H01L29/66765

AMORPHOUS SILICON LAYER AS OPTICAL FILTER FOR THIN FILM TRANSISTOR CHANNEL
20170371149 · 2017-12-28 ·

A display device includes a first support plate and a pixel region over the first support plate. A thin film transistor (TFT) structure is disposed over the first support plate and associated with the pixel region. The TFT structure includes a first metal layer over the first support plate. The first metal layer includes a gate. A silicon layer is disposed over the gate. A second metal layer is disposed over the silicon layer. The second metal layer includes a source and a drain covering a first portion of the silicon layer. An amorphous silicon layer is disposed over at least a portion of the second metal layer and a second portion of the silicon layer.

LOW-TEMPERATURE POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR, AND MANUFACTURING METHOD FOR FABRICATING THE SAME, ARRAY SUBSTRATE, DISPLAY PANEL AND DISPLAY DEVICE
20170365623 · 2017-12-21 · ·

Disclosed are a low-temperature polycrystalline silicon thin film transistor (LTPS TFT), a method for fabricating the same, an array substrate, a display panel, and a display device. The LTPS TFT includes an active layer, a source, a drain, a gate, and a gate insulating layer which are arranged on a substrate. The gate insulating layer is arranged between the active layer and the gate, and a graphene oxide layer which is arranged between the active layer and the gate insulating layer. Since the graphene oxide layer is arranged between the active layer and the gate insulating layer, the interface between the active layer and the gate insulating layer of polycrystalline (P-Si) has a reduced roughness and interfacial defect density, and a pre-cleaning process is not necessary for the gate insulating layer.

METHOD FOR FORMING FINE PATTERNS
20170348729 · 2017-12-07 ·

A method of forming fine patterns includes the steps of forming a conductive layer on a base part, forming a sacrificial layer including an adhesive material on the conductive layer, the adhesive material including a catechol group, forming resist patterns on the sacrificial layer, and forming fine patterns by patterning the conductive layer using the resist patterns as a mask.

Thin Film Transistor, Array Substrate, Method for Manufacturing the Same, and Display Device

Disclosed is a thin film transistor, an array substrate, a method for manufacturing the same, and a display device. The method includes: forming a source and drain on a base substrate and forming a semiconductor layer. Between the step of forming the source and drain and the step of forming the semiconductor layer, the method further includes: forming a diffusion barrier layer. Metal atoms diffused from the source and drain and passing through the diffusion barrier layer react with a part of the semiconductor layer near the source and drain, and a metal transition layer containing metal silicide is formed.

Laser irradiation apparatus and method for manufacturing semiconductor device

A laser irradiation apparatus (1) according to an embodiment includes an optical-system module (20) configured to apply laser light (L1) to an object to be irradiated, a shield plate (51) in which a slit (54) is formed, through which the laser light (L1) passes, and a reflected-light receiving component (61) disposed between the optical-system module (20) and the shield plate (51), in which the reflected-light receiving component (61) is able to receive, out of the laser light (L1), reflected light (R1) reflected by the shield plate (51).

Thin film transistor and manufacturing method thereof, array substrate, display device and sensor

Provided is a thin film transistor including a highly-textured dielectric layer, an active layer, a gate electrode and a source/drain electrode that are stacked on a base substrate. The source/drain electrode includes a source electrode and a drain electrode. The gate electrode and the active layer are insulated from each other. The source electrode and the drain electrode are electrically connected to the active layer. Constituent particles of the active layer are of monocrystalline silicon-like structures. According to the present disclosure, the highly-textured dielectric layer is adopted to replace an original buffer layer to induce the active layer to grow into a monocrystalline silicon-like structure, such that the performance of the thin film transistor is improved.

Semiconductor memory devices

The embodiments herein relate to semiconductor memory devices and methods of forming the same. A semiconductor memory device is provided. The semiconductor memory device includes a dual-gate transistor and a memory cell. The memory cell is adjacent to the dual-gate transistor, wherein the memory cell and the dual-gate transistor share a common electrode.

Thin film transistor and method for manufacturing the same, array substrate and electronic device

A thin film transistor and a method for manufacturing the same, an array substrate and an electronic device. The thin film transistor includes a gate, a gate insulator, an active layer, a source and a drain. A protective structure is disposed on a side of the source and the drain close to the gate.

TRANSISTOR STRUCTURE, DISPLAY DEVICE INCLUDING TRANSISTOR STRUCTURE, AND METHOD OF MANUFACTURING TRANSISTOR STRUCTURE

A transistor structure may include a first electrode, a second electrode, a third electrode, a substrate, and a semiconductor member. The semiconductor member overlaps the third electrode and includes a first semiconductor portion, a second semiconductor portion, and a third semiconductor portion. The first semiconductor portion directly contacts the first electrode, is directly connected to the third semiconductor portion, and is connected through the third semiconductor portion to the second semiconductor portion. The second semiconductor portion directly contacts the second electrode and is directly connected to the third semiconductor portion. A minimum distance between the first semiconductor portion and the substrate is unequal to a minimum distance between the second semiconductor portion and the substrate.

Manufacutrig method of array substrates, array substrates, and display panels

A manufacturing method of array substrates, an array substrate, and a display panel are disclosed. The manufacturing method of the array substrate includes: forming a first electrode and a gate electrode on a substrate in sequence; forming an insulation layer, a semiconductor layer and a dielectric layer on the substrates in sequence and forming a first through hole, a second through hole and a third through hole; forming a source electrode, a drain electrode, a second electrode and a third electrode on the dielectric layer, wherein the source electrode and the drain electrode connect to the semiconductor layer respectively, the second electrode connects to the first electrode and the third electrode connects with the drain electrode. In this way, the number of the masks needed during the manufacturing process is decreased. In addition, the manufacturing process is simplified and the cost is reduced.