The present disclosure relates to a reflective FPM using a parabolic mirror, and particularly to a reflective FPM using a parabolic mirror including: a first illuminator having a first panel that is provided with numerous LED light sources and composed of a first LED array irradiating a plurality of first LED beams to a measurement object sequentially at different angles through an objective lens; a second illuminator having a second panel that is provided with numerous LED light sources and composed of a second LED array irradiating a plurality of second LED beams to the measurement object sequentially at different angles, following irradiation from the first illuminator; a parabolic mirror reflecting each of second beams generated from the second illuminator, allowing being incident on the measurement object; a lens configured to collect a beam from the measurement object to which the first and second LED beams were irradiated; and a photodetector receiving light from the lens and acquires images for each of a plurality of first and second beams.

A microscope system is provided with a microscope that acquires images at least at a first magnification and a second magnification higher than the first magnification, and a processor. The processor is configured to specify a type of a container in which a specimen is placed, and when starting observation of the specimen placed in the container at the second magnification, the processor is configured to specify an observation start position by performing object detection according to the type of container on a first image that includes the container acquired by the microscope at the first magnification, and control a relative position of the microscope with respect to the specimen such that the observation start position is contained in a field of view at the second magnification of the microscope.

A light source module for a microscope, including a light source configured to emit illumination light along an illumination light path, at least one light blocking shutter configured to be moved into and out of the illumination light path, and at least one light sensor configured to detect an intensity of the illumination light propagating along the illumination light path. The at least one light sensor is integrated with the at least one light blocking shutter to be moved therewith into and out of the illumination light path.

A specimen machining device includes an illumination system that illuminates a specimen; a camera that photographs the specimen; and a processing unit that controls the illumination system and the camera, and acquires a machining control image which is used for controlling an ion source and a display image which is displayed on a display unit. The processing unit controls the illumination system to illuminate the specimen under a machining illumination condition; acquires the machining control image by controlling the camera to photograph the specimen illuminated under the machining control illumination condition; controls the ion source based on the machining control image; controls the illumination system to illuminate the specimen under a display illumination condition which is different from the machining control illumination condition; acquires the display image by controlling the camera to photograph the specimen illuminated under the display illumination condition; and displays the display image on the display unit.

A specimen machining device includes an illumination system that illuminates a specimen; a camera that photographs the specimen; and a processing unit that controls the illumination system and the camera, and acquires a machining control image which is used for controlling an ion source and a display image which is displayed on a display unit. The processing unit controls the illumination system to illuminate the specimen under a machining illumination condition; acquires the machining control image by controlling the camera to photograph the specimen illuminated under the machining control illumination condition; controls the ion source based on the machining control image; controls the illumination system to illuminate the specimen under a display illumination condition which is different from the machining control illumination condition; acquires the display image by controlling the camera to photograph the specimen illuminated under the display illumination condition; and displays the display image on the display unit.

A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

To make an object to be observed observable with high resolution and to make an inclination angle of a surface of the object to be observed recognizable over a wide range.

An image observation system 100 provided with a lighting optical system 116 irradiating an object to be observed W with an illumination light and an observation optical system 122 collecting object light from the object to be observed W to guide to a detector 126, the image observation system 100 comprising an objective lens 122A opposed to the object to be observed W, a beam splitter 116B disposed on an opposite side to the object to be observed W with respect to the objective lens 122A, and a relay image RI of the illumination light splitting member 114 for dividing wavelength regions R, G and B of the illumination light into a plurality of different solid angle regions IS1, IS2 and IS3, being disposed in front of the objective lens 122A.

To make an object to be observed observable with high resolution and to make an inclination angle of a surface of the object to be observed recognizable over a wide range.

An image observation system 100 provided with a lighting optical system 116 irradiating an object to be observed W with an illumination light and an observation optical system 122 collecting object light from the object to be observed W to guide to a detector 126, the image observation system 100 comprising an objective lens 122A opposed to the object to be observed W, a beam splitter 116B disposed on an opposite side to the object to be observed W with respect to the objective lens 122A, and a relay image RI of the illumination light splitting member 114 for dividing wavelength regions R, G and B of the illumination light into a plurality of different solid angle regions IS1, IS2 and IS3, being disposed in front of the objective lens 122A.

An observation apparatus includes a display apparatus that displays a display pattern, a display projection optical system that projects a light beam from the display apparatus, and forms an image of the display pattern, a combining optical element that combines a light beam from a sample and a light beam from the display apparatus, and an eyepiece optical system that enables an observer to simultaneously observe an image of the sample and an image of the display pattern, in which a numerical aperture (NA) of a light beam from the display apparatus is smaller than a maximum value of an NA of a light beam from the sample, and is larger than a minimum value of an NA of a light beam from the sample, at a position of an image on an optical path that is formed after light beams are combined by the combining optical element.