A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.

A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, means for measuring a force including at least one resonator of resonant frequency ω.sub.rn, said force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator, said decoupling structure including a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ω.sub.d is such that ωa <ω.sub.d< ω.sub.rn, said decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.

FIG. 1

A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.

A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.

An accelerometer comprising a plurality of proof-masses moveable along a measurement axis; a respective spring rigidly attached to each proof-mass, configured to exert an elastic recall on the proof-mass in the measurement axis; and a fixed stop associated with each proof-mass, arranged to intercept the proof-mass when the acceleration in the measurement axis increases by a step. The proof-masses are suspended in series with respect to one another by springs in the measurement axis, the stops being arranged to successively intercept the respective proof-masses for increasing thresholds of acceleration.

An accelerometer comprising a plurality of proof-masses moveable along a measurement axis; a respective spring rigidly attached to each proof-mass, configured to exert an elastic recall on the proof-mass in the measurement axis; and a fixed stop associated with each proof-mass, arranged to intercept the proof-mass when the acceleration in the measurement axis increases by a step. The proof-masses are suspended in series with respect to one another by springs in the measurement axis, the stops being arranged to successively intercept the respective proof-masses for increasing thresholds of acceleration.

A micromechanical spring for a sensor element, including at least two spring sections formed along a sensing axis, the at least two spring sections each having a defined length, and the at least two spring sections having different defined widths.

The invention relates to an accelerometer comprising a plurality of proof-masses (M1-M4) moveable along a measurement axis (AB); a respective spring (K1-K4) rigidly attached to each proof-mass, configured to exert an elastic recall on the proof-mass in the measurement axis; a fixed stop (S1-S4) associated with each proof-mass, arranged to intercept the proof-mass when the acceleration in the measurement axis increases by a step; and an electrical contact associated with each stop, configured to be closed when the associated proof-mass reaches the stop. The proof-masses are suspended in series with respect to one another by springs in the measurement axis, the stops being arranged to successively intercept the respective proof-masses for increasing thresholds of acceleration.

The subject of the invention is a spring sensor element 1, comprising carbon nanotubes 6 on a carrier 2, wherein the carbon nanotubes 6 are arranged in CNT blocks 10, 20, 30, 40, wherein the carbon nanotubes 6 of each CNT block 10, 20, 30, 40 preferably have the same length and the same alignment with respect to the carrier 2, wherein at least the highest one of the CNT blocks 10, 20, 30, 40 is arranged nearby at least two electric contacts 60, 61, 62. The spring sensor element 1 has at least one additional neighboring CNT block 20, 30, 40 of the height H2 in addition to the first CNT block 10 of the height H1, wherein the heights H1 and H2 differ by a factor of at least 2.

The subject of the invention is a spring sensor element 1, comprising carbon nanotubes 6 on a carrier 2, wherein the carbon nanotubes 6 are arranged in CNT blocks 10, 20, 30, 40, wherein the carbon nanotubes 6 of each CNT block 10, 20, 30, 40 preferably have the same length and the same alignment with respect to the carrier 2, wherein at least the highest one of the CNT blocks 10, 20, 30, 40 is arranged nearby at least two electric contacts 60, 61, 62. The spring sensor element 1 has at least one additional neighboring CNT block 20, 30, 40 of the height H2 in addition to the first CNT block 10 of the height H1, wherein the heights H1 and H2 differ by a factor of at least 2.