G01P15/0915

High-G and high-precision piezoelectric-based linear accelerometers
11693022 · 2023-07-04 · ·

An accelerometer including: a housing having an internal cavity; a piezoelectric material disposed in the internal cavity; a mass movable disposed in the internal cavity; and a spring disposed between the piezoelectric material and a portion of the housing, the spring being compressively preloaded against the piezoelectric material; wherein the mass is movable when the housing experiences an acceleration such that the mass acts upon the spring and the spring acts against the piezoelectric material, the piezoelectric material outputting a signal corresponding to a magnitude of the acceleration.

PIEZOELECTRIC TRANSDUCER
20170370962 · 2017-12-28 ·

A piezoelectric transducer for measuring a force includes a base element; a pre-loading element; at least one effective main seismic mass aggregation of pre-loaded parts capable of producing the force when being accelerated; a main piezoelectric ceramic element including a first piezoelectric ceramic; at least one compensation seismic mass aggregation of pre-loaded parts capable of producing a compensation force when being accelerated; a compensation piezoelectric ceramic element including a second piezoelectric ceramic. The first piezoelectric ceramic has a thermal sensitivity shift smaller than the second piezoelectric ceramic. The main piezoelectric ceramic element is oriented with respect to the force to be measured and the compensation piezoelectric ceramic element is oriented with respect to the compensation force such that the main electric charge and the compensation electric charge are opposite in polarity.

PIEZOELECTRIC SENSOR ELEMENT FOR A SHEAR MODE ACCELEROMETER

A piezoelectric shear mode sensor element comprises a sensor block made of a piezoelectric material having an intrinsic polarization axis, wherein the piezoelectric material is also pyroelectric. The sensor block has in an axial direction axial ends and in lateral directions perpendicular to the axial direction lateral side faces. The sensor electrodes are adapted for capturing a shear mode sensor signal. The sensor element further comprises a discharge guard adapted to locally alter and/or rearrange charges so as to counteract pyroelectric displacement charges on the lateral side faces of the sensor block.

Acceleration transducer

An acceleration transducer defines a rectangular coordinate system with two orthogonal horizontal axes that are both normal to a vertical axis and includes a main body defining tangential side faces arranged tangentially to the vertical axis, and normal side faces arranged normally to the vertical axis. The transducer includes exactly three piezoelectric elements and three seismic masses. Exactly one piezoelectric element is secured to each of the three tangential side faces, and exactly one seismic mass is secured to each of the three piezoelectric elements. Each piezoelectric element has a high sensitivity for a shear force exerted by the attached seismic mass along a principal tangential axis that is another one of the three axes for each of the three piezoelectric elements.

SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.

ACCELERATION TRANSDUCER
20230258685 · 2023-08-17 ·

An acceleration transducer defines a rectangular coordinate system with two orthogonal horizontal axes that are both normal to a vertical axis and includes a main body disposed within a housing and defining tangential side faces arranged tangentially to the vertical axis, and a normal side face arranged normally to the vertical axis. A piezoelectric element is secured to one of the tangential side faces, and a seismic mass is secured to the piezoelectric element. A signal output is attached to the housing and includes a signal conductor spaced apart by an assembly gap from a tangential side face that is not attached to the piezoelectric element. The assembly gap extends perpendicularly to the vertical axis. The normal side face includes at least one main body output conductor spanning the assembly gap in a direction perpendicular to the vertical axis and directly contacting the signal conductor.

ACCELERATION TRANSDUCER
20220137089 · 2022-05-05 ·

An acceleration transducer defines a rectangular coordinate system with two orthogonal horizontal axes that are both normal to a vertical axis and includes a main body defining tangential side faces arranged tangentially to the vertical axis, and normal side faces arranged normally to the vertical axis. The transducer includes exactly three piezoelectric elements and three seismic masses. Exactly one piezoelectric element is secured to each of the three tangential side faces, and exactly one seismic mass is secured to each of the three piezoelectric elements. Each piezoelectric element has a high sensitivity for a shear force exerted by the attached seismic mass along a principal tangential axis that is another one of the three axes for each of the three piezoelectric elements.

ACCELERATION TRANSDUCER
20220137090 · 2022-05-05 ·

An acceleration transducer defines a rectangular coordinate system with two orthogonal horizontal axes that are both normal to a vertical axis and includes a main body defining tangential side faces arranged tangentially to the vertical axis, and normal side faces arranged normally to the vertical axis. The transducer includes a converter unit, exactly three piezoelectric elements and three seismic masses. Each piezoelectric element generates piezoelectric charges transmitted to the converter unit, which is only and directly arranged on a normal side face of the main body or only on a support that is attached to a normal side face of the main body. Exactly one piezoelectric element is secured to each of the three tangential side faces, and exactly one seismic mass is secured to each of the three piezoelectric elements. Each piezoelectric element has a high sensitivity for a shear force exerted by the attached seismic mass along a principal tangential axis that is another one of the three axes for each of the three piezoelectric elements.

ACCELERATION TRANSDUCER
20220137086 · 2022-05-05 ·

An acceleration transducer defines a rectangular coordinate system with two orthogonal horizontal axes that are both normal to a vertical axis and includes a main body disposed within a housing and defining tangential side faces arranged tangentially to the vertical axis, and a normal side face arranged normally to the vertical axis. A piezoelectric element is secured to one of the tangential side faces, and a seismic mass secured to the piezoelectric element. A signal output is attached to the housing and includes a signal conductor spaced apart by an assembly gap from a tangential side face that is not attached to the piezoelectric element. The assembly gap extends perpendicularly to the vertical axis. The normal side face includes main body output conductors spanning the assembly gap in a direction perpendicular to the vertical axis and directly contacting the signal conductor.

Three-axis piezoelectric accelerometer

A three-axis piezoelectric accelerometer, comprising: a housing, three charge output elements arranged inside the housing, and a connector electrically connected to the three charge output elements, wherein the three charge output elements are respectively used for detecting vibrations in directions along X-axis, Y-axis and Z-axis which are perpendicular to each other in pairs. The charge output element comprises: a support comprising a connecting part; a piezoelectric element being an annular structural body, wherein the piezoelectric element is connected to the connecting part in a sheathed manner and is provided with a first deformation groove penetrating a side wall of the piezoelectric element to disconnect the piezoelectric element in a circumferential direction; and a mass block being an annular structural body, wherein the mass block is connected to the piezoelectric element in the sheathed manner, and the piezoelectric element is in interference fit with the connecting part and the mass block.