A manufacturing apparatus of a semiconductor device includes: a stage; a bonding head, including a mounting tool, a tool heater, and a lifting and lowering mechanism; and a controller performing bonding processing. The controller performs, in the bonding processing: first processing in which, after a chip is brought into contact with a substrate, as heating of the chip is started, the chip is pressurized against the substrate; distortion elimination processing in which, after the first processing and before melting of a bump, the lifting and lowering mechanism is driven in a lifting direction, thereby eliminating distortion of the bonding head; and second processing in which, after the distortion elimination processing, position control is performed on the lifting and lowering mechanism so as to cancel thermal expansion and contraction of the bonding head, thereby maintaining a gap amount at a specified target value.

A package structure includes a molding material, at least one through-via, at least one conductor, at least one dummy structure and an underfill. The through-via extends through the molding material. The conductor is present on the through-via. The dummy structure is present on the molding material and includes a dielectric material. The underfill is at least partially present between the conductor and the dummy structure.

The present disclosure provides an antenna packaging structure radiating electromagnetic waves in a horizontal direction parallel to the device plane and a method making the same. The method includes: providing a support substrate, and forming a separation layer; forming a rewiring layer on the separation layer; forming an antenna array layer on the rewiring layer, the antenna array layer is electrically connected to the metal wire layer; the antenna array layer includes a plurality of antennas which radiates e-m waves in a horizontal direction; each antennas comprises first metal sheets extending along a first direction and second metal sheets extending along a second direction, the first metal sheets are arranged with sheets in parallel and spaced by an sheet-to-sheet interval, second metal sheets are arranged with sheets in parallel and spaced by an sheet-to-sheet interval; forming a molding material layer, which molds the antenna array layer.

A solder reflow apparatus may include a reflow chamber receiving a heat transfer fluid. The heat transfer fluid transfers heat to a solder for mounting an electronic part on a substrate. A heater heats the heat transfer fluid in the reflow chamber. A rail is arranged in an upper region of the reflow chamber and extends along a horizontal direction. A stage module may be movably connected to the rail and supports the substrate. The controller controls a positioning of the stage module to move the substrate supported by the stage module to different heights in a vertical direction.

An interconnection system includes a mating substrate that is configured to be placed in electrical communication with a main board along an insertion direction so as to define a separable interface. The interconnection system is configured to align the mating substrate with the main board along first and second transverse directions that are perpendicular to each other and to the insertion direction.

Embodiments include a paste transfer tool (PTT), a semiconductor package, and a method of forming the semiconductor package with the paste transfer tool. The PTT includes a top surface and a bottom surface. The PTT also includes one or more pins, where each pin has a first end and a second end, and where the first end is disposed on the body and the second end has a nozzle tip. The method of forming the semiconductor package includes dipping the nozzle tip of the PTT in a paste reservoir to form paste dots on the nozzle tip; disposing the paste dots on one or more pads of a substrate with the PTT; and forming one or more bumps from the on paste dots on the one or more pads of the substrate, where the pads of the substrate are positioned on one or more regions of the substrate.

A package structure includes a molding material, at least one through-via, at least one conductor, at least one dummy structure and an underfill. The through-via extends through the molding material. The conductor is present on the through-via. The dummy structure is present on the molding material and includes a dielectric material. The underfill is at least partially present between the conductor and the dummy structure.

The present disclosure provides an antenna packaging structure radiating electromagnetic waves in a horizontal direction parallel to the device plane and a method making the same. The method includes: providing a support substrate, and forming a separation layer; forming a rewiring layer on the separation layer; forming an antenna array layer on the rewiring layer, the antenna array layer is electrically connected to the metal wire layer; the antenna array layer includes a plurality of antennas which radiates e-m waves in a horizontal direction; each antennas comprises first metal sheets extending along a first direction and second metal sheets extending along a second direction, the first metal sheets are arranged with sheets in parallel and spaced by an sheet-to-sheet interval, second metal sheets are arranged with sheets in parallel and spaced by an sheet-to-sheet interval; forming a molding material layer, which molds the antenna array layer.

The inventive concept relates to an apparatus for manufacturing a semiconductor package and a method of manufacturing a semiconductor package. According to embodiments, the method of manufacturing a semiconductor package may include preparing a substrate including upper conductive pads on an upper surface of the substrate, preparing a first semiconductor chip including first solder balls, wherein a first dielectric layer covering sidewalls of the first solder balls is on a lower surface of the first semiconductor chip, disposing the first semiconductor chip on the substrate such that the first solder balls are on the upper conductive pads, and bonding the first solder balls to the upper conductive pads by applying an alternating current electric field to the first dielectric layer.