Proposed are a chilling unit, a heat treatment apparatus including same, and a heat treatment method. More particularly, proposed is a technology capable of rapidly and effectively lowering the temperature of a heating plate by bringing a heat exchange medium of a chilling unit into contact with the heating plate and then circulating a refrigerant after performing a heat treatment process of a substrate through a heat treatment apparatus.

A cooling assembly for a metallurgical furnace includes a cooling plate disposed inside of a furnace shell of the metallurgical furnace; a cooling pipe traversing a shell opening in the furnace shell and being connected to the cooling plate; and a compensator disposed around the cooling pipe for forming a seal between the cooling pipe and the furnace shell.

In order to provide ways for facilitating repair of a cooling system of the metallurgical furnace, the method includes at least the step of performing at least one cutting operation with a cutting device having a fixture and a cutting tool movably connected to the fixture for a guided movement with respect to the fixture. The fixture is mounted to the cooling pipe, whereby the cutting device is aligned with respect to the cooling pipe, and the cutting tool is guidedly moved while performing the cutting operation.

A plate cooler stave for use in a furnace having a shell wall, comprising: a top portion housing at least one cooling fluid inlet and at least one cooling fluid outlet for the flow of cooling fluid to and from the plate cooler stave from outside the furnace; and a main body disposed at an angle relative to the top portion so that the main body may be inserted into the furnace through an opening defined by the shell wall, wherein upon installation, at least a part of the top portion is disposed in the opening.

A plate cooler stave for use in a furnace having a shell wall, comprising: a top portion housing at least one cooling fluid inlet and at least one cooling fluid outlet for the flow of cooling fluid to and from the plate cooler stave from outside the furnace; and a main body disposed at an angle relative to the top portion so that the main body may be inserted into the furnace through an opening defined by the shell wall, wherein upon installation, at least a part of the top portion is disposed in the opening.

A cooling element for a melting furnace includes at least one cooling pipe for passing through a coolant, and a support element to which the at least one cooling pipe is fastened. At least one cove plate is welded to the at least one cooling pipe. The at least one cooling pipe has at least one bead which extends in the longitudinal direction of the at least one cooling pipe and to which the at least one cover plate is welded.

A cooling assembly for a metallurgical furnace includes a cooling plate disposed inside of a furnace shell of the metallurgical furnace; a cooling pipe traversing a shell opening in the furnace shell and being connected to the cooling plate; and a compensator disposed around the cooling pipe for forming a seal between the cooling pipe and the furnace shell. In order to provide ways for facilitating repair of a cooling system of the metallurgical furnace, the method includes at least the step of performing at least one cutting operation with a cutting device having a fixture and a cutting tool movably connected to the fixture for a guided movement with respect to the fixture. The fixture is mounted to the cooling pipe, whereby the cutting device is aligned with respect to the cooling pipe, and the cutting tool is guidedly moved while performing the cutting operation.

Proposed are a chilling unit, a heat treatment apparatus including same, and a heat treatment method. More particularly, proposed is a technology capable of rapidly and effectively lowering the temperature of a heating plate by bringing a heat exchange medium of a chilling unit into contact with the heating plate and then circulating a refrigerant after performing a heat treatment process of a substrate through a heat treatment apparatus.