The present disclosure relates to a fixing device arranged to be fastened to a machining head such as a drill head. A machine tool for machining workpieces such as metal sheets at a machining point is also disclosed. The workpieces may be machined from a machining side. A fastening device is included and adapted for fastening the fixing device to the machining head. A fixing head is included and adapted for releasably, locally fixing the workpiece on its machining side and adjacent to the machining point. A controller is included and configured to control the fixing and releasing of the fixing head on a workpiece.

The present disclosure relates to a fixing device arranged to be fastened to a machining head such as a drill head. A machine tool for machining workpieces such as metal sheets at a machining point is also disclosed. The workpieces may be machined from a machining side. A fastening device is included and adapted for fastening the fixing device to the machining head. A fixing head is included and adapted for releasably, locally fixing the workpiece on its machining side and adjacent to the machining point. A controller is included and configured to control the fixing and releasing of the fixing head on a workpiece.

The present invention provides a substrate treating apparatus, including: a treatment container having a treatment space therein; a support unit for supporting and rotating the substrate in the treatment space; and a liquid supply unit for supplying a liquid onto the substrate, in which wherein the support unit includes: a body on which the substrate is seated; and a support shaft coupled to the body, and an upper surface of the body is provided with a central portion including a center of the body and an edge portion surrounding the central portion, and a vacuum hole is formed in the central portion, and a groove is formed in the edge portion.

The present invention provides a fluidic clamping device (100) comprising a sleeve (110) for clamping and holding a movable part (200). The sleeve (110) comprises a central element (111) having a cross-section in a longitudinal direction of the central element (111), comprising a cavity configured to receive the movable part (200). The fluidic clamping device (100) is characterized in that the sleeve (110) further comprises at least one chamber (112) disposed on an outer periphery of the central element (111) and extending along a longitudinal direction of the central element (111), the at least one chamber (112) configured to containing a fluid, wherein the fluidic clamping device (100) is configured to pressurize an interior of the at least one chamber (112) with a first predetermined fluidic pressure or a second predetermined fluidic pressure, wherein the first predetermined fluidic pressure is lower than the second predetermined fluidic pressure, and wherein the central element (111) is configured to be in frictional contact with the movable part (200) at at least a portion of an inner periphery of the central element (111) and to clamp and hold the movable part (200) in a first state in which the interior of the at least one chamber (112) is pressurized with the first fluidic pressure, and wherein the central element (111) is configured not to be in frictional contact with the movable part (200) at any portion of the inner periphery of the central element (111) in a second state in which the interior of the at least one chamber (112) is pressurized with the second fluidic pressure.

A workpiece carriage for workpiece transport includes a guide unit oriented in a longitudinal direction, a drive unit having an electrical supply and a drive motor, and a workpiece gripping unit having two clamping jaws movable relative to one another. A machine tool includes at least one workpiece table, with at least one tool unit movable relative to the workpiece table and with at least two workpiece carriages that are displaceable individually in the longitudinal direction along a machine bed of the machine tool. A manufacturing cell includes such a machine tool and a workpiece supply. The two clamping jaws of the workpiece gripping unit can be displaced relative to one another in a height direction oriented normal to the longitudinal direction and normal to a transverse direction oriented normal to the longitudinal direction. This expands the possible applications of the workpiece carriage.

When an operation portion (38) provided at an axial end portion of a valve member (37) is pushed into a valve case (31) provided to a first block (3), a clamping apparatus transitions from a first state, in which communication between: each of a primary-side pressure fluid supply/discharge port (34) and a secondary-side pressure fluid supply/discharge port (35); and a pressure fluid discharge port (36) is open, to a second state, in which communication between: each of the primary-side pressure fluid supply/discharge port (34) and the secondary-side pressure fluid supply/discharge port (35); and the pressure fluid discharge port (36) is closed.

In order to respond flexibly to various processing modes, such as forming curved surface shapes, when cutting a workpiece using a wire saw, this wire saw device (1) is provided with: a single robot arm (2) that is capable of moving freely by means of multi-axis control; a wire saw unit (3) that is detachably connected to the robot arm (2) via a tool changer (7); a wire (8) that spans a plurality of pulleys supported within the wire saw unit (3); and a workpiece cutting zone (20) that is established between the pulleys. The workpiece is cut to a prescribed shape by moving the robot arm (2) in a preset direction while running the wire (8) of the wire saw unit (3) and pressing the wire (8) against the supported workpiece.

In order to respond flexibly to various processing modes, such as forming curved surface shapes, when cutting a workpiece using a wire saw, this wire saw device (1) is provided with: a single robot arm (2) that is capable of moving freely by means of multi-axis control; a wire saw unit (3) that is detachably connected to the robot arm (2) via a tool changer (7); a wire (8) that spans a plurality of pulleys supported within the wire saw unit (3); and a workpiece cutting zone (20) that is established between the pulleys. The workpiece is cut to a prescribed shape by moving the robot arm (2) in a preset direction while running the wire (8) of the wire saw unit (3) and pressing the wire (8) against the supported workpiece.

A cylinder case includes a first main path communicating first port with an end surface, a second main path communicating a second port with the end surface, first and second front chamber paths respectively communicating a front chamber with the end surface, and first and second rear chamber paths respectively communicating a rear chamber with the end surface. A manifold block includes a first intermediate path communicating first and second manifold holes opened in an abutting surface with each other and a second intermediate path communicating third and fourth manifold holes opened in the abutting surface. The manifold block configured to be attached and fixed to the cylinder case such that the abutting surface is abutted against the end surface and a relative position of the abutting surface with respect to the end surface portion is capable of being selected from a first position and a second position.

A clamping apparatus includes: locking members (80) insertable into a hole (11) of a workpiece (10); and a clamp rod (70) configured to make a wedge engagement with the locking members (80) from above. Each locking member (80) includes a base portion (85) configured to be inserted into the hole (11); and a protruding portion (87) located above the base portion (85). A relative movement restriction mechanism (M) configured to restrict downward movement of the clamp rod (70) relative to the locking members (80) within a predetermined travel distance allows descent of outer peripheral surfaces (85a) of the base portions (85) relative to an inner peripheral surface of the hole (11) when the locking members (80) are in a diameter-expanded position.