In order to quantitatively characterize biological objects, for example individual cells, a stimulus is applied to a biological object (8) in a contactless fashion. A measurement and a further measurement are performed on the biological object (8) in order to ascertain a response of the biological object (8) to the stimulus, wherein the measurement and the further measurement comprise detecting Raman scattering on and/or in the biological object (8) and/or capturing data using digital holographic microinterferometry (DHMI). The biological object (8) is characterized according to a result of the measurement and is sorted if needed. The stimulus can be applied by means of a laser beam that creates optical tweezers or an optical trap, by means of ultrasonic waves or an electric or magnetic radio frequency field.

An optical coherence tomography (OCT) apparatus includes a light source unit to generate light, a coupler unit to generate coupled light using reference light and measurement light generated by splitting the light, split the coupled light into n coupled and split lights and irradiate the n coupled and split lights, wherein n is a natural number greater than or equal to 2, a detection unit to irradiate the incident n coupled and split lights to n spectroscopes respectively and sequentially scan each light separated from each of the spectroscopes by wavelength range, and an image generation unit to generate a 2-dimensional single image using a result of the scanning by the detection unit. Accordingly, it is possible to improve the OCT image acquisition rate by distributing the scan time for a plurality of split lights using a plurality of array detectors.

An optical coherence tomography (OCT) apparatus includes a light source unit to generate light, a coupler unit to generate coupled light using reference light and measurement light generated by splitting the light, split the coupled light into n coupled and split lights and irradiate the n coupled and split lights, wherein n is a natural number greater than or equal to 2, a detection unit to irradiate the incident n coupled and split lights to n spectroscopes respectively and sequentially scan each light separated from each of the spectroscopes by wavelength range, and an image generation unit to generate a 2-dimensional single image using a result of the scanning by the detection unit. Accordingly, it is possible to improve the OCT image acquisition rate by distributing the scan time for a plurality of split lights using a plurality of array detectors.

The present disclosure relates to an apparatus and a method for a thickness and a profile of a multilayer thin film using a vibration insensitive interference method are provided, which allow measuring the phase of a measurement object by acquiring a plurality of different phase-shifted interference signal images at a time through interference signals between a reference flat and the measurement object by a polarizing beam splitter, a quarter-wave plate, a shutter and a pixelated polarizing camera, and which also allow measuring reflectance of the measurement object by acquiring a plurality of reflected signal images obtained at a time through respective reflected lights for each of a reference surface and the measurement object by a plurality of different polarizers.

The present disclosure relates to an apparatus and a method for a thickness and a profile of a multilayer thin film using a vibration insensitive interference method are provided, which allow measuring the phase of a measurement object by acquiring a plurality of different phase-shifted interference signal images at a time through interference signals between a reference flat and the measurement object by a polarizing beam splitter, a quarter-wave plate, a shutter and a pixelated polarizing camera, and which also allow measuring reflectance of the measurement object by acquiring a plurality of reflected signal images obtained at a time through respective reflected lights for each of a reference surface and the measurement object by a plurality of different polarizers.

Measurement cavities described herein include a cylindrical chamber having a first open end and a second open end; a first cap covering the first open end of the cylindrical chamber and a second cap covering the second open end of the cylindrical chamber, wherein the first and second caps hermetically seal the cylindrical chamber and wherein the first cap is rigidly coupled to the second cap; and a wafer holder positioned within and coupled to the cylindrical chamber. The measurement cavity has a mass m, a stiffness k, and a damping constant c configured such that the transmissibility $.Math.\frac{x}{F}.Math.$
of an input force at 60 Hz in the measurement cavity is reduced by a factor of at least 10 and the measurement cavity has a natural frequency of greater than 300 Hz.

Measurement cavities described herein include a cylindrical chamber having a first open end and a second open end; a first cap covering the first open end of the cylindrical chamber and a second cap covering the second open end of the cylindrical chamber, wherein the first and second caps hermetically seal the cylindrical chamber and wherein the first cap is rigidly coupled to the second cap; and a wafer holder positioned within and coupled to the cylindrical chamber. The measurement cavity has a mass m, a stiffness k, and a damping constant c configured such that the transmissibility $.Math.\frac{x}{F}.Math.$
of an input force at 60 Hz in the measurement cavity is reduced by a factor of at least 10 and the measurement cavity has a natural frequency of greater than 300 Hz.

Irradiation light in a visible light region is irradiated to a sample while switching irradiation of infrared light IR having a wavelength that corresponds to the infrared absorption spectrum of an observation target material included in the sample between a first state and a second state. A first image and a second image are generated based on the phase distribution, the intensity distribution, and the polarization direction distribution of the light including the irradiation light that has passed through the sample in synchronization with the switching of the infrared light IR irradiation between the first state and the second state. Subsequently, an output image is generated so as to represent one from among the position, size, and shape based on the difference and/or ratio with respect to the pixel values for each pixel between the first image and the second image.

The present invention addresses to a multidirectional dynamic phase shifting interferometry (DPSI) shearography and interferometry sensor. The present invention uses a configuration with three fixed prisms, or a single fixed three-facet optical prism constructed so as to achieve the same effect as three prisms and thus simultaneously obtain three images with phase shifting. The present invention also encompasses a method of inspection and measurement of vibration modes using said sensor.

The present invention addresses to a multidirectional dynamic phase shifting interferometry (DPSI) shearography and interferometry sensor. The present invention uses a configuration with three fixed prisms, or a single fixed three-facet optical prism constructed so as to achieve the same effect as three prisms and thus simultaneously obtain three images with phase shifting. The present invention also encompasses a method of inspection and measurement of vibration modes using said sensor.