G01N2021/4704

SYSTEMS AND METHODS FOR ENDOSCOPIC ANGLE-RESOLVED LOW COHERENCE INTERFEROMETRY
20180008147 · 2018-01-11 ·

A method of assessing tissue health comprises the steps of obtaining depth-resolved spectra of a selected area of in vivo tissue, and assessing the health of the selected area based on the depth-resolved structural information of the scatterers. Obtaining depth-resolved spectra of the selected area comprises directing a sample beam towards the selected area at an angle, and receiving an angle-resolved scattered sample beam. The angle-resolved scattered sample beam is cross-correlated with the reference beam to produce an angle-resolved cross-correlated signal about the selected area, which is spectrally dispersed to yield an angle-resolved, spectrally-resolved cross-correlation profile having depth-resolved information about the selected area. The angle-resolved, spectrally-resolved cross-correlation profile is processed to obtain depth-resolved information about scatterers in the selected area.

PLATELET CONCENTRATE CONTROL
20230016478 · 2023-01-19 ·

An apparatus (1) for determining quality of a platelet concentrate (PC) (15) in a PC bag (10) comprises a movable bag holder (2) to carry the PC bag (10), a light system (20) with a light source (21, 24) to direct light (22) into the platelet concentrate (15) in the PC bag (10) for a measurement interval, and a detector system (30) with a light detector (31, 32) configured to detect light (23) from the platelet concentrate 15 during the measurement interval and generate a real-time detection signal. The apparatus (1) also comprises a controller (40) configured to determine platelet swirling based on the real-time detection signal and determine a quality parameter for the platelet concentrate (15) in the PC bag (10) based on the platelet swirling.

DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
20220357285 · 2022-11-10 ·

The invention provides a defect inspection apparatus. The defect inspection apparatus includes: an illumination optical system configured to irradiate a sample with an illumination spot; a detection unit configured to detect, from a plurality of directions, reflected light from the sample irradiated with the illumination spot of the illumination optical system; a control unit configured to control a scan of the sample with the illumination spot of the illumination optical system by overlapping detection regions such that the detection regions partially overlap, the detection regions being detected by the detection unit configured to execute a detection from the plurality of directions when the sample is scanned with the illumination spot of the illumination optical system; and a signal processing unit configured to process a signal obtained by detecting the reflected light from the sample by the detection unit to detect a defect. The signal processing unit includes: a data integration unit configured to synthesize an integrated signal by processing the signal detected a plurality of times by overlapping the reflected light of the sample for each detection region by the detection unit; and a defect detection unit configured to detect the defect on a surface of the sample based on the integrated signal synthesized by the data integration unit.

Method and Apparatus for Determining the Property of a Structure, Device Manufacturing Method

A structure of interest (T) is irradiated with radiation for example in the x-ray or EUV waveband, and scattered radiation is detected by a detector (19, 274, 908, 1012). A processor (PU) calculates a property such as linewidth (CD) or overlay (OV), for example by simulating (S16) interaction of radiation with a structure and comparing (S17) the simulated interaction with the detected radiation. The method is modified (S14a, S15a, S19a) to take account of changes in the structure which are caused by the inspection radiation. These changes may be for example shrinkage of the material, or changes in its optical characteristics. The changes may be caused by inspection radiation in the current observation or in a previous observation.

RAPID AND NON-DESTRUCTIVE DETECTION OF INFECTION
20170315108 · 2017-11-02 ·

The invention relates to methods and devices to identify an infection via light scatter from a tissue surface.

Comparing gemstone signatures using angular spectrum information

A system comprises a faceted structure imaging assembly and a faceted structure image analyzer. Signature information of the gemstone is obtained and compared to stored signature information. The signature information includes angular spectrum information generated by the imaging assembly while a colored light pattern is reflected onto the gemstone. The signature information uniquely identifies the gemstone and indicates whether an entity was the source of the gemstone. The signature information comparison involves comparing an angular spectrum image obtained by the imaging assembly to stored angular spectrum images. In one example, the system compares the obtained signature information to stored signature information to validate a source of the gemstone. In another example, the system obtains signature information of the gemstone and forwards the signature information to a remote validation system. The remote validation system compares the signature information to stored signature information and forwards a validation result to the system.

SYSTEM AND METHOD FOR SEPARATING VOLUMETRIC AND SURFACE SCATTERING OF OPTICAL COMPONENT
20230296510 · 2023-09-21 ·

A system includes a light source configured to emit a probing beam to illuminate an optical element, and a rotating structure to which the optical element is mounted. The system also includes a controller configured to control the rotating structure to rotate to change a tilt angle of the optical element with respect to a propagation direction of the probing beam. The system also includes an image sensor configured to receive one or more scattered beams output from the optical element illuminated by the probing beam, and generate a plurality of sets of speckle pattern image data when the optical element is arranged at a plurality of tilt angles within a predetermined tilting range. The controller is configured to process the plurality of sets of speckle pattern image data to determine respective weights of volumetric scattering and surface scattering in an overall scattering of the optical element.

DARK-FIELD OPTICAL INSPECTING DEVICE
20210349037 · 2021-11-11 ·

A device for dark-field optical inspection of a substrate comprises: a light source for generating an incident beam that is projected onto an inspection zone of the substrate and that is capable of being reflected in the form of diffuse radiation; at least one first and one second collecting device; and a reflecting device for directing at least a portion of the diffuse radiation originating from a focal point of collection coincident with the inspection zone in the direction of the collecting devices, with a first and second reflective zone from which a first portion of the diffuse radiation is directed toward a first focal point, which is optically conjugated with the focal point of collection, and a second portion of the diffuse radiation is reflected toward a second focal point, which is optically conjugated with the collection focal point and distinct from the first focal point of detection.

Optical inspection apparatus

According to one embodiment, an optical inspection apparatus includes a first illuminator, an image-forming optical system, a scattering light selector, and an imaging element. The first illuminator is configured to emit a first light beam. The first light beam reflected by an object is incident on the image-forming optical system. The scattering light selector is configured to emit passing light beams of at least two mutually different wavelength regions, at the same time as the first light beam passes, a wavelength spectrum of at least one of the passing light beams being different from a wavelength spectrum of the reflected first light beam. The passing light beams simultaneously form an image on the imaging element.

High-brightness illumination source for optical metrology

An illumination source may include two or more input light sources, a collector, and any combination of a beam uniformizer, a speckle reducer, or any number of output fibers to provide a selected illumination etendue. The collector may include one or more lenses to combine illumination from the two or more input light sources into an illumination beam, where the illumination from the two or more input light sources occupy different portions of an input aperture of the collector. The beam uniformizer may include a first noncircular-core fiber to receive the illumination beam, a second noncircular-core fiber, and one or more coupling lenses to relay a far-field distribution of the illumination beam from the first noncircular-core fiber to an input face of the second noncircular-core fiber to provide output light with uniform near-field and far-field distributions.