Provided is a method of manufacturing a semiconductor device capable of suppressing variation in thickness of oxide films among a plurality of SiC wafers. Forming first inorganic films on lower surfaces of a plurality of SiC wafer, and then performing etching of the plurality of SiC wafers so that 750 nm or more of the first inorganic film is left in thickness, and then forming oxide films on upper surfaces of the plurality of SiC wafers by performing thermal oxidation treatment in a state in which a first SiC wafer of the plurality of SiC wafers is placed directly below any one of at least one wafer, including at least one of a dummy wafer and a monitor wafer, and a second SiC wafer of the plurality of SiC wafers is placed directly below a third SiC wafer of the plurality of SiC wafers.

A silicon carbide semiconductor device includes a silicon carbide (SiC) substrate having a SiC epitaxial layer disposed over a surface of the SiC substrate, the SiC substrate having a first conductivity and the SiC epitaxial layer having the first conductivity. A contact region and a well region are formed in the SiC epitaxial layer, the contact region and the well region have a doping level of a second conductivity opposite the first conductivity. The contact region lies completely within the well region, is not in contact with a region having the first conductivity and has edges recessed from edges of the well region.

A semiconductor device and a method of making thereof are disclosed. The device includes a substrate heavily doped with a first conductivity type and an epitaxial layer lightly doped with the first conductivity type formed on the substrate. A buffer layer between the substrate and the epitaxial layer is doped with the first conductivity type at a doping level between that of the substrate and that of the epitaxial layer. A cell includes a body region doped with the second conductivity formed in the epitaxial layer. The second conductivity type is opposite the first conductivity type. The cell includes a source region doped with the first conductivity type and formed in at least the body region. The device further includes a short region doped with the second conductivity type formed in the epitaxial layer separated from source region of the cell by the body region of the cell wherein the short region is conductively coupled with the source region.

A vertical semiconductor device includes one or more of a substrate, a buffer layer over the substrate, one or more drift layers over the buffer layer, and a spreading layer over the one or more drift layers.

A silicon carbide semiconductor device includes: a silicon carbide layer of a first conductive type including a defect region in which a crystal defect exists; a plurality of well regions of a second conductive type formed on the silicon carbide layer; source regions of the first conductive type formed in the well regions; gate oxide films formed on the silicon carbide layer, the well regions and the source regions; gate electrodes formed on the gate oxide films; and a source electrode electrically connected to the well regions and the source regions, wherein the source region is not formed in the defect region.

The present disclosure relates to a super-junction device and a manufacturing method thereof. In the manufacturing method, a first plurality of semiconductor pillars are formed in an epitaxial layer and a sacrificial stack is formed above the epitaxial layer. The sacrificial stack is used as a hard mask both for a body region and for a source region, and has a sidewall which controls a channel length of the super-junction device to reduce process fluctuation in different batches and improve reliability of the super-junction device.

A semiconductor device includes a first silicon carbide region of a first conductivity type, a second silicon carbide region of a second conductivity type on the first region, and a third silicon carbide region of a second conductivity type on the second region. Fourth and fifth silicon carbide region of the first conductivity type are on the third region. A first electrode has a first portion between the fourth region and fifth region in a first direction. A metal silicide layer is between the first portion and the third region, between the first portion and the fourth region in the first direction, and between the first portion and the fifth silicon carbide region in the first direction.

A semiconductor device of embodiments includes: an electrode containing titanium (Ti); a silicon carbide layer; a first region provided between the silicon carbide layer and the electrode, containing silicon (Si) and oxygen (O), and having a thickness equal to or more than 2 nm and equal to or less than 10 nm; and a second region provided between the first region and the electrode and containing titanium (Ti) and silicon (Si).

A precursor for a vertical semiconductor device is provided with a substrate, a drift region over the substrate, and an upper precursor region over the drift region. The top surface of the precursor is substantially planar, and the substrate and the drift region are doped with a first dopant of a first polarity. In a first embodiment, a series of implants with a second dopant is provided in the upper precursor region via the top surface to form each of at least two gate regions such that each implant of the series of implants is provided at a different depth below the top surface. In a second embodiment, a series of implants with the first dopant is provided in the upper precursor region via the top surface to form a channel region that has at least a portion between two gate regions.

A semiconductor device of embodiments includes: a first electrode; a second electrode; a gate electrode extending in a first direction; and a SiC layer. The SiC layer includes: a first conductive type first SiC region having a first region, a second region facing the gate electrode, and a third region in contact with the first electrode; a second conductive type second SiC region between the second region and the third region; a second conductive type third SiC region, the second region interposed between the second SiC region and the third SiC region; a second conductive type fourth SiC region, the third region interposed between the second SiC region and the fourth SiC region; a first conductive type fifth SiC region; a second conductive type sixth SiC region between the first region and the second SiC region; and a second conductive type seventh SiC region between the first region and the second SiC region and distant from the sixth SiC region in the first direction.