H01L21/165

Field-effect transistor with a total control of the electrical conductivity on its channel

The first object of the invention is directed to field-effect gate transistor comprising (a) a substrate, (b) a source terminal, (c) a drain terminal, and (d) a channel between the source terminal and the drain terminal, the channel being a layer of Cu.sub.xCr.sub.yO.sub.2 in which the y/x ratio is superior to 1. The field-effect gate transistor is remarkable in that the channel of Cu.sub.xCr.sub.yO.sub.2 presents a gradient of holes concentration. The second object of the invention is directed to a method for laser annealing a field-effect gate transistor in accordance with the first object of the invention.

FIELD-EFFECT TRANSISTOR WITH A TOTAL CONTROL OF THE ELECTRICAL CONDUCTIVITY ON ITS CHANNEL
20200266277 · 2020-08-20 ·

The first object of the invention is directed to field-effect gate transistor comprising (a) a substrate, (b) a source terminal, (c) a drain terminal, and (d) a channel between the source terminal and the drain terminal, the channel being a layer of Cu.sub.xCr.sub.yO.sub.2 in which the y/x ratio is superior to 1. The field-effect gate transistor is remarkable in that the channel of Cu.sub.xCr.sub.yO.sub.2 presents a gradient of holes concentration. The second object of the invention is directed to a method for laser annealing a field-effect gate transistor in accordance with the first object of the invention.

METHOD FOR PLANARIZING WAFER SURFACE

A method for planarizing a wafer surface comprising: providing a first wafer and a second wafer, oxidizing the first wafer to form an oxide layer on a surface of the first wafer, injecting a foaming ion to form a peeling layer in the first wafer, bonding the first wafer and the second wafer to form a bonded wafer by using the oxide layer as an intermediate layer, raising a temperature to cause the bonded wafer to crack in the peeling layer, a portion of the first wafer remaining on the surface of the oxide layer being a top silicon layer, and the oxide layer being an insulating buried layer, etching a surface of the top silicon layer with a mixed gas of hydrogen and HCl, wherein the mixed gas is injected from a side of the wafer, wherein a flow rate of the mixed gas in an edge region is less than a flow rate of the mixed gas in a central region.