The present invention is to provide a MEMS wave gyroscope with improved sensitivity. The MEMS wave gyroscope includes a base; an anchor structure fixed to the base; and a volatility structure suspended above the base. The volatility structure includes N horizontal beams and M straight beams for being interlaced to form M nodes. The horizontal beam is divided into M-1 first beam units by the nodes. The straight beam is divided into N-1 second beam units by the nodes. A first in-surface transducer is formed by the second beam unit coupled with a mechanical field and an electric field of the second beam unit on two opposite sides along the second axis. A first out-surface transducer is formed by at least one of two opposite sides of the second beam coupled with the mechanical field and electric field of the second beam unit.

The present invention is to provide a MEMS wave gyroscope with improved sensitivity. The MEMS wave gyroscope includes a base; an anchor structure fixed to the base; and a volatility structure suspended above the base. The volatility structure includes N horizontal beams and M straight beams for being interlaced to form M nodes. The horizontal beam is divided into M−1 first beam units by the nodes. The straight beam is divided into N−1 second beam units by the nodes. A first in-surface transducer is formed by the second beam unit coupled with a mechanical field and an electric field of the second beam unit on two opposite sides along the second axis. A first out-surface transducer is formed by at least one of two opposite sides of the second beam coupled with the mechanical field and electric field of the second beam unit.

The invention provides amides that inhibit cellular necrosis and/or human receptor interacting protein 1 kinase (RIP1), including corresponding sulfonamides, and pharmaceutically acceptable salts, hydrates and stereoisomers thereof. The compounds are employed in pharmaceutical compositions, and methods of making and use, including treating a person in need thereof with an effective amount of the compound or composition, and detecting a resultant improvement in the person's health or condition.

The invention provides amides that inhibit cellular necrosis and/or human receptor interacting protein 1 kinase (RIP1), including corresponding sulfonamides, and pharmaceutically acceptable salts, hydrates and stereoisomers thereof. The compounds are employed in pharmaceutical compositions, and methods of making and use, including treating a person in need thereof with an effective amount of the compound or composition, and detecting a resultant improvement in the person's health or condition.

A gyroscopic sensor unit detects a phase drift between a demodulated output signal and demodulation signal during output of a quadrature test signal. A delay calculator detects the phase drift based on changes in the demodulated output signal during application of the quadrature test signal. A delay compensation circuit compensates for the phase drift by delaying the demodulation signal by the phase drift value.

An algorithm and architecture for sense transfer function estimation injects one or more test signals from a signal generator into a MEMS gyroscope to detect an output signal (e.g., proof mass output sense signal), including an in-phase (e.g., Coriolis) component and a quadrature component. The in-phase and quadrature components are encoded with reference signals to determine phase and/or gain variation and are processed via a variety of components (e.g., matrix rotation, digital gain, tones demodulator, transfer function errors estimation, etc.) to estimate a sense transfer function of the MEMS (e.g., H.sub.s(f.sub.d)) and corresponding phase and/or gain offset of H.sub.s(f.sub.d). The in-phase and quadrature components are also compensated for phase and/or gain offset by system components.

An algorithm and architecture for sense transfer function estimation injects one or more test signals from a signal generator into a MEMS gyroscope to detect an output signal (e.g., proof mass output sense signal), including an in-phase (e.g., Coriolis) component and a quadrature component. The in-phase and quadrature components are encoded with reference signals to determine phase and/or gain variation and are processed via a variety of components (e.g., matrix rotation, digital gain, tones demodulator, transfer function errors estimation, etc.) to estimate a sense transfer function of the MEMS (e.g., H.sub.s(f.sub.d)) and corresponding phase and/or gain offset of H.sub.s(f.sub.d). The in-phase and quadrature components are also compensated for phase and/or gain offset by system components.

A physical quantity detection circuit includes a signal conversion circuit configured to output a first differential signal based on an output signal of a physical quantity detection element, an active filter to which a second differential signal based on the first differential signal is input, and an analog/digital conversion circuit configured to sample a third differential signal based on an output signal of the active filter to convert the third differential signal into a digital signal, wherein the active filter includes an operational amplifier, a first chopping circuit disposed in a signal path between the signal conversion circuit and the operational amplifier, and a second chopping circuit disposed in a signal path between the operational amplifier and the analog/digital conversion circuit, and fch<fs/2, the sampling frequency is fs, and the chopping frequency is fch.

A physical quantity detection circuit includes a signal conversion circuit configured to output a first differential signal based on an output signal of a physical quantity detection element, an active filter to which a second differential signal based on the first differential signal is input, and an analog/digital conversion circuit configured to sample a third differential signal based on an output signal of the active filter to convert the third differential signal into a digital signal, wherein the active filter includes an operational amplifier, a first chopping circuit disposed in a signal path between the signal conversion circuit and the operational amplifier, and a second chopping circuit disposed in a signal path between the operational amplifier and the analog/digital conversion circuit, and fch<fs/2, the sampling frequency is fs, and the chopping frequency is fch.

An angular velocity sensor includes a substrate, a detector including a movable detection electrode and a fixed detection electrode opposed to the movable detection electrode, and a driver adapted to drive the detector. The movable detection electrode is supported by a first spring that is elongated parallel to a Y axis from a first turned-back part, and a second spring that is elongated parallel to the Y axis from a second turned-back part. The first and second springs are fixed at first and second anchors. The first turned-back part is closer to the second spring than the first anchor. The detector includes a first surface opposed to the first spring, and a second surface disposed closer to the first spring than the first surface.