deposited first barrier layer is removed along with the first metal, thereby re-exposing the upper sidewalls of the trench. A second barrier layer is conformally deposited onto the top of the first metal and the now re-exposed trench sidewalls. A second metal fill is blanket deposited into the remaining trench. Planarization and/or etching can be carried out as needed for subsequent processing. Thus, a methodology for filling high aspect ratio vias using a dual metal process is provided. Note, however, the first and second fill metals may be the same.

A device structure according to the present disclosure includes a passivation layer, a first conductor plate layer disposed on the passivation layer, a second conductor plate layer disposed over the first conductor layer, a third conductor plate layer disposed over the second conductor layer, and a fourth conductor plate layer disposed over the third conductor layer. The second conductor plate layer encloses the first conductor plate layer and the fourth conductor plate layer encloses the third conductor plate layer. The device structure, when used in a back-end-of-line passive device, reduces leakage and breakdown due to corner discharge effect.

A semiconductor device may include a transistor gate in a device layer; an interconnect layer over the device layer; and an air gap extending through the interconnect layer to contact an upper surface of the transistor gate. The air gap provides a mechanism to reduce both on-resistance and off-capacitance for applications using SOI substrates such as radio frequency switches.