A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.

An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.

An acceleration sensor includes: a semiconductor substrate that includes a support substrate and a semiconductor layer; a first-direction movable electrode; a second-direction movable electrode; a first-direction fixed electrode; a second-direction fixed electrode; and a support member. The acceleration sensor is configured to detect acceleration in a first direction in the surface direction of the semiconductor substrate and acceleration in a second direction orthogonal to the first direction and parallel to the surface direction. The first-direction movable electrode and the first-direction fixed electrode are provided such that an angle formed by an extended direction of the first-direction movable electrode and the first-direction fixed electrode and the second direction is sin.sup.−1(d/L)[deg], and the second-direction movable electrode and the second-direction fixed electrode are provided such that an angle formed by an extended direction of the second-direction movable electrode and the second-direction fixed electrode and the first direction is sin.sup.−1(d/L)[deg].

An inertial force sensor includes: an acceleration detection element; a temperature sensor that detects an ambient temperature of the acceleration detection element; a bridge circuit that processes an output signal from the acceleration detection element; an AD converter that converts an analog signal output from the bridge circuit into a digital signal, and outputs the digital signal; a calculation circuit that performs calculation on the output signal from the AD converter; and a storage that stores correction data for correcting a variation in the output signal from the AD converter due to a temperature change. The correction data are coefficients of a formula expressed by a calibration curve that is a quadratic or higher-degree curve, and the storage stores, as the correction data, the coefficients of the calibration curve of each of a plurality of patterns that differ between a predetermined temperature or more and less than the predetermined temperature.

A motion measurement apparatus according to an embodiment of the present technology includes a controller unit. The controller unit extracts, from an acceleration in each direction of three axes that includes a dynamic acceleration component and a static acceleration component of a detection target that moves within a space, the dynamic acceleration component of the detection target, and generates, as a control signal, a change in kinematic physical quantity of a posture of the detection target from the dynamic acceleration component.

A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.

A physical quantity sensor includes an anchor fixed to a substrate, a support beam, a fixed electrode unit, a movable body, and a damper unit. The fixed electrode unit is provided at the substrate. One end of the support beam is coupled to the anchor. The movable body includes a movable electrode unit and a frame unit. The movable electrode unit includes a movable electrode facing a fixed electrode of the fixed electrode unit. The frame unit couples the movable electrode unit and the other end of the support beam. The damper unit is coupled to the frame unit, is provided in a region surrounded by the support beam and the frame unit, and damps vibration of the frame unit in a first direction.

A signal processing apparatus according to an embodiment of the present technology includes an acceleration arithmetic unit. The acceleration arithmetic unit extracts, on a basis of a first detection signal and a second detection signal, the first detection signal including information related to an acceleration along at least a uniaxial direction and having an alternating-current waveform corresponding to the acceleration, the second detection signal including the information related to the acceleration and having an output waveform in which an alternating-current component corresponding to the acceleration is superimposed on a direct-current component, a dynamic acceleration component and a static acceleration component from the acceleration.

A vehicle control apparatus according to an embodiment of the present technology includes a control unit. The control unit generates a control signal for controlling behavior of a vehicle body on a basis of a first acceleration detection signal and a second acceleration detection signal, the first acceleration detection signal including information relating to an acceleration acting on the vehicle body, the first acceleration detection signal having an alternating current waveform corresponding to the acceleration, the second acceleration detection signal including information relating to the acceleration, the second acceleration detection signal having an output waveform, an alternating current component corresponding to the acceleration being superimposed on a direct current component in the output waveform.

A sensor element according to the present technology includes a base portion, a movable portion, first and second bridge portions, and an acceleration detector unit. The movable portion is movable relative to the base portion by reception of an acceleration along at least a uniaxial direction. The first bridge portion includes a first beam and a first structure, the first beam connects the base portion and the movable portion, the first structure being provided between the first beam and the base portion and supporting the first beam. The second bridge portion includes a second beam and a second structure, the second beam extends in a second axis direction orthogonal to the first axis and parallel to the main surface and connects the base portion and the movable portion, the second structure being provided between the second beam and the base portion and supports the second beam.