H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/04
the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
H01L21/04
the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
H01L21/34
the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
H01L21/34
the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
H01L21/42
Bombardment with radiation
H01L21/42
Bombardment with radiation
H01L21/423
with high-energy radiation
H01L21/423
with high-energy radiation
H01L21/428
using electromagnetic radiation, e.g. laser radiation
H01L21/428
using electromagnetic radiation, e.g. laser radiation