An example system comprising: a microelectromechanical system (MEMS) vibrating beam accelerometer (VBA) comprising: a proof mass; and a first resonator mechanically coupled to the proof mass; a first electrode configured to apply a force to the proof mass.

The disclosure describes a magnetic circuit assembly that includes a magnet assembly and an excitation ring. The magnet assembly defines an input axis and includes a pole piece and a magnet underlying the pole piece. The excitation ring includes a base and an outer ring positioned around the magnet assembly. The base includes a platform layer underlying the magnet and a base layer underlying the platform layer. The outer ring overlies the base layer. An inner portion of the outer ring faces the magnet assembly and an outer portion of the outer ring is configured to couple to an outer radial portion of a proof mass assembly. The pole piece and the platform layer include a high magnetic permeability material.

The purpose of the present invention is to provide a method for manufacturing a three-dimensionally structured member which can be made by a simpler process. The method for manufacturing a three-dimensionally structured member includes shaping a flat plate-shaped base member to produce a three-dimensionally structured member having a plurality of sections that are different from one another in thickness. The manufacturing method comprises: a mask formation step for forming a mask over the whole of at least one main surface of the base member; a mask removal step for removing a part of the mask; and an etching step for etching an exposed part of the base member wherein a combination of the mask removal step and the etching step is performed on the mask and the base member that correspond to each of the plurality of sections of the three-dimensionally structured member, in the order from thinnest to the thickest of thicknesses of the three-dimensionally structured members.

A physical quantity sensor includes: a base portion; a first arm portion, a second arm portion, and a third arm portion that are coupled to the base portion and that are provided with fixing portions; a movable portion disposed between the first arm portion and the second arm portion and between the first arm portion and the third arm portion in a plan view; a constricted portion that is disposed between the base portion and the movable portion, and that couples the base portion and the movable portion; and a physical quantity detection element that is disposed across the constricted portion in the plan view and that is attached to the base portion and the movable portion. Thin portions are formed at least at two positions in at least one of the second arm portion and the third arm portion.

An acceleration detection device includes a piezoelectric element including a top surface and a bottom surface, a sheet-shaped adhesive provided on the bottom surface of the piezoelectric element, and a first package member to which the piezoelectric element is bonded by the sheet-shaped adhesive.

The method and system for determining position with improved calibration allows a device to initiate activity at the proper location, such as navigating a drill bit through a rock formation. A pair of position sensors in opposite orientations generates position data signals. A temperature sensor detects temperature and duration of the temperature. An adjusted plastic bias value is determined by a processor module based on the temperature data signal, the duration of the temperature, and the position data signals so as to account for bias and hysteresis errors and error correction based on the opposing orientations of the pair of position sensors. A position value is set according to the adjusted plastic bias value so that the position value is more accurate. The activity of the terminal device is initiated or maintained according to the position value calibrated by the adjusted plastic bias value.

An accelerometer includes an upper stator, a lower stator, and a proof mass assembly disposed between the upper and the lower stator. At least one of the upper stator or the lower stator includes an excitation ring, a magnet coupled to the excitation ring, and an asymmetric pole piece coupled to a top surface of the magnet. The asymmetric pole piece covers at least a portion of the top surface of the magnet such that a center of magnetic flux associated with the at least one of the upper stator or the lower stator is aligned with a center of mass of the proof mass assembly.

The invention relates to a device for detecting acceleration. The device contains: a frame; a mass; a lever arm connected to the mass, wherein the mass is provided at a first lever position; an optical fiber having a fiber-optic sensor; and a compensation element for disturbance variables, wherein the compensation element for disturbance variables is connected to the lever arm or the mass and wherein the compensation element for disturbance variables is connected to the frame.

The present disclosure provides a composite sensor and a manufacturing method thereof. The composite sensor includes: a first substrate and a second substrate configured to be laminated with the first substrate; a pressure sensor located on the first substrate and configured to sense a change in external pressure; and an acceleration sensor located on the second substrate and configured to sense a change in acceleration. A pressure film of the pressure sensor is configured to be spaced from the second substrate to form a pressure cavity, and a proof mass of the acceleration sensor is configured to be spaced from the first substrate to form a first anti-collision cavity. The present disclosure may reduce the chip area and reduce mutual interference.

A MEMS accelerometer includes a supporting structure, at least one deformable group and one second deformable group, which include, respectively, a first deformable cantilever element and a second deformable cantilever element, which each have a respective first end, which is fixed to the supporting structure, and a respective second end. The first and second deformable groups further include, respectively, a first piezoelectric detection structure and a second piezoelectric detection structure. The MEMS accelerometer further includes: a first mobile mass and a second mobile mass, which are fixed, respectively, to the second ends of the first and second deformable cantilever elements and are vertically staggered with respect to the first and second deformable cantilever elements, respectively; and a first elastic structure, which elastically couples the first and second mobile masses.