A pressure sensor for determining a pressure measurement variable includes a housing, a pressure sensor element arranged in the housing, a lighting means arranged in the housing and a control/evaluation unit, the pressure sensor element having a semiconductor material and a measuring membrane, which has at least one integrated resistance element. When the measuring membrane experiences a pressure dependent deflection, the control/evaluation unit ascertains using the integrated resistance element, an electrical signal for determining the pressure measurement variable, wherein the lighting means optically excites the integrated resistance element, and the control/evaluation unit ascertains, based on a change of the electrical signal caused by the optical excitation, whether a malfunction of the pressure sensor is present.

Pressure sensor comprising a housing, a pressure sensor element arranged in the housing, a lighting means arranged in the housing, and a control/evaluation unit, wherein the pressure sensor element has a semiconductor material and a measuring membrane, wherein a first pressure is supplied to a first side of the measuring membrane and a second pressure to a second side of the measuring membrane, and the measuring membrane experiences a pressure-dependent deflection, wherein the lighting means provides an optical excitation of the pressure sensor element and the control/evaluation unit, based on a change of the electrical signal caused by the optical excitation, ascertains a static pressure value present in the first and/or second pressure and performs a correcting, or compensating, of the pressure measurement variable with the assistance of the static pressure value.

A pressure sensor for determining a pressure measurement variable includes a housing, a pressure sensor element arranged in the housing, a lighting means arranged in the housing and a control/evaluation unit, the pressure sensor element having a semiconductor material and a measuring membrane, which has at least one integrated resistance element. When the measuring membrane experiences a pressure dependent deflection, the control/evaluation unit ascertains using the integrated resistance element, an electrical signal for determining the pressure measurement variable, wherein the lighting means optically excites the integrated resistance element, and the control/evaluation unit ascertains, based on a change of the electrical signal caused by the optical excitation, whether a malfunction of the pressure sensor is present.

A resonator device 10 is disclosed. The resonator device may be used in a transducer or a sensor such as a pressure, force or acceleration sensor. The resonator device comprises a resonator 20 provided on a diaphragm 30. A cap 40 is provided which may be fusion bonded to the diaphragm 30 to enclose the resonator 20 and form a hermetically sealed package 10. The resonator device is excited by applying electromagnetic stimulation, such as infra-red or optical stimulation, which may be from a laser via a fiber 50. The resonator device may be interrogated by applying an electromagnetic signal into the optical cavity formed between the resonator 20 and the inside surface of the cap 40 to derive a frequency change of the resonator. As the resonator device incorporates a hermetically sealed package and is stimulated by electromagnetic radiation, it is robust and able to operate in harsh environments.