Patent classifications
G
PHYSICS
Load children
G01
MEASURING; TESTING
Load children
G01K
MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
Load children
G01K17/06
Measuring quantity of heat conveyed by flowing media, e.g. in heating systems; e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
Load children Filter patents View analytics View as hierarchy Open in page
G01K17/08
based upon measurement of temperature difference; or of a temperature
Load children Filter patents View analytics View as hierarchy Open in page
G01K17/10
between an inlet and an outlet point, combined with measurement of rate of flow of the medium; if such, by integration during a certain time-interval
Load children Filter patents View analytics View as hierarchy Open in page
G01K17/12
Indicating product of flow and temperature difference directly; or temperature
Load children Filter patents View analytics View as hierarchy Open in page
G01K17/18
using electrical; or magnetic; means for one measurement and mechanical means for the other
Load children Filter patents View analytics View as hierarchy Open in page
G01K17/185
where the indicating-instrument is driven electrically or magnetically by the temperature-measurement device and mechanically by the flow-measurement device
Filter patents View analytics View as hierarchy Open in page

G01K17/185

METHOD FOR CONTROLLING A FLUX DISTRIBUTION OF EVAPORATED SOURCE MATERIAL, DETECTOR FOR MEASURING ELECTROMAGNETIC RADIATION REFLECTED ON A SOURCE SURFACE AND SYSTEM FOR THERMAL EVAPORATION WITH ELECTROMAGNETIC RADIATION
20230287556 · 2023-09-14 ·

The present invention relates to a method for controlling a flux distribution (30) of evaporated source material (20) in a system (10) for thermal evaporation with electromagnetic radiation (120), wherein the system (10) comprises an electromagnetic radiation source (110) for providing an electromagnetic radiation (120), a vacuum chamber (12) containing a reaction atmosphere (16) and a detector (40) for measuring electromagnetic radiation (120), wherein a source material (20) and a target material (18) to be coated are arranged in the vacuum chamber (12) and the radiation source is arranged such that its electromagnetic radiation (120) impinges at an angle, preferably at an angle of 45°, on a source surface (22) of the source material (20) for a thermal evaporation and/or sublimation of the source material (20) below the plasma threshold, and wherein the detector (40) for measuring electromagnetic radiation (120) is arranged such that electromagnetic radiation (120) reflected on the source surface (22) reaches the detector (40). Further, the present invention relates to a detector (40) for measuring electromagnetic radiation (120), the detector (40) preferably suitable for a method according to the present invention, and additionally to a system (10) for thermal evaporation with electromagnetic radiation (120) suitable for the method according to the present invention.