A device may obtain a master beta coefficient of a master calibration model associated with a master instrument. The master beta coefficient may be at a grid of a target instrument. The device may perform constrained optimization of an objective function, in accordance with a set of constraints, in order to determine a pair of transferred beta coefficients. The constrained optimization may be performed based on an initial pair of transferred beta coefficients, the master beta coefficient, and spectra associated with a scouting set. The device may determine, based on the pair of transferred beta coefficients, a transferred beta coefficient. The device may determine a final transferred beta coefficient based on a set of transferred beta coefficients including the transferred beta coefficient. The final transferred beta coefficient may be associated with generating a transferred calibration model, corresponding to the master calibration model, for use by the target instrument.

A device may obtain a master beta coefficient of a master calibration model associated with a master instrument. The master beta coefficient may be at a grid of a target instrument. The device may perform constrained optimization of an objective function, in accordance with a set of constraints, in order to determine a pair of transferred beta coefficients. The constrained optimization may be performed based on an initial pair of transferred beta coefficients, the master beta coefficient, and spectra associated with a scouting set. The device may determine, based on the pair of transferred beta coefficients, a transferred beta coefficient. The device may determine a final transferred beta coefficient based on a set of transferred beta coefficients including the transferred beta coefficient. The final transferred beta coefficient may be associated with generating a transferred calibration model, corresponding to the master calibration model, for use by the target instrument.

A transmissometer and method for determining a transmissivity of an atmosphere within a chamber. A chamber contains the atmosphere. A light source generates a test beam and a light detector detects the test beam. A periscope is movable between a first position which allows the test beam to pass through the atmosphere in the chamber and into the light detector and a second position in which the test beam is deflected to pass into the light detector without passing through the atmosphere in the chamber. A processor determines the transmissivity of the atmosphere from a transmissivity measurement for the test beam obtained by the light detector when the periscope is in the first position and a transfer standard obtained at the light detector when the periscope is in the second position.

A transmissometer and method for determining a transmissivity of an atmosphere within a chamber. A chamber contains the atmosphere. A light source generates a test beam and a light detector detects the test beam. A periscope is movable between a first position which allows the test beam to pass through the atmosphere in the chamber and into the light detector and a second position in which the test beam is deflected to pass into the light detector without passing through the atmosphere in the chamber. A processor determines the transmissivity of the atmosphere from a transmissivity measurement for the test beam obtained by the light detector when the periscope is in the first position and a transfer standard obtained at the light detector when the periscope is in the second position.

A device may obtain a master beta coefficient of a master calibration model associated with a master instrument. The master beta coefficient may be at a grid of a target instrument. The device may perform constrained optimization of an objective function, in accordance with a set of constraints, in order to determine a pair of transferred beta coefficients. The constrained optimization may be performed based on an initial pair of transferred beta coefficients, the master beta coefficient, and spectra associated with a scouting set. The device may determine, based on the pair of transferred beta coefficients, a transferred beta coefficient. The device may determine a final transferred beta coefficient based on a set of transferred beta coefficients including the transferred beta coefficient. The final transferred beta coefficient may be associated with generating a transferred calibration model, corresponding to the master calibration model, for use by the target instrument.

A device may obtain a master beta coefficient of a master calibration model associated with a master instrument. The master beta coefficient may be at a grid of a target instrument. The device may perform constrained optimization of an objective function, in accordance with a set of constraints, in order to determine a pair of transferred beta coefficients. The constrained optimization may be performed based on an initial pair of transferred beta coefficients, the master beta coefficient, and spectra associated with a scouting set. The device may determine, based on the pair of transferred beta coefficients, a transferred beta coefficient. The device may determine a final transferred beta coefficient based on a set of transferred beta coefficients including the transferred beta coefficient. The final transferred beta coefficient may be associated with generating a transferred calibration model, corresponding to the master calibration model, for use by the target instrument.

A device may obtain a master beta coefficient of a master calibration model associated with a master instrument. The master beta coefficient may be at a grid of a target instrument. The device may perform constrained optimization of an objective function, in accordance with a set of constraints, in order to determine a pair of transferred beta coefficients. The constrained optimization may be performed based on an initial pair of transferred beta coefficients, the master beta coefficient, and spectra associated with a scouting set. The device may determine, based on the pair of transferred beta coefficients, a transferred beta coefficient. The device may determine a final transferred beta coefficient based on a set of transferred beta coefficients including the transferred beta coefficient. The final transferred beta coefficient may be associated with generating a transferred calibration model, corresponding to the master calibration model, for use by the target instrument.

A spectroscopic device includes: an analysis optical system; a length measurement optical system; and a calculation device. The analysis optical system includes a moving mirror and a first light receiving element. The length measurement optical system includes a second light source configured to emit laser light, a gas cell with a gas that absorbs light of a predetermined wavelength sealed therein and configured to cause the laser light to be incident thereon, an emitted light amount detection unit configured to detect an amount of light emitted from the gas cell and output an emitted light amount detection signal, a light source control unit configured to control a wavelength of the laser light based on the emitted light amount detection signal, and a length measurement unit configured to use the laser light to obtain a displacement signal corresponding to a position of the moving mirror, and the calculation device includes a moving mirror position calculation unit, a light intensity calculation unit, and a Fourier transform unit configured to generate a spectral pattern.

A device may obtain a master beta coefficient of a master calibration model associated with a master instrument. The master beta coefficient may be at a grid of a target instrument. The device may perform constrained optimization of an objective function, in accordance with a set of constraints, in order to determine a pair of transferred beta coefficients. The constrained optimization may be performed based on an initial pair of transferred beta coefficients, the master beta coefficient, and spectra associated with a scouting set. The device may determine, based on the pair of transferred beta coefficients, a transferred beta coefficient. The device may determine a final transferred beta coefficient based on a set of transferred beta coefficients including the transferred beta coefficient. The final transferred beta coefficient may be associated with generating a transferred calibration model, corresponding to the master calibration model, for use by the target instrument.

A method for monitoring a plurality of process chambers, the method includes generating an optical beam at a light source. The method further includes dividing the optical beam into a plurality of light beams. The method further includes providing the plurality of light beams to the plurality of process chambers. And the method further includes measuring the plurality of light beams after being reflected within the plurality of process chambers.