B
PERFORMING OPERATIONS; TRANSPORTING
B
PERFORMING OPERATIONS; TRANSPORTING
B81
MICROSTRUCTURAL TECHNOLOGY
B81
MICROSTRUCTURAL TECHNOLOGY
B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
7/00
Microstructural systems;; Auxiliary parts of microstructural devices or systems
7/00
Microstructural systems;; Auxiliary parts of microstructural devices or systems
B81B7/0032
Packages or encapsulation
B81B7/0032
Packages or encapsulation
B81B7/0045
for reducing stress inside of the package structure
B81B7/0045
for reducing stress inside of the package structure