Patent classifications
H01L2224/16056
Bump structures, semiconductor device and semiconductor device package having the same
The present disclosure relates to bump structures and a semiconductor device and semiconductor device package having the same. The semiconductor device includes a body, at least one conductive metal pad and at least one metal pillar. The body includes a first surface. The at least one conductive metal pad is disposed on the first surface. Each metal pillar is formed on a corresponding conductive metal pad. Each metal pillar has a concave side wall and a convex side wall opposite the first concave side wall, and the concave side wall and the convex side wall are orthogonal to the corresponding conductive metal pad.
Electronic package, manufacturing method thereof and conductive structure
Provided is an electronic package, including a first substrate of a first conductive structure and a second substrate of a second conductive structure, where a first conductive layer, a bump body and a metal auxiliary layer of the first conductive structure are sequentially formed on the first substrate, and a metal pillar, a second conductive layer, a metal layer and a solder layer of the second conductive structure are sequentially formed on the second substrate, such that the solder layer is combined with the bump body and the metal auxiliary layer to stack the first substrate and the second substrate.
ELECTRONIC PACKAGE, MANUFACTURING METHOD THEREOF AND CONDUCTIVE STRUCTURE
Provided is an electronic package, including a first substrate of a first conductive structure and a second substrate of a second conductive structure, where a first conductive layer, a bump body and a metal auxiliary layer of the first conductive structure are sequentially formed on the first substrate, and a metal pillar, a second conductive layer, a metal layer and a solder layer of the second conductive structure are sequentially formed on the second substrate, such that the solder layer is combined with the bump body and the metal auxiliary layer to stack the first substrate and the second substrate. Therefore, the arrangement of the bump body and the metal auxiliary layer allows complete reaction of the IMCs after reflowing the solder layer, and the volume of the conductive structures will not continue to shrink. As such, the problem of cracking of the conductive structures can be effectively averted.
BONDED SEMICONDUCTOR PACKAGE AND RELATED METHODS
Implementations of a semiconductor package may include: a first wafer having a first surface and a first set of blade interconnects, the first set of blade interconnects extending from the first surface. The package may include a second wafer having a first surface and a second set of blade interconnects, the second set of blade interconnects extending from the first surface and oriented substantially perpendicularly to a direction of orientation of the first set of blade interconnects. The first set of blade interconnects may be hybrid bonded to the second set of blade interconnects at a plurality of points of intersection between the first and second set of blade interconnects. The plurality of points of intersection may be located along a length of each blade interconnect of the first set of blade interconnects, and along the length of each blade interconnect of the second set of blade interconnects.
Bonded semiconductor package and related methods
Implementations of a semiconductor package may include: a first wafer having a first surface and a first set of blade interconnects, the first set of blade interconnects extending from the first surface. The package may include a second wafer having a first surface and a second set of blade interconnects, the second set of blade interconnects extending from the first surface and oriented substantially perpendicularly to a direction of orientation of the first set of blade interconnects. The first set of blade interconnects may be hybrid bonded to the second set of blade interconnects at a plurality of points of intersection between the first and second set of blade interconnects. The plurality of points of intersection may be located along a length of each blade interconnect of the first set of blade interconnects, and along the length of each blade interconnect of the second set of blade interconnects.
BUMP STRUCTURE HAVING A SIDE RECESS AND SEMICONDUCTOR STRUCTURE INCLUDING THE SAME
The present disclosure, in some embodiments, relates to a bump structure. The bump structure includes a conductive layer and a solder layer. The solder layer is disposed vertically below and laterally between portions of the conductive layer along a cross-section. The conductive layer is continuous between the portions.
EMBEDDED DIE PACKAGING FOR POWER SEMICONDUCTOR DEVICES FOR IMPROVED SOLDER RELIABILITY
A laminated embedded die package for a power semiconductor device, wherein a laminated body comprises a layup of a plurality of electrically conductive layers and dielectric layers. The die may be mounted in thermal contact with a leadframe. Electrical connections between contact areas of the die, external contact pads of the package and internal conductive layers are made by electrically conductive vias or microvias, formed by laser drilling of vias through the dielectric layers, which are then filled with conductive metal. A plurality of unfilled half-vias are arranged around edges of the laminated body adjacent external contact pads. Half-vias are formed by laser or mechanical drilling along scribe lines before singulation of packages. Surface plating of the half-vias comprises a solder wettable material. The half-vias are unfilled to form a wettable flank which allows for lateral wicking of solder during surface mounting, to facilitate optical inspection of solder reliability.
Bump structure having a side recess and semiconductor structure including the same
The present disclosure relates to an integrated chip structure having a first substrate including a plurality of transistor devices disposed within a semiconductor material. An interposer substrate includes vias extending through a silicon layer. A copper bump is disposed between the first substrate and the interposer substrate. The copper bump has a sidewall defining a recess. Solder is disposed over the copper bump and continuously extending from over the copper bump to within the recess. A conductive layer is disposed between the first substrate and the interposer substrate and is separated from the copper bump by the solder.
Pillar design for conductive bump
A system and method for conductive pillars is provided. An embodiment comprises a conductive pillar having trenches located around its outer edge. The trenches are used to channel conductive material such as solder when a conductive bump is formed onto the conductive pillar. The conductive pillar may then be electrically connected to another contact through the conductive material.
INTEGRATED CIRCUIT (IC) CHIP WITH BUMP INTERCONNECTS EACH HAVING MULTIPLE CONTACT AREAS, RELATED IC PACKAGES, AND METHODS OF FABRICATION
Underfill and bump interconnects in a circuit package expand at different rates during a thermal reflow process, causing stress at one end of a bump interconnect that couples to a metal pad. A bump interconnect having multiple isolated areas of contact between a conductive pillar and the metal pad, rather than a single larger continuous contact area, distributes the concentration of stresses to reduce the peak stress, which reduces the chances of damage due to stress occurring between the metal pad and the conductive pillar or in a dielectric layer adjacent to the metal pad. In some examples, before formation of the conductive pillar, a passivation layer is disposed in a pattern on the metal pad with openings in which a plurality of surfaces of the second end of the conductive pillar contact the metal pad.