A method for producing a cavity in a substrate composed of hard brittle material is provided. A laser beam of an ultrashort pulse laser is directed a side surface of the substrate and is concentrated by a focusing optical unit to form an elongated focus in the substrate. Incident energy of the laser beam produces a filament-shaped flaw in a volume of the substrate. The filament-shaped flaw extends into the volume to a predetermined depth and does not pass through the substrate. To produce the filament-shaped flaw, the ultrashort pulse laser radiates in a pulse or a pulse packet having at least two successive laser pulses. After at least two filament-shaped flaws are introduced, the substrate is exposed to an etching medium which removes material of the substrate and widens the at least two filament-shaped flaws to form filaments. At least two filaments are connected to form a cavity.

A module and a process for forming a monolithic substantially closed-porosity silicon carbide fluidic module having a tortuous fluid passage extending through the module, the tortuous fluid passage having an interior surface, the interior surface having a surface roughness in the range of from 0.1 to 10 μm Ra. The process includes positioning a positive fluid passage mold within a volume of silicon carbide powder, the powder coated with a binder; pressing the volume of silicon carbide powder with the mold inside to form a pressed body; heating the pressed body to remove the mold; and sintering the pressed body.

Disclosed herein are novel 3D microelectrode arrays (3D MEA) that include a substrate body (e.g. chip), microneedles, traces, and a well, wherein the 3D MEA provides for transfer of electrical signals on one side of the substrate body to the other side of the substrate body. Methods for using 3D MEAs to grow electrogenic cells and obtain electrophysiological signals are disclosed as well. Fabrication techniques for producing the 3D MEAs are also disclosed.

Disclosed are a substrate for a microfluidic device, a microfluidic device, a driving method of the microfluidic device, and a method of manufacturing a substrate for the microfluidic device. The substrate includes: a first base substrate; a first electrode layer on the first base substrate, the first electrode layer including a plurality of drive electrodes. The plurality of drive electrodes define at least one flow channel and at least one functional area in the first substrate, the at least one functional area includes a reagent area, the at least one flow channel includes a reagent area flow channel, the reagent area includes a reagent area liquid storage portion and a droplet shape changing portion, the droplet shape changing portion is adjacent to the reagent area flow channel, and the reagent liquid storage portion is on a side of the droplet shape changing portion away from the reagent area flow channel.

An apparatus for sorting macromolecules includes a first chip including a channel formed in a first side of the first chip and having at least one monolithic sorting structure for sorting macromolecules from the sample fluid. A first set of vias formed in the first chip has openings in a second side of the first chip, the sample fluid being provided to the sorting structure through the first set of vias. A second set of vias formed in the first chip has openings in the second side for receiving macromolecules in the sample fluid greater than or equal to a prescribed dimension sorted by the sorting structure. A third set of vias formed in the first chip has openings in the second side for receiving macromolecules in the sample fluid less than the prescribed dimension. The apparatus includes first and second seals covering the first and second sides, respectively.

A detection chip, a method for manufacturing a detection chip, a method for operating a detection chip, and a reaction system are disclosed. The detection chip includes a first substrate, a micro-cavity definition layer, and a heating electrode. The micro-cavity definition layer defines a plurality of micro-reaction chambers. The heating electrode is configured to release heat after being energized. The heating electrode includes a first electrode portion and at least one second electrode portion. Orthographic projections of the plurality of micro-reaction chambers on the first substrate are within an orthographic projection of the first electrode portion on the first substrate, the orthographic projections of the plurality of micro-reaction chambers on the first substrate do not overlap with an orthographic projection of the second electrode portion on the first substrate, and a resistance value of the first electrode portion is greater than a resistance value of the second electrode portion.

A microfluidic device includes a bottom electrode, a dielectric layer on the bottom electrode, one or more top electrodes on a region of the dielectric layer, Each of the one or more top electrodes has a sidewall that forms a sidewall angle with an outer surface of the dielectric layer that is less than 180 degrees. The sidewall of each of the one or more top electrodes and a portion of the outer surface of the dielectric layer adjacent to the sidewall define a microchannel region for transporting an open microchannel of a fluid. Such microfluidic devices may enable transport of small microchannels using low voltages.

The present disclosure provides a substrate for driving droplets, a manufacturing method thereof, and a microfluidic device. The substrate includes a first base substrate a plurality of leads on the first base substrate a plurality of driving electrodes on a side of the plurality of leads away from the first base substrate and a shielding electrode on the side of the plurality of leads away from the first base substrate and grounded. Each of the plurality of leads is electrically connected to at least one of the plurality of driving electrodes, an orthographic projection of the shielding electrode on the first base substrate and an orthographic projection of at least one of the plurality of leads on the first base substrate at least partially overlap, and the shielding electrode is electrically insulated from the plurality of driving electrodes.

Provided is a channel device that is capable of increasing the concentration of fine particles in a liquid only by use of fluid-dynamic flows without relying on electrostatic interactions. A channel device (1) in accordance with an embodiment of the present invention includes: a main channel (11) configured to allow a liquid containing fine particles to flow therethrough; a chamber (15) that is provided at an end of the main channel (11) and that is configured to store target fine particles which have increased in concentration; and a side channel (12) that is connected to a side face of the main channel (11) and that is configured to allow unwanted liquid to drain therethrough, wherein at least one of a height and a width of the side channel (12) is smaller than a particle size of the fine particles.

A fluidic device (1) comprises a flow chamber (2) for accommodating a biological specimen on a carrier portion (3) and at least one flow channel (4a, 4b, 4c, 4d) fluidly connected to the flow chamber (2), the fluidic device (1) having a layered structure comprising a bottom plate (5), a cover plate (6) and an insert (7) in between, the insert (7) comprising the carrier portion (3) and a frame portion surrounding the carrier portion (3), and being elastomeric in order to be able to clamp a biological specimen between an incision in the carrier portion (3).