An adaptive optical element for microlithography comprises at least one manipulator for changing the shape of an optical surface of the optical element. The manipulator comprises a one-piece dielectric medium which is deformable by applying an electric field, electrodes that are arranged in interconnection with the one-piece dielectric medium, and a voltage generator which is wired to the electrodes and configured to apply to the electrodes, firstly, a control voltage that serves to change a longitudinal extent of the dielectric medium and, secondly, an AC voltage that serves to heat the dielectric medium.

An optoelectronic device, including a tunable optical filter or tunable optical filter with photodiode, uses voltage differentials to filter an optical signal passing along an optical path. A membrane has an electrode and is disposed adjacent a fixed mirror and another. A central portion of the membrane is distanced from the fixed mirror and has an aperture in which a second mirror is disposed. This second mirror translates with the membrane at a freespace gap relative to the fixed mirror when the electrodes are subject to the voltage differentials. In turn, the freespace gap is configured as a Fabry-Perot etalon to pass one or more spectral frequencies of the optical signal along the optical path. The membrane is shaped and reinforced to limit possible bowing. The translatable mirror in the aperture of the membrane is also shaped and reinforced to limit it from possible bowing as well.

An optoelectronic device, including a tunable optical filter or tunable optical filter with photodiode, uses voltage differentials to filter an optical signal passing along an optical path. A membrane has an electrode and is disposed adjacent a fixed mirror and another. A central portion of the membrane is distanced from the fixed mirror and has an aperture in which a second mirror is disposed. This second mirror translates with the membrane at a freespace gap relative to the fixed mirror when the electrodes are subject to the voltage differentials. In turn, the freespace gap is configured as a Fabry-Perot etalon to pass one or more spectral frequencies of the optical signal along the optical path. The membrane is shaped and reinforced to limit possible bowing. The translatable mirror in the aperture of the membrane is also shaped and reinforced to limit it from possible bowing as well.

A method for controlling a deformable mirror surface shape based on a radial primary function processes samples of a neural network training set, obtains elements of the neural network training set, characterizes the complex surface shape of the deformable mirror in each sample by using a radial primary function, takes characterization parameters of the surface shape in the each sample as an input of a neural network, and trains the neural network by taking a voltage of each piezoelectric ceramic corresponding to the complex surface shape as a corresponding output of the neural network. Training times of the neural network are consistent with a number of the samples. Finally, the trained neural network is obtained to verify the training effect of the neural network. According to the characterization parameters of the required surface, the neural network is used to control the deformable mirror to generate the required surface.

A vehicle, a head-up displaying system and a projector are provided, the projector including a displaying component (1) configured to project an image, and a three-mirror optical device positioned in an optical path of an emergent light of the displaying component (1), configured to reflect the image projected by the displaying component (1) onto a front windshield (5) such that the front windshield (5) reflects the image to eyes of a driver and including: a zoom lens assembly (2) having a zoom lens (21) for zooming in/out the image projected by the displaying component (1), and a first curvature adjusting component configured to adjust a curvature of the zoom lens (21); an image quality compensation lens assembly (3) having an image quality compensation lens (31) configured to compensate for an image quality distortion caused during a change of the curvature of the zoom lens (21), and a second curvature adjusting component configured to adjust a curvature of the image quality compensation lens (31); and a front windshield compensation lens assembly (4) configured to compensate for an image distortion caused by the front windshield (5).

A tunable filter that may include a pair of optical components, wherein there is an optical gap between the pair of optical components; and a pair of actuating elements that are configured, once supplied with at least one actuating signal, to be positioned at an actuation gap from each other and to define the optical gap; and wherein the optical gap is substantially smaller than the actuation gap.

A tunable filter that may include a pair of optical components, wherein there is an optical gap between the pair of optical components; and a pair of actuating elements that are configured, once supplied with at least one actuating signal, to be positioned at an actuation gap from each other and to define the optical gap; and wherein the optical gap is substantially smaller than the actuation gap.

A reflective active variable lens includes an upper electrode, a lower electrode disposed in parallel to the upper electrode, a deformation part disposed between the upper electrode and the lower electrode, a reflective part disposed on the upper electrode, and a support part disposed to surround the deformation part. Here, the deformation part and the support part are connected to each other to provide a single structure, the deformation part is expanded from an initial shape when an electric field is formed between the upper electrode and the lower electrode, and the expanded deformation part is contracted when the electric field is removed and restored to the initial shape.

A reflective active variable lens includes an upper electrode, a lower electrode disposed in parallel to the upper electrode, a deformation part disposed between the upper electrode and the lower electrode, a reflective part disposed on the upper electrode, and a support part disposed to surround the deformation part. Here, the deformation part and the support part are connected to each other to provide a single structure, the deformation part is expanded from an initial shape when an electric field is formed between the upper electrode and the lower electrode, and the expanded deformation part is contracted when the electric field is removed and restored to the initial shape.

The present invention causes a holder to hold a plane mirror without causing damage to a reflection layer. Provided is a head-up display comprising a housing, a display device that emits display light, a plane mirror that reflects the display light, and a holder that holds the plane mirror, wherein the plane mirror has a base material, and a reflection layer provided on the base material and including a resin film, and the holder abuts on a portion of the base material in which the reflection layer is not provided.