A semi-finished product for the realization of a gyroscope, including: a single package and a single substrate on which it is attached; a super luminescent diode with a polarized light source; a PIC in which a waveguide group is made of an optical coupling device arranged for coupling the light source with the PIC; wherein on the PIC at least one photodiode is formed or hybridized in order to receive a return light beam from the PIC.

Disclosed is an improved Sagnac interferometer sensor for inertial navigation and guidance systems (e.g., inertial measurement units (IMUs)) that affords a reduced area architecture. The sensor implements optical folding architectures and techniques to increase the optical path length of the Sagnac interferometer. The folding optical architecture increases the total optical path, which thereby increases the total phase difference between two counter-rotating optical beams in the Sagnac interferometer. The technique increases accuracy and durability of IMUs without the need for an increase in size, weight, and cost.

The low magnetic sensitivity PM-PCF based on mechanical buffer is obtained by adding buffer structures in the cladding layer of the photonic crystal fiber. In the center of the fiber, the core region contains at least 3 layers of air-holes, enclosed by the cladding layer. The buffer structures are placed in the cladding layer. These buffer structures are formed by replacing silica of any shape by air, and are symmetrically located in X-axis and Y-axis directions to achieve mechanical isotropy. The buffer structures improve the fiber's performance in fiber coiling and stress conditions. Therefore, the fiber optic gyroscope using the PM-PCF can do without a magnetic shield, thus greatly reducing the weight of the fiber optic gyroscope and extending the scope of its application. Compared with the conventional commercial PCF, the PM-PCF provides the fiber optic gyroscope with lower temperature sensitivity and improved accuracy.

Aspects of the present disclosure are directed to configurations of compact ultra-low loss integrated photonics-based waveguides for optical gyroscope applications, and the methods of fabricating those waveguides for ease of large scale manufacturing. Four main process flows are described: (1) process flow based on a repeated sequence of oxide deposition and anneal; (2) chemical-mechanical polishing (CMP)-based process flow followed by wafer bonding; (3) Damascene process flow followed by oxide deposition and anneal, or wafer bonding; and (4) CMP-based process flows followed by oxide deposition. Any combination of these process flows may be adopted to meet the end goal of fabricating optical gyroscope waveguides in one or more layers on a silicon substrate using standard silicon fabrication technologies.

A white light interferometric fiber-optic gyroscope based on a rhombic optical path difference bias structure includes a laser, a rhombic optical path difference bias structure, a fiber coil and a photodetector. The white light interferometric fiber-optic gyroscope adopts an all-fiber structure to simplify the complexity of a gyroscope system and reduce the overall cost. A white light interferometric demodulation algorithm is used to realize linear output of rotation rate signals.

A white light interferometric fiber-optic gyroscope based on a rhombic optical path difference bias structure includes a laser, a rhombic optical path difference bias structure, a fiber coil and a photodetector. The white light interferometric fiber-optic gyroscope adopts an all-fiber structure to simplify the complexity of a gyroscope system and reduce the overall cost. A white light interferometric demodulation algorithm is used to realize linear output of rotation rate signals.

Aspects of the present disclosure are directed to process flow to fabricate a waveguide structure with a silicon nitride core having atomic-level smooth sidewalls achieved by wet etching instead of the conventional dry etching process. A mask is pre-biased to account for lateral etching during the wet-etching steps.

A Y-branch dual electro-optical phase modulator (YBDPM) has a stitched-in zinc oxide diffused waveguide. It is more vacuum stable and has higher resistance to photorefractive damage than currently used Ti-diffused waveguides. The YBDPM is useful in Fiber Optic Gyroscopes (FOG), especially in low frequencies applications.

Aspects of the present disclosure are directed to structural modifications introduced in a waveguide structure in order to more tightly pack adjacent waveguide turns in an optical gyroscope fabricated on a planar silicon platform as a photonic integrated circuit. Increasing number of turns of the gyroscope coil increases total waveguide length as well as enclosed area of the gyroscope loop, which translates to increased sensitivity to rotational measurement.

Embodiments of the present disclosure are directed towards a micro-electromechanical system (MEMS) sensing apparatus, including a laser arrangement configured to generate a light beam, a first waveguide configured to receive and output the light beam, and a second waveguide aligned endface to endface with the first waveguide. The second waveguide may be configured to receive at least a portion of the light beam from the first waveguide via optical coupling through the aligned endfaces. Either the first or second waveguide may be configured to be moveable in response to an inertial change of the apparatus, wherein movement of the first or second waveguide causes a corresponding change in light intensity of the portion of the light beam, the change in light intensity indicating a measure of the inertial change. Other embodiments may be described and/or claimed.