G01L9/065

Sensor drive circuit with improved temperature characteristic compensation
11525751 · 2022-12-13 · ·

A sensor drive circuit for driving a sensor with a current includes at least one circuit configured to generate a drive current for the sensor, the drive current having a reverse temperature characteristic with respect to a temperature characteristic of an output voltage of the sensor. A temperature characteristic of sensor sensitivity has a negative first order coefficient and a positive second order coefficient. The sensor drive circuit includes a first current source configured to generate a first current having a temperature characteristic of which a first order coefficient is positive. The sensor drive circuit includes a second current source configured to generate a second current having a temperature characteristic of which a first order coefficient is negative. The sensor drive circuit includes a first current calculator configured to add the first current and the second current to generate a third current.

Pressure Sensor with a Compensation Unit and Method for Compensation
20220373420 · 2022-11-24 ·

The invention relates to a pressure sensor and related method for the compensation of a pressure, wherein the pressure sensor has a pressure measuring cell, with a housing and an electronic sensor system and an electronic evaluation system disposed within the housing, as well as at least one first temperature sensor for measuring a first temperature and a second temperature sensor for measuring a second temperature, wherein the pressure sensor has a compensation unit connected to the at least two temperature sensors, and wherein the compensation unit determines a compensation for the pressure taking into account at least the first temperature and the second temperature.

Verification of correct operation of a physical parameter sensor
11630015 · 2023-04-18 · ·

Apparatus and associated methods relate to sensing a physical parameter and verifying correct operation of a system used to sense the physical parameter. A sensing device includes four resistive elements configured in a Wheatstone bridge configuration is configured to sense the physical parameter. A biasing network selectively provides first and second biasing conditions to the sensing device. First and second output electrical signals are generated by the sensing device in response to the first and second biasing conditions, respectively, selectively provided to the sensing device. The first and second output electrical signals are each indicative of the parameter value of the physical parameter, but not necessarily equal to one another. A verification module verifies correct operation of the system based on a consistency determination of first and second output electrical signals.

Pressure measuring apparatus for measuring a discharge pressure of a liquid discharged onto a wafer

A pressure measuring apparatus for measuring a jetting pressure of a liquid jetted from a nozzle includes a plate including: a first surface facing the nozzle; and a second surface opposite to the first surface; a pressure sensor configured to detect a discharge position and the discharge pressure at the discharge position of the liquid and generate a signal based on the discharge pressure; and electrical components including a controller configured to receive the signal and collect data regarding the discharge pressure. The pressure sensor is provided on the first surface of the plate and the electrical components are provided on the second surface of the plate.

PRESSURE SENSOR WITH TRIM RESISTORS
20230160767 · 2023-05-25 ·

A pressure sensor includes a Wheatstone bridge circuit including a first resistor, a second resistor, a third resistor, and a fourth resistor having matching output characteristics. The pressure sensor further includes a first trim resistor in series with the Wheatstone bridge circuit, wherein the first trim resistor has output characteristics matching the output characteristics of the first resistor, the second resistor, the third resistor, and the fourth resistor of the Wheatstone bridge. The pressure sensor additionally includes a second trim resistor in parallel or a parallel loop with the Wheatstone bridge circuit, wherein the second trim resistor has output characteristics matching the output characteristics of the first resistor, the second resistor, the third resistor, and the fourth resistor of the Wheatstone bridge.

Pressure sensor having strain gauges disposed on a diaphragm

An object of the present invention is to realize a pressure sensor with a small variation in sensor characteristics. The pressure sensor includes a diaphragm having longitudinal and lateral sides, and four strain gauges disposed on the diaphragm. The four strain gauges are arranged at a center of the diaphragm. Two of the four strain gauges are arranged along a lateral direction, and other two strain gauges are arranged along a longitudinal direction.

SYSTEMS AND METHODS FOR SWITCHED MULTI-TRANSDUCER PRESSURE SENSORS AND COMPENSATION THEREOF
20170343443 · 2017-11-30 ·

Systems and methods are disclosed for a switched, multiple range sensor system including multiple transducers. In one embodiment, a method is provided that includes receiving and measuring at a first transducer and a second transducer, a pressure to generate a respective first and second pressure signal; amplifying the first and second pressure signals with corresponding first and second fixed-gain amplifier to generate first and second amplified pressure signals; selecting for monitoring, the first or second amplified pressure signal; converting the selected amplified pressure signal to an intermediate digital pressure signal; measuring, at a thermal sensor associated with the selected amplified pressure signal, a temperature; compensating, based on the measured temperature, the intermediate digital pressure signal to generate a compensated digital pressure output signal; and outputting the compensated digital pressure output signal.

Touch input detection using a piezoresistive sensor

A system is for detecting a location of a touch input on a surface of a propagating medium. The system includes a transmitter coupled to the propagating medium and configured to emit a signal. The signal has been allowed to propagate through the propagating medium and the location of the touch input on the surface of the propagating medium is detected at least in part by detecting an effect of the touch input on the signal that has been allowed to propagate through the propagating medium. The system includes a piezoresistive sensor coupled to the propagating medium. The piezoresistive sensor is configured to at least detect a force, pressure, or applied strain of the touch input on the propagating medium.

Systems and methods for extending frequency response of resonant transducers

Certain implementations of the disclosed technology may include systems and methods for extending a frequency response of a transducer. A method is provided that can include receiving a measurement signal from a transducer, wherein the measurement signal includes distortion due to a resonant frequency of the transducer. The method includes applying a complementary filter to the measurement signal to produce a compensated signal, wherein applying the complementary filter reduces the distortion to less than about +/−1 dB for frequencies ranging from about zero to about 60% or greater of the resonant frequency. The method further includes outputting the compensated signal.

Sensor signal detection device
09784632 · 2017-10-10 · ·

Sensor signal detection device includes: a sensor element; a temperature detection element connected in series with the sensor element; a constant voltage power supply applying constant voltage to a series circuit of the temperature detection element and the sensor element; a short-circuit switch short-circuiting both terminals of the temperature detection element; and a controller controlling a changeover between a sensor detection state and a temperature detection state. In the sensor detection state, a sensor signal from the sensor element is obtained by turning on the short-circuit switch to apply the constant voltage across both terminals of the sensor element from the constant voltage power supply. In the temperature detection state, a temperature detection signal of the temperature detection element is obtained by turning off the short-circuit switch to connect the temperature detection element to the sensor element in series and applying constant voltage from the constant voltage power supply.