The present invention is to provide a MEMS wave gyroscope with improved sensitivity. The MEMS wave gyroscope includes a base; an anchor structure fixed to the base; and a volatility structure suspended above the base. The volatility structure includes N horizontal beams and M straight beams for being interlaced to form M nodes. The horizontal beam is divided into M-1 first beam units by the nodes. The straight beam is divided into N-1 second beam units by the nodes. A first in-surface transducer is formed by the second beam unit coupled with a mechanical field and an electric field of the second beam unit on two opposite sides along the second axis. A first out-surface transducer is formed by at least one of two opposite sides of the second beam coupled with the mechanical field and electric field of the second beam unit.

The present invention is to provide a MEMS wave gyroscope with improved sensitivity. The MEMS wave gyroscope includes a base; an anchor structure fixed to the base; and a volatility structure suspended above the base. The volatility structure includes N horizontal beams and M straight beams for being interlaced to form M nodes. The horizontal beam is divided into M−1 first beam units by the nodes. The straight beam is divided into N−1 second beam units by the nodes. A first in-surface transducer is formed by the second beam unit coupled with a mechanical field and an electric field of the second beam unit on two opposite sides along the second axis. A first out-surface transducer is formed by at least one of two opposite sides of the second beam coupled with the mechanical field and electric field of the second beam unit.

The present invention provides a gyroscope structure. A frame disposed on a substrate, and a flexible element is correspondingly disposed a first, second, and third plate. The first plate has a second flexibility. The second plate is connected to the second plate, the second plate is connected to the third plate with a fourth flexible element, the second plate is provided with a first through-hole, and a rotating plate is pivotally connected in the first through-hole. The rotating plate is connected to a supporting column of the substrate by a fifth flexible part, and then a sensing element is provided on the substrate corresponding to the first, second, and third plates to sense the movement and movement of the plates. Rotating, in one embodiment, the first and third plates are provided with through-holes, and corresponding sensing elements and driving elements are provided.

The present invention provides a gyroscope structure. A frame disposed on a substrate, and a flexible element is correspondingly disposed a first, second, and third plate. The first plate has a second flexibility. The second plate is connected to the second plate, the second plate is connected to the third plate with a fourth flexible element, the second plate is provided with a first through-hole, and a rotating plate is pivotally connected in the first through-hole. The rotating plate is connected to a supporting column of the substrate by a fifth flexible part, and then a sensing element is provided on the substrate corresponding to the first, second, and third plates to sense the movement and movement of the plates. Rotating, in one embodiment, the first and third plates are provided with through-holes, and corresponding sensing elements and driving elements are provided.

A vibrator device includes a vibrating body having a first surface, a package having a second surface opposed to the first surface of the vibrating body, a circuit board provided to the package so as to be opposed to the first surface of the vibrating body, a plurality of coupling electrodes provided to the first surface of the vibrating body, a first coupling line provided to the second surface of the package, a second coupling line provided to the circuit board, and a bonding material electrically coupling the coupling electrode and the first coupling line to each other, wherein the vibrating body has a protrusion protruding toward the package farther than the coupling electrode at the first surface side, and the protrusion has contact with the second surface of the package.

Provided is a vibrometer capable of detecting vibration of a vibrator having a placement surface and vibrating horizontally in a predetermined direction. The vibrometer includes a revolving body and a gyroscope sensor. The revolving body has an outer surface including a curved surface that is curved outward when viewed in a direction along a predetermined axis. The revolving body is capable of rolling in the predetermined direction on the placement surface in such a manner that the curved surface comes into contact with the placement surface, with the predetermined axis forming an angle with the predetermined direction. The gyroscope sensor is fixed to the revolving body and is capable of determining the angular velocity around the predetermined axis. When viewed in the direction along the predetermined axis, the curved surface is shaped such that a portion of the curved surface at a greater distance along the curved surface from a reference portion within the curved surface is farther from the center of gravity of an assembly including the revolving body and members that roll together with the revolving body.

Provided is a vibrometer capable of detecting vibration of a vibrator having a placement surface and vibrating horizontally in a predetermined direction. The vibrometer includes a revolving body and a gyroscope sensor. The revolving body has an outer surface including a curved surface that is curved outward when viewed in a direction along a predetermined axis. The revolving body is capable of rolling in the predetermined direction on the placement surface in such a manner that the curved surface comes into contact with the placement surface, with the predetermined axis forming an angle with the predetermined direction. The gyroscope sensor is fixed to the revolving body and is capable of determining the angular velocity around the predetermined axis. When viewed in the direction along the predetermined axis, the curved surface is shaped such that a portion of the curved surface at a greater distance along the curved surface from a reference portion within the curved surface is farther from the center of gravity of an assembly including the revolving body and members that roll together with the revolving body.

The present disclosure relates to an inertia measurement module for an unmanned aircraft, which comprises a housing assembly, a sensing assembly and a vibration damper. The vibration damper comprises a first vibration-attenuation cushion; and the sensing assembly comprises a first circuit board, a second circuit board and a flexible signal line for connecting the first circuit board and the second circuit board. An inertia sensor is fixed on the second circuit board, and the first circuit board is fixed on the housing assembly. The inertia measurement module further comprises a weight block, and the second circuit board, the weight block, the first vibration-attenuation cushion and the first circuit board are bonded together. The present disclosure greatly reduces the influence of the operational vibration frequency of the unmanned aircraft on the inertia sensor and improves the measurement stability of the inertia sensor.

The present disclosure relates to an inertia measurement module for an unmanned aircraft, which comprises a housing assembly, a sensing assembly and a vibration damper. The vibration damper comprises a first vibration-attenuation cushion; and the sensing assembly comprises a first circuit board, a second circuit board and a flexible signal line for connecting the first circuit board and the second circuit board. An inertia sensor is fixed on the second circuit board, and the first circuit board is fixed on the housing assembly. The inertia measurement module further comprises a weight block, and the second circuit board, the weight block, the first vibration-attenuation cushion and the first circuit board are bonded together. The present disclosure greatly reduces the influence of the operational vibration frequency of the unmanned aircraft on the inertia sensor and improves the measurement stability of the inertia sensor.

A vibrator device includes a vibrator element, and a support substrate disposed so as to be opposed to the vibrator element. The support substrate includes a base configured to support the vibrator element, a support configured to support the base, a plurality of beams configured to couple the base and the support to each other, and a drive signal interconnection, a drive constant-potential interconnection, a detection signal interconnection, and a detection constant-potential interconnection each laid around the base and the support passing the beams, and in predetermined one of the beams, at least one of the drive constant-potential interconnection and the detection constant-potential interconnection is disposed on a surface on the vibrator element side, and the detection signal interconnection is disposed on a surface on the opposite side.