An acceleration detection device includes a board including first and second surfaces, an acceleration detector on the first surface of the board, first circuit components on the second surface of the board, a seal including a first sealing portion covering the acceleration detector on the first surface of the board and a second sealing portion covering the first circuit components on the second surface of the board, the second sealing portion including an inner surface facing the board and an outer surface on a side opposite to the inner surface, the seal being made of a resin, and a high-rigidity body extending in a direction in which the outer surface and the second surface of the board are connected to each other within the second sealing portion, the high-rigidity body having higher rigidity than the seal.

A measurement unit module includes a printed circuit board (PCB) and electronic components being mounted on a front face of the PCB, a plurality of measurement unit modules are arranged at intervals in an extending direction of a stripped flat cable, the stripped flat cable is electrically connected to back faces of the plurality of PCBs in sequence to form a measurement unit cluster, the measurement unit cluster is packaged and molded by an extrusion technology of silica gel to form the flexible sensing strip, and the flexible sensing strip can be wound into a sensing strip reel. The packaging structure has the beneficial effects that connection integrity between the measurement unit modules is enhanced, connection strength is improved, and reliability of a flexible clinometer is improved. The flexible sensing strip can be wound into the sensing strip reel so as to be convenient to carry and convey.

A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first cantilever beam element.

An acceleration detection device includes a piezoelectric element including a top surface and a bottom surface, a sheet-shaped adhesive provided on the bottom surface of the piezoelectric element, and a first package member to which the piezoelectric element is bonded by the sheet-shaped adhesive.

A mechanical link for microelectromechanical and/or nanoelectromechanical structure, includes a mobile component, a fixed component extending on a plane, and apparatus for detecting displacement of the mobile component relative to the fixed component. The mechanical link includes: a first link to the fixed component and mobile component, allowing rotation of the mobile component relative to the fixed component about an axis of rotation; a second link connecting the mobile component to the detection apparatus at a distance and perpendicular to the axis of rotation; a third link to the fixed component and detection apparatus, guiding the detection apparatus in a direction of translation in the plane; wherein the combination of the second link and third link can transform rotational movement of the mobile component into translational movement of the detection apparatus in the direction of translation. The detection apparatus includes a piezoresistive/piezoelectric strain gauge, resonance beam, capacitance, or combination thereof.

A method and geophysical acceleration sensor (100) for measuring seismic data and also for protecting the sensor from shock. The sensor includes a housing (102); a flexible beam (104) having a first end fixedly attached to the housing; a piezoelectric layer (108) attached to the flexible beam; a seismic mass (112) attached to the flexible beam; and a first movement limiter (130) connected to the housing and configured to limit a movement of the flexible beam. A distance between a tip of the first movement limiter and the flexible beam is adjustable.

Apparatus and techniques are disclosed relating to a two-axis sensing element. In various embodiments, a two-axis sensing element includes a mounting plate that includes a first pair of mounting slots oriented in a first direction and a second pair of mounting slots oriented in a second, different direction. Further, in various embodiments, the two-axis sensing element may include a first pair of bender elements and a second pair of bender elements. The first pair of bender elements may be mounted through the first pair of mounting slots such that the first pair of bender elements is oriented in the first direction and the second pair of bender elements may be mounted through the second pair of mounting slots such that the second pair of bender elements is oriented in the second, different direction. In various embodiments, the mounting plate may transect each of the bender elements into two cantilever portions.

The disclosure relates to a piezoelectric acceleration sensor. The piezoelectric acceleration sensor includes: a charge output member comprising a base, a piezoelectric element disposed on the base and a mass, wherein the base includes a supporting portion and a connecting portion disposed on the supporting portion and extending in a first direction, and the piezoelectric element and the mass are sleeved on the connecting portion; a shielding cover sleeved on the connecting portion, wherein the shielding cover is connected to the connecting portion and the supporting portion, the shielding cover forms a shielding space outside a periphery of the connecting portion and above the supporting portion, and the piezoelectric element and the mass are arranged in the shielding space; and a housing coupled with the supporting portion, wherein the housing and the supporting portion form an accommodating space for accommodating the charge output member and the shielding cover.

A MEMS accelerometer includes a supporting structure, at least one deformable group and one second deformable group, which include, respectively, a first deformable cantilever element and a second deformable cantilever element, which each have a respective first end, which is fixed to the supporting structure, and a respective second end. The first and second deformable groups further include, respectively, a first piezoelectric detection structure and a second piezoelectric detection structure. The MEMS accelerometer further includes: a first mobile mass and a second mobile mass, which are fixed, respectively, to the second ends of the first and second deformable cantilever elements and are vertically staggered with respect to the first and second deformable cantilever elements, respectively; and a first elastic structure, which elastically couples the first and second mobile masses.

A SAW-based inertial sensor incorporates a curved SAW drive resonator and graphene electrodes to increase the Coriolis force on a pillar array and generate secondary SAW waves that create a strain-induced hyperfine frequency transition in an enclosed alkali atom vapor, in conjunction with an integrated FP resonator to measure very small inertial signals corresponding to 10 μg and 0.01°/hr, representing a dynamic range of 10 orders of magnitude.